JPH01107124U - - Google Patents
Info
- Publication number
- JPH01107124U JPH01107124U JP140288U JP140288U JPH01107124U JP H01107124 U JPH01107124 U JP H01107124U JP 140288 U JP140288 U JP 140288U JP 140288 U JP140288 U JP 140288U JP H01107124 U JPH01107124 U JP H01107124U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- reaction tube
- semiconductor wafer
- tube
- deposition apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000012495 reaction gas Substances 0.000 claims description 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 2
- 239000012808 vapor phase Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP140288U JPH01107124U (lm) | 1988-01-08 | 1988-01-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP140288U JPH01107124U (lm) | 1988-01-08 | 1988-01-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01107124U true JPH01107124U (lm) | 1989-07-19 |
Family
ID=31201256
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP140288U Pending JPH01107124U (lm) | 1988-01-08 | 1988-01-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01107124U (lm) |
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1988
- 1988-01-08 JP JP140288U patent/JPH01107124U/ja active Pending