JPH0373429U - - Google Patents
Info
- Publication number
- JPH0373429U JPH0373429U JP13523789U JP13523789U JPH0373429U JP H0373429 U JPH0373429 U JP H0373429U JP 13523789 U JP13523789 U JP 13523789U JP 13523789 U JP13523789 U JP 13523789U JP H0373429 U JPH0373429 U JP H0373429U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- internal reaction
- boat
- curved shape
- chemical vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13523789U JP2500421Y2 (ja) | 1989-11-20 | 1989-11-20 | 低圧化学気相生成装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13523789U JP2500421Y2 (ja) | 1989-11-20 | 1989-11-20 | 低圧化学気相生成装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0373429U true JPH0373429U (lm) | 1991-07-24 |
JP2500421Y2 JP2500421Y2 (ja) | 1996-06-05 |
Family
ID=31682517
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13523789U Expired - Lifetime JP2500421Y2 (ja) | 1989-11-20 | 1989-11-20 | 低圧化学気相生成装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2500421Y2 (lm) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002280310A (ja) * | 2001-03-19 | 2002-09-27 | Tokyo Electron Ltd | 縦型熱処理装置 |
-
1989
- 1989-11-20 JP JP13523789U patent/JP2500421Y2/ja not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002280310A (ja) * | 2001-03-19 | 2002-09-27 | Tokyo Electron Ltd | 縦型熱処理装置 |
JP4593814B2 (ja) * | 2001-03-19 | 2010-12-08 | 東京エレクトロン株式会社 | 縦型熱処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2500421Y2 (ja) | 1996-06-05 |