JPS6356259U - - Google Patents

Info

Publication number
JPS6356259U
JPS6356259U JP14634886U JP14634886U JPS6356259U JP S6356259 U JPS6356259 U JP S6356259U JP 14634886 U JP14634886 U JP 14634886U JP 14634886 U JP14634886 U JP 14634886U JP S6356259 U JPS6356259 U JP S6356259U
Authority
JP
Japan
Prior art keywords
magnetic field
rod
bar
forming
magnetron sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14634886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14634886U priority Critical patent/JPS6356259U/ja
Publication of JPS6356259U publication Critical patent/JPS6356259U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP14634886U 1986-09-24 1986-09-24 Pending JPS6356259U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14634886U JPS6356259U (enrdf_load_stackoverflow) 1986-09-24 1986-09-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14634886U JPS6356259U (enrdf_load_stackoverflow) 1986-09-24 1986-09-24

Publications (1)

Publication Number Publication Date
JPS6356259U true JPS6356259U (enrdf_load_stackoverflow) 1988-04-15

Family

ID=31058729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14634886U Pending JPS6356259U (enrdf_load_stackoverflow) 1986-09-24 1986-09-24

Country Status (1)

Country Link
JP (1) JPS6356259U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5746370U (enrdf_load_stackoverflow) * 1980-08-29 1982-03-15
JPS607705A (ja) * 1983-06-28 1985-01-16 松下電器産業株式会社 複合機能素子の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5746370U (enrdf_load_stackoverflow) * 1980-08-29 1982-03-15
JPS607705A (ja) * 1983-06-28 1985-01-16 松下電器産業株式会社 複合機能素子の製造方法

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