JPS63145857U - - Google Patents

Info

Publication number
JPS63145857U
JPS63145857U JP3747787U JP3747787U JPS63145857U JP S63145857 U JPS63145857 U JP S63145857U JP 3747787 U JP3747787 U JP 3747787U JP 3747787 U JP3747787 U JP 3747787U JP S63145857 U JPS63145857 U JP S63145857U
Authority
JP
Japan
Prior art keywords
target
permanent magnet
magnet group
tubular
tubular target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3747787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3747787U priority Critical patent/JPS63145857U/ja
Publication of JPS63145857U publication Critical patent/JPS63145857U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3747787U 1987-03-14 1987-03-14 Pending JPS63145857U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3747787U JPS63145857U (enrdf_load_stackoverflow) 1987-03-14 1987-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3747787U JPS63145857U (enrdf_load_stackoverflow) 1987-03-14 1987-03-14

Publications (1)

Publication Number Publication Date
JPS63145857U true JPS63145857U (enrdf_load_stackoverflow) 1988-09-27

Family

ID=30848835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3747787U Pending JPS63145857U (enrdf_load_stackoverflow) 1987-03-14 1987-03-14

Country Status (1)

Country Link
JP (1) JPS63145857U (enrdf_load_stackoverflow)

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