JPS62182972U - - Google Patents

Info

Publication number
JPS62182972U
JPS62182972U JP7097586U JP7097586U JPS62182972U JP S62182972 U JPS62182972 U JP S62182972U JP 7097586 U JP7097586 U JP 7097586U JP 7097586 U JP7097586 U JP 7097586U JP S62182972 U JPS62182972 U JP S62182972U
Authority
JP
Japan
Prior art keywords
corrosion
permanent magnet
resistant material
magnetron sputtering
sputtering device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7097586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7097586U priority Critical patent/JPS62182972U/ja
Publication of JPS62182972U publication Critical patent/JPS62182972U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7097586U 1986-05-12 1986-05-12 Pending JPS62182972U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7097586U JPS62182972U (enrdf_load_stackoverflow) 1986-05-12 1986-05-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7097586U JPS62182972U (enrdf_load_stackoverflow) 1986-05-12 1986-05-12

Publications (1)

Publication Number Publication Date
JPS62182972U true JPS62182972U (enrdf_load_stackoverflow) 1987-11-20

Family

ID=30913108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7097586U Pending JPS62182972U (enrdf_load_stackoverflow) 1986-05-12 1986-05-12

Country Status (1)

Country Link
JP (1) JPS62182972U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04202662A (ja) * 1990-11-30 1992-07-23 Anelva Corp マグネトロンスパッタ装置
JP2007088511A (ja) * 2006-12-20 2007-04-05 Neomax Co Ltd 磁気回路の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04202662A (ja) * 1990-11-30 1992-07-23 Anelva Corp マグネトロンスパッタ装置
JP2007088511A (ja) * 2006-12-20 2007-04-05 Neomax Co Ltd 磁気回路の製造方法

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