JPS63143568U - - Google Patents

Info

Publication number
JPS63143568U
JPS63143568U JP3529687U JP3529687U JPS63143568U JP S63143568 U JPS63143568 U JP S63143568U JP 3529687 U JP3529687 U JP 3529687U JP 3529687 U JP3529687 U JP 3529687U JP S63143568 U JPS63143568 U JP S63143568U
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JP
Japan
Prior art keywords
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target
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showing
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Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3529687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3529687U priority Critical patent/JPS63143568U/ja
Publication of JPS63143568U publication Critical patent/JPS63143568U/ja
Pending legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP3529687U 1987-03-11 1987-03-11 Pending JPS63143568U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3529687U JPS63143568U (enrdf_load_stackoverflow) 1987-03-11 1987-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3529687U JPS63143568U (enrdf_load_stackoverflow) 1987-03-11 1987-03-11

Publications (1)

Publication Number Publication Date
JPS63143568U true JPS63143568U (enrdf_load_stackoverflow) 1988-09-21

Family

ID=30844658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3529687U Pending JPS63143568U (enrdf_load_stackoverflow) 1987-03-11 1987-03-11

Country Status (1)

Country Link
JP (1) JPS63143568U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006104570A (ja) * 2004-09-30 2006-04-20 Applied Films Corp スパッタリング用の非接着式回転ターゲット
JP2013133490A (ja) * 2011-12-26 2013-07-08 Tokuriki Honten Co Ltd 円筒形スパッタリングターゲットおよびその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006104570A (ja) * 2004-09-30 2006-04-20 Applied Films Corp スパッタリング用の非接着式回転ターゲット
JP2011117078A (ja) * 2004-09-30 2011-06-16 Applied Materials Inc スパッタリング用の非接着式回転ターゲット
JP2013133490A (ja) * 2011-12-26 2013-07-08 Tokuriki Honten Co Ltd 円筒形スパッタリングターゲットおよびその製造方法

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