JPS6356260U - - Google Patents

Info

Publication number
JPS6356260U
JPS6356260U JP14830086U JP14830086U JPS6356260U JP S6356260 U JPS6356260 U JP S6356260U JP 14830086 U JP14830086 U JP 14830086U JP 14830086 U JP14830086 U JP 14830086U JP S6356260 U JPS6356260 U JP S6356260U
Authority
JP
Japan
Prior art keywords
rod
magnetron sputtering
magnetic field
sputtering device
shaped assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14830086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14830086U priority Critical patent/JPS6356260U/ja
Publication of JPS6356260U publication Critical patent/JPS6356260U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP14830086U 1986-09-26 1986-09-26 Pending JPS6356260U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14830086U JPS6356260U (enrdf_load_stackoverflow) 1986-09-26 1986-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14830086U JPS6356260U (enrdf_load_stackoverflow) 1986-09-26 1986-09-26

Publications (1)

Publication Number Publication Date
JPS6356260U true JPS6356260U (enrdf_load_stackoverflow) 1988-04-15

Family

ID=31062438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14830086U Pending JPS6356260U (enrdf_load_stackoverflow) 1986-09-26 1986-09-26

Country Status (1)

Country Link
JP (1) JPS6356260U (enrdf_load_stackoverflow)

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