JPS62193660U - - Google Patents

Info

Publication number
JPS62193660U
JPS62193660U JP8097186U JP8097186U JPS62193660U JP S62193660 U JPS62193660 U JP S62193660U JP 8097186 U JP8097186 U JP 8097186U JP 8097186 U JP8097186 U JP 8097186U JP S62193660 U JPS62193660 U JP S62193660U
Authority
JP
Japan
Prior art keywords
plasma
expansion chamber
ion source
plasma generation
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8097186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8097186U priority Critical patent/JPS62193660U/ja
Publication of JPS62193660U publication Critical patent/JPS62193660U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP8097186U 1986-05-30 1986-05-30 Pending JPS62193660U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8097186U JPS62193660U (enrdf_load_stackoverflow) 1986-05-30 1986-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8097186U JPS62193660U (enrdf_load_stackoverflow) 1986-05-30 1986-05-30

Publications (1)

Publication Number Publication Date
JPS62193660U true JPS62193660U (enrdf_load_stackoverflow) 1987-12-09

Family

ID=30932273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8097186U Pending JPS62193660U (enrdf_load_stackoverflow) 1986-05-30 1986-05-30

Country Status (1)

Country Link
JP (1) JPS62193660U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0340342A (ja) * 1989-07-06 1991-02-21 Akira Oota イオンビーム照射装置
JPH03215665A (ja) * 1990-01-19 1991-09-20 Hitachi Ltd イオン源

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0340342A (ja) * 1989-07-06 1991-02-21 Akira Oota イオンビーム照射装置
JPH03215665A (ja) * 1990-01-19 1991-09-20 Hitachi Ltd イオン源

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