JPH0410998U - - Google Patents

Info

Publication number
JPH0410998U
JPH0410998U JP5114990U JP5114990U JPH0410998U JP H0410998 U JPH0410998 U JP H0410998U JP 5114990 U JP5114990 U JP 5114990U JP 5114990 U JP5114990 U JP 5114990U JP H0410998 U JPH0410998 U JP H0410998U
Authority
JP
Japan
Prior art keywords
concentric circles
electric field
permanent magnets
polar directions
vector due
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5114990U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0633680Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5114990U priority Critical patent/JPH0633680Y2/ja
Publication of JPH0410998U publication Critical patent/JPH0410998U/ja
Application granted granted Critical
Publication of JPH0633680Y2 publication Critical patent/JPH0633680Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP5114990U 1990-05-16 1990-05-16 電子サイクロトロン共鳴プラズマ発生装置 Expired - Lifetime JPH0633680Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5114990U JPH0633680Y2 (ja) 1990-05-16 1990-05-16 電子サイクロトロン共鳴プラズマ発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5114990U JPH0633680Y2 (ja) 1990-05-16 1990-05-16 電子サイクロトロン共鳴プラズマ発生装置

Publications (2)

Publication Number Publication Date
JPH0410998U true JPH0410998U (enrdf_load_stackoverflow) 1992-01-29
JPH0633680Y2 JPH0633680Y2 (ja) 1994-08-31

Family

ID=31570327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5114990U Expired - Lifetime JPH0633680Y2 (ja) 1990-05-16 1990-05-16 電子サイクロトロン共鳴プラズマ発生装置

Country Status (1)

Country Link
JP (1) JPH0633680Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0633680Y2 (ja) 1994-08-31

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term