JPS6355745B2 - - Google Patents

Info

Publication number
JPS6355745B2
JPS6355745B2 JP57156397A JP15639782A JPS6355745B2 JP S6355745 B2 JPS6355745 B2 JP S6355745B2 JP 57156397 A JP57156397 A JP 57156397A JP 15639782 A JP15639782 A JP 15639782A JP S6355745 B2 JPS6355745 B2 JP S6355745B2
Authority
JP
Japan
Prior art keywords
electrode
pieces
axis
electrode pieces
outer peripheral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57156397A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5946744A (ja
Inventor
Masanori Idesawa
Takashi Soma
Hidekazu Goto
Akira Shiraishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP57156397A priority Critical patent/JPS5946744A/ja
Publication of JPS5946744A publication Critical patent/JPS5946744A/ja
Publication of JPS6355745B2 publication Critical patent/JPS6355745B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP57156397A 1982-09-08 1982-09-08 多重極電極構造体 Granted JPS5946744A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57156397A JPS5946744A (ja) 1982-09-08 1982-09-08 多重極電極構造体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57156397A JPS5946744A (ja) 1982-09-08 1982-09-08 多重極電極構造体

Publications (2)

Publication Number Publication Date
JPS5946744A JPS5946744A (ja) 1984-03-16
JPS6355745B2 true JPS6355745B2 (OSRAM) 1988-11-04

Family

ID=15626840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57156397A Granted JPS5946744A (ja) 1982-09-08 1982-09-08 多重極電極構造体

Country Status (1)

Country Link
JP (1) JPS5946744A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT393333B (de) * 1986-11-27 1991-09-25 Ims Ionen Mikrofab Syst Ionenprojektionseinrichtung fuer schattenprojektion

Also Published As

Publication number Publication date
JPS5946744A (ja) 1984-03-16

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