JPS6355430U - - Google Patents

Info

Publication number
JPS6355430U
JPS6355430U JP14849586U JP14849586U JPS6355430U JP S6355430 U JPS6355430 U JP S6355430U JP 14849586 U JP14849586 U JP 14849586U JP 14849586 U JP14849586 U JP 14849586U JP S6355430 U JPS6355430 U JP S6355430U
Authority
JP
Japan
Prior art keywords
reduction projection
exposure apparatus
projection exposure
automatic focus
automatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14849586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14849586U priority Critical patent/JPS6355430U/ja
Publication of JPS6355430U publication Critical patent/JPS6355430U/ja
Pending legal-status Critical Current

Links

JP14849586U 1986-09-26 1986-09-26 Pending JPS6355430U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14849586U JPS6355430U (OSRAM) 1986-09-26 1986-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14849586U JPS6355430U (OSRAM) 1986-09-26 1986-09-26

Publications (1)

Publication Number Publication Date
JPS6355430U true JPS6355430U (OSRAM) 1988-04-13

Family

ID=31062818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14849586U Pending JPS6355430U (OSRAM) 1986-09-26 1986-09-26

Country Status (1)

Country Link
JP (1) JPS6355430U (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02207520A (ja) * 1989-02-07 1990-08-17 Canon Inc 露光装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56130707A (en) * 1980-03-18 1981-10-13 Canon Inc Photo-printing device
JPS5759326A (en) * 1980-09-29 1982-04-09 Hitachi Ltd Method for detection of image-forming position and device thereof
JPS60158624A (ja) * 1984-01-27 1985-08-20 Hitachi Ltd 焦点検出方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56130707A (en) * 1980-03-18 1981-10-13 Canon Inc Photo-printing device
JPS5759326A (en) * 1980-09-29 1982-04-09 Hitachi Ltd Method for detection of image-forming position and device thereof
JPS60158624A (ja) * 1984-01-27 1985-08-20 Hitachi Ltd 焦点検出方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02207520A (ja) * 1989-02-07 1990-08-17 Canon Inc 露光装置

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