JPS6354959A - Method and apparatus for removing particulate material from gas flow - Google Patents
Method and apparatus for removing particulate material from gas flowInfo
- Publication number
- JPS6354959A JPS6354959A JP61198083A JP19808386A JPS6354959A JP S6354959 A JPS6354959 A JP S6354959A JP 61198083 A JP61198083 A JP 61198083A JP 19808386 A JP19808386 A JP 19808386A JP S6354959 A JPS6354959 A JP S6354959A
- Authority
- JP
- Japan
- Prior art keywords
- gas flow
- filter
- particles
- exchange filter
- ion exchange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 45
- 239000011236 particulate material Substances 0.000 title 1
- 238000005342 ion exchange Methods 0.000 claims abstract description 40
- 239000002245 particle Substances 0.000 claims abstract description 33
- 229920000642 polymer Polymers 0.000 claims abstract description 17
- 238000010559 graft polymerization reaction Methods 0.000 claims abstract description 9
- 239000010419 fine particle Substances 0.000 claims description 16
- 230000005855 radiation Effects 0.000 claims description 11
- 230000005684 electric field Effects 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 abstract description 10
- 238000011045 prefiltration Methods 0.000 abstract description 6
- 239000000178 monomer Substances 0.000 description 23
- 150000002500 ions Chemical class 0.000 description 20
- 239000007789 gas Substances 0.000 description 19
- -1 Fe2O 3 Chemical compound 0.000 description 13
- 238000005341 cation exchange Methods 0.000 description 11
- 238000005349 anion exchange Methods 0.000 description 9
- 229920001577 copolymer Polymers 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 230000003749 cleanliness Effects 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 238000011282 treatment Methods 0.000 description 4
- 238000011144 upstream manufacturing Methods 0.000 description 4
- 229920002554 vinyl polymer Polymers 0.000 description 4
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 3
- 239000004743 Polypropylene Substances 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 125000000129 anionic group Chemical group 0.000 description 3
- 150000001768 cations Chemical class 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 238000005470 impregnation Methods 0.000 description 3
- 230000005865 ionizing radiation Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 229920000573 polyethylene Polymers 0.000 description 3
- 238000006116 polymerization reaction Methods 0.000 description 3
- 229920001155 polypropylene Polymers 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- KEQGZUUPPQEDPF-UHFFFAOYSA-N 1,3-dichloro-5,5-dimethylimidazolidine-2,4-dione Chemical group CC1(C)N(Cl)C(=O)N(Cl)C1=O KEQGZUUPPQEDPF-UHFFFAOYSA-N 0.000 description 2
- XLLXMBCBJGATSP-UHFFFAOYSA-N 2-phenylethenol Chemical compound OC=CC1=CC=CC=C1 XLLXMBCBJGATSP-UHFFFAOYSA-N 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical group C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 2
- KFSLWBXXFJQRDL-UHFFFAOYSA-N Peracetic acid Chemical compound CC(=O)OO KFSLWBXXFJQRDL-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical group OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 150000001450 anions Chemical class 0.000 description 2
- 230000000844 anti-bacterial effect Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- 125000002091 cationic group Chemical group 0.000 description 2
- XTHPWXDJESJLNJ-UHFFFAOYSA-N chlorosulfonic acid Chemical group OS(Cl)(=O)=O XTHPWXDJESJLNJ-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 229920000578 graft copolymer Polymers 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- JESXATFQYMPTNL-UHFFFAOYSA-N mono-hydroxyphenyl-ethylene Natural products OC1=CC=CC=C1C=C JESXATFQYMPTNL-UHFFFAOYSA-N 0.000 description 2
- 239000007800 oxidant agent Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 150000003440 styrenes Chemical class 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 description 1
- WVAFEFUPWRPQSY-UHFFFAOYSA-N 1,2,3-tris(ethenyl)benzene Chemical compound C=CC1=CC=CC(C=C)=C1C=C WVAFEFUPWRPQSY-UHFFFAOYSA-N 0.000 description 1
- ZXHDVRATSGZISC-UHFFFAOYSA-N 1,2-bis(ethenoxy)ethane Chemical compound C=COCCOC=C ZXHDVRATSGZISC-UHFFFAOYSA-N 0.000 description 1
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- VMSBGXAJJLPWKV-UHFFFAOYSA-N 2-ethenylbenzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1C=C VMSBGXAJJLPWKV-UHFFFAOYSA-N 0.000 description 1
- UWRZIZXBOLBCON-UHFFFAOYSA-N 2-phenylethenamine Chemical compound NC=CC1=CC=CC=C1 UWRZIZXBOLBCON-UHFFFAOYSA-N 0.000 description 1
- KGIGUEBEKRSTEW-UHFFFAOYSA-N 2-vinylpyridine Chemical compound C=CC1=CC=CC=N1 KGIGUEBEKRSTEW-UHFFFAOYSA-N 0.000 description 1
- DBCAQXHNJOFNGC-UHFFFAOYSA-N 4-bromo-1,1,1-trifluorobutane Chemical compound FC(F)(F)CCCBr DBCAQXHNJOFNGC-UHFFFAOYSA-N 0.000 description 1
- GZRJJOOUEXCPKF-UHFFFAOYSA-N 5-ethenyl-2-methyl-1h-imidazole Chemical group CC1=NC(C=C)=CN1 GZRJJOOUEXCPKF-UHFFFAOYSA-N 0.000 description 1
- VJOWMORERYNYON-UHFFFAOYSA-N 5-ethenyl-2-methylpyridine Chemical group CC1=CC=C(C=C)C=N1 VJOWMORERYNYON-UHFFFAOYSA-N 0.000 description 1
- 229910000497 Amalgam Inorganic materials 0.000 description 1
- 241000894006 Bacteria Species 0.000 description 1
- 239000004342 Benzoyl peroxide Substances 0.000 description 1
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical group OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical group CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910025794 LaB6 Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical group OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 240000004808 Saccharomyces cerevisiae Species 0.000 description 1
- 229910052776 Thorium Inorganic materials 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical group CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- 241000700605 Viruses Species 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 238000004887 air purification Methods 0.000 description 1
- 229920006109 alicyclic polymer Polymers 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 238000005576 amination reaction Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 235000019400 benzoyl peroxide Nutrition 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- UUAGAQFQZIEFAH-UHFFFAOYSA-N chlorotrifluoroethylene Chemical group FC(F)=C(F)Cl UUAGAQFQZIEFAH-UHFFFAOYSA-N 0.000 description 1
- 235000019504 cigarettes Nutrition 0.000 description 1
- 239000011362 coarse particle Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 150000001993 dienes Chemical group 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000004185 ester group Chemical group 0.000 description 1
- STVZJERGLQHEKB-UHFFFAOYSA-N ethylene glycol dimethacrylate Substances CC(=C)C(=O)OCCOC(=O)C(C)=C STVZJERGLQHEKB-UHFFFAOYSA-N 0.000 description 1
- 230000003631 expected effect Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000003546 flue gas Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
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- 239000012528 membrane Substances 0.000 description 1
- VSQYNPJPULBZKU-UHFFFAOYSA-N mercury xenon Chemical compound [Xe].[Hg] VSQYNPJPULBZKU-UHFFFAOYSA-N 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- PLDDOISOJJCEMH-UHFFFAOYSA-N neodymium oxide Inorganic materials [O-2].[O-2].[O-2].[Nd+3].[Nd+3] PLDDOISOJJCEMH-UHFFFAOYSA-N 0.000 description 1
- 125000002560 nitrile group Chemical group 0.000 description 1
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Chemical group CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
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- 125000005496 phosphonium group Chemical group 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920001083 polybutene Polymers 0.000 description 1
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- 229920000728 polyester Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 125000001453 quaternary ammonium group Chemical group 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910000108 silver(I,III) oxide Inorganic materials 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
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- 239000000126 substance Substances 0.000 description 1
- 125000000542 sulfonic acid group Chemical group 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-O sulfonium group Chemical group [SH3+] RWSOTUBLDIXVET-UHFFFAOYSA-O 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 125000001302 tertiary amino group Chemical group 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Landscapes
- Filtering Materials (AREA)
- Electrostatic Separation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、荷電微粒子を含むガス流から該微粒子を除去
する方法及びその装置、特に、■ 電子工業、薬品工業
、食品工業、農林産業、医療、精密機械工業等における
クリーンルーム、クリーンブース、クリーントンネル、
クリーンペンチ、安全キャビネット、無菌室、パスボッ
クス、無菌エアカーテン、クリーンチューブ等における
空気、窒素、酸素等のガス流から荷電微粒子を除去する
方法及びその装置、
■ 煙道排ガスや自動車排ガスのような各種の工業、産
業から排出される微粒子含有ガスから荷電微粒子を除去
する方法及びその装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method and an apparatus for removing charged particles from a gas stream containing them, in particular: (i) the electronic industry, the pharmaceutical industry, the food industry, the agriculture and forestry industry; Clean rooms, clean booths, clean tunnels in medical care, precision machinery industry, etc.
Methods and devices for removing charged particles from gas flows such as air, nitrogen, oxygen, etc. in clean pliers, safety cabinets, sterile rooms, pass boxes, sterile air curtains, clean tubes, etc., such as flue gas and automobile exhaust gas. The present invention relates to a method and an apparatus for removing charged particulates from particulate-containing gas discharged from various industries.
従来、例えば室内の空気清浄方法或いはその装置を大別
すると、
fi+ 機械的濾過方式(例えばHEP&フィルタ)
(2) 静電的に微粒子の捕集を行なう高電圧による荷
電及び導電性フィルタによる濾過方式(例えばMKS
Aフィルタ)
があるが、これらの方法には夫々次のような欠点があっ
た。Conventionally, for example, indoor air purification methods and devices can be roughly divided into fi+ mechanical filtration methods (e.g. HEP & filter)
(2) A filtration method using a high-voltage charged and conductive filter that electrostatically collects fine particles (for example, MKS
A filter), but each of these methods had the following drawbacks.
即ち、機械的濾過方式においては、空気の清浄度(クラ
ス)をあげるためKは目の細かいフィルタを使用する必
要があるが、この場合圧損が高く、また目づまジによる
圧損の増加も著るしく、フィルタ寿命も短かく、フィル
タの維持、管理或いは交換が面倒であるばかりでなく、
フィルタ交換を行う場合、その間作業をストップする必
要があり、復帰までには長時間を要しており、生産能率
が悪いという欠点があった。In other words, in the mechanical filtration method, it is necessary to use a fine-mesh filter in order to improve the air cleanliness (class), but in this case the pressure loss is high, and the increase in pressure loss due to clogging is also significant. Not only is it difficult to maintain, manage, or replace the filter, but the life of the filter is also short.
When replacing the filter, it is necessary to stop the work during that time, and it takes a long time to recover, which has the disadvantage of poor production efficiency.
また、空気の清浄度を上げる為に換気回数(ファンによ
る空気循環回数)を増加することも行われているが、こ
の場合動力費が高くつにという欠点があった。Additionally, in order to improve the cleanliness of the air, the number of times of ventilation (the number of times air is circulated by a fan) has been increased, but this has the disadvantage of high power costs.
また、従来のフィルタによる方法は微粒子の除去だけを
目的としているので、工業用りIJ−ンルーム用として
は使用できるが、フィルタには必ずと言ってよい程ピン
ホールがあジ、汚染空気の一部がリークするため、バイ
オロジカルクリーンルームでの使用には限界があった。In addition, since the conventional filter method is only intended to remove particulates, it can be used for industrial IJ-rooms, but filters almost always have pinholes, which prevents contaminated air from entering the room. There was a limit to its use in biological clean rooms due to leakage.
また、静電的に微粒子の捕集を行う方式においては、予
備荷電部に例えば15〜70 kV という高電圧を
必要とするため、装置が大型となり、また安全性、維持
管理の面で問題があった。Furthermore, in the method of electrostatically collecting particles, a high voltage of 15 to 70 kV is required in the pre-charging section, which increases the size of the device and poses problems in terms of safety and maintenance. there were.
これらの問題点を解決するために本発明者は、さきに紫
外線、或いは放射線の照射によりガス中の微粒子を荷電
させた後捕集することにより空気を清浄にする方法を提
案したが(特願昭60−18725号、特願昭61−8
5996号)、荷電した粒子の捕集が十分に行なわれな
い場合があった。In order to solve these problems, the present inventor first proposed a method of purifying the air by charging fine particles in gas by irradiating them with ultraviolet rays or radiation and then collecting them (patent application). No. 18725, 1982, patent application No. 8, 1983
No. 5996), charged particles were sometimes not collected sufficiently.
例えば荷電粒子状物質の捕集方法として集じん板(集じ
ん電極)を用いた場合、超微細な粒子例えば0.05μ
m 以下の微粒子の捕集効率が不十分であるばかりでな
く、非定常運転時に捕集微粒子の飛散が生ずる場合があ
った。For example, when using a dust collection plate (dust collection electrode) as a method for collecting charged particulate matter, ultrafine particles such as 0.05μ
Not only was the efficiency of collecting fine particles of less than m2 insufficient, but there were also cases where the collected fine particles were scattered during unsteady operation.
本発明は、ガス流中の荷電粒子、特に荷電した微粒子を
も効率よく捕集しうる方法及びその装置を提供すること
を目的とするものである。SUMMARY OF THE INVENTION An object of the present invention is to provide a method and an apparatus for efficiently collecting charged particles, particularly charged fine particles, in a gas flow.
本発明は、荷電微粒子を含むガス流を、空隙性高分子支
持体にイオン交換体をグラフト重合により支持させたイ
オン交換フィルタに通ずることにより、更には微粒子を
含むガス流に紫外線又は放射線を照射することによジ微
粒子を予備荷電せしめた後前記イオン又換フィルタ上に
通ずることによシ荷!微粒子を該フィルタに捕捉せしめ
てガス流から荷電微粒子を除去する方法、及び、微粒子
を含むガス流吸入口からガス流排出口までのガス流路上
に、少くとも紫外線又は放射線照射部よりなる予備荷電
部及び空隙性高分子支持体にイオン交換体をグラフト重
合により支持させたイオン交換フィルタを順次設けてな
るガス流から荷電微粒子を除去する装置である。The present invention passes a gas flow containing charged fine particles through an ion exchange filter in which an ion exchanger is supported by graft polymerization on a porous polymer support, and further irradiates the gas flow containing fine particles with ultraviolet rays or radiation. By pre-charging the particles, the particles are passed over the ion exchange filter, and then charged! A method for removing charged particulates from a gas flow by trapping the particulates in the filter, and a method for pre-charging a gas flow path from a gas flow inlet to a gas flow outlet containing particulates by at least an ultraviolet ray or radiation irradiation part. This is a device for removing charged particles from a gas flow, which is sequentially provided with an ion exchange filter in which an ion exchanger is supported by graft polymerization on a porous polymer support and a porous polymer support.
つぎに紫外線を照射して空気中の微粒子全荷電させた後
フィルタにより荷電した微粒子を捕集す本発明の一実施
例をクリーンルームに適用した例を第1図を参照しなが
ら説明する。Next, an example in which an embodiment of the present invention is applied to a clean room, in which all particles in the air are charged by irradiating ultraviolet rays and then collected by a filter, will be described with reference to FIG.
第1図において符号1はクリーンルーム、2は外気導入
管、5はプレフィルタ、4はりIJ−ンルームからの空
気取出し口、5はファン、6は空気調和装置、7は)I
KPAフィルタ、8はクリーンルーム内のファン部、9
は紫外線照射部、10は繊維状の高分子支持体にイオン
交換体を支持せしめたイーオン交換フィルタ、11はク
リーンベンチ、12は可動シャッター、15は作束合を
示す。In Fig. 1, 1 is a clean room, 2 is an outside air intake pipe, 5 is a pre-filter, 4 is an air outlet from the IJ-room, 5 is a fan, 6 is an air conditioner, and 7 is an air conditioner.
KPA filter, 8 is the fan section in the clean room, 9
10 is an ultraviolet irradiation unit, 10 is an ion exchange filter in which an ion exchanger is supported on a fibrous polymer support, 11 is a clean bench, 12 is a movable shutter, and 15 is an assembly.
クリーンルーム1内には、配管2から導入される外気の
粗粒子をプレフィルタ5で濾過した後、クリーンルーム
1の空気取出し口4から取り出された空気と共にファン
5を介して空気調和装置6にて温度及び湿度を調節した
後、HTLPkフィルタ7により微粒子を除去した空気
が循環供給されており、清浄度(クラス)t o、o
o o程度に保持されている。Inside the clean room 1, after filtering the coarse particles of the outside air introduced from the piping 2 with a pre-filter 5, the air taken out from the air outlet 4 of the clean room 1 is sent to the air conditioner 6 via the fan 5 to adjust the temperature. After adjusting the humidity and temperature, the air from which particulates have been removed by the HTLPk filter 7 is circulated and supplied, and the cleanliness (class) t o, o
It is maintained at about oo.
一方、クリーンルーム1内のファン部8、紫外線照射部
9、線維状の高分子支持体にイオン交換体を支持せしめ
たイオン交換フィルタ10を設けたクリーンベンチ11
内の作業台15上は、高清浄度(クラス10)の無菌雰
囲気に保持される。On the other hand, in the clean room 1, a fan section 8, an ultraviolet irradiation section 9, and a clean bench 11 are provided with an ion exchange filter 10 in which an ion exchanger is supported on a fibrous polymer support.
The workbench 15 inside is maintained in a sterile atmosphere of high cleanliness (class 10).
即チ、クリーンベンチ11においては、クリーンルーム
1内の清浄度(クラス) + 0.000程度の空気が
ファン部8のファンによジ吸引され、紫外線照射部9で
紫外線を照射することにより空気中の微粒子は荷電され
ると共に1ウイルス、バクテリヤ、酵母、かび等の微生
物が殺菌・荷電された後、フィルタIOで荷電された微
粒子を除去することKより、作業台15上は高清浄度に
保持される〇
なお、クリーンベンチ11内の作業台15への器具、製
品等の出し入れは、クリーンベンチ11に設けられた可
動シャッター12により行なう。In the clean bench 11, air with a cleanliness level (class) + 0.000 in the clean room 1 is sucked in by the fan in the fan unit 8, and is irradiated with ultraviolet rays in the ultraviolet irradiation unit 9 to remove air from the air. The fine particles are charged and microorganisms such as viruses, bacteria, yeast, mold, etc. are sterilized and charged, and then the charged fine particles are removed by the filter IO.The surface on the workbench 15 is maintained at a high level of cleanliness. Note that instruments, products, etc. are taken in and out of the workbench 15 in the clean bench 11 using a movable shutter 12 provided on the clean bench 11.
予備荷電部である紫外線照射部全第2図に示す。第2図
において、符号8及び曹0は第1図で示したものと同じ
意味全有し、符号20はファン8で取り入れられた空気
、21は網状の光電子放出材、22は紫外線ランプ、2
5はプレフィルタ、 ”
24は清浄になった空気の流れを示す。The entire ultraviolet irradiation section, which is a preliminary charging section, is shown in FIG. In FIG. 2, numerals 8 and 0 have the same meanings as shown in FIG.
5 is a pre-filter,
24 indicates the flow of purified air.
77ン8により取り入れられプレフィルタ25でろ過さ
れた空気20中の微粒子は、紫外線ランプ22から照射
される紫外線により光電子放出材21から放出される光
電子によって効率良く荷電される。ついで、繊維状イオ
ン交換フィルタ10Vcより荷電された粒子は効率よく
捕集され清浄な空気24が得られる。The fine particles in the air 20 taken in by the filter 77 and filtered by the prefilter 25 are efficiently charged by photoelectrons emitted from the photoelectron emitting material 21 by the ultraviolet rays irradiated from the ultraviolet lamp 22. Then, the charged particles are efficiently collected by the fibrous ion exchange filter 10Vc, and clean air 24 is obtained.
光電子放出材21は、放射線又は紫外線照射により光電
子を放出するものであれば何れでも良く、光電的な仕事
関数の小さいもの程好ましい。効果や経済性の面から、
Ba、lr、Ca、Y、Gd。The photoelectron emitting material 21 may be any material as long as it emits photoelectrons upon irradiation with radiation or ultraviolet rays, and the smaller the photoelectric work function, the more preferable it is. In terms of effectiveness and economy,
Ba, lr, Ca, Y, Gd.
La、(je、Nd、Th、Pr、Be、Zr、Fa、
Ni、Zn、Cu、 Ag、Pt、Cd。La, (je, Nd, Th, Pr, Be, Zr, Fa,
Ni, Zn, Cu, Ag, Pt, Cd.
Pb、A/、C,Mg、 Au、In、B1.Nb、S
l、T1.Ta、Sn、P のいずれか又はこれらの
化合物又は合金が好ましく、これらは単独で又は二種以
上を複合して用いられる。複合材としては、アマルガム
の如く物理的な複合材も用いうる。Pb, A/, C, Mg, Au, In, B1. Nb,S
l, T1. Any one of Ta, Sn, and P, or a compound or alloy thereof is preferred, and these may be used alone or in combination of two or more. As the composite material, a physical composite material such as amalgam can also be used.
化合物としては例えば酸化物、はう化物、炭化物があり
、酸化物にはBaO,SrO,CaO,Y2O6゜G4
203.Nd2O3,Tt+02.ZrO2,Fe2O
3,ZnO,CuO,Ag2O。Examples of compounds include oxides, ferrides, and carbides, and oxides include BaO, SrO, CaO, Y2O6°G4
203. Nd2O3, Tt+02. ZrO2, Fe2O
3, ZnO, CuO, Ag2O.
PtO,PbO,AI!203.MgO1工n203.
B10.NbO,Booなどがアク、またほう化物には
YB6.CaB6.LaB6.CaB6゜PrB6.Z
rB2などがあジ、さらに炭化物としてはZrC,Ta
C,TICj、HbOなどがある。PtO, PbO, AI! 203. MgO1 engineering n203.
B10. NbO, Boo, etc. are harsh, and borides include YB6. CaB6. LaB6. CaB6゜PrB6. Z
Examples include rB2, and carbides such as ZrC and Ta.
C, TICj, HbO, etc.
また、合金としては黄銅、青銅、リン青銅、AgとMg
との合金(Mgが2〜20wt%)、OuとBOとの合
金(Beが1〜10wt%)及びBaとAPとの合金を
用いることができ、上記kgとMgとの合金、CuとB
eとの合金及びB&とA/ との合金が好ましい。酸
化物は金属表面のみを空気中で加熱したり、或いは薬品
で酸化するととKよjつても得ることができる。In addition, alloys include brass, bronze, phosphor bronze, Ag and Mg.
(Mg is 2 to 20 wt%), O and BO (Be is 1 to 10 wt%), and Ba and AP can be used.
Alloys with e and B& with A/ are preferred. Oxides can also be obtained by heating only the metal surface in air or oxidizing it with chemicals.
さらに他の方法としては使用前に加熱し、表面に酸化層
全形取して長期にわ九って安定な酸化層を得ることもで
きる。この例としてはMgとAg との合金を水蒸気
中で500〜400Cの温度の条件下でその表面に酸化
薄膜を形成させることができ、この酸化薄膜は長期間に
わたって安定なものである。As another method, it is also possible to heat the material before use and remove the entire oxide layer on the surface to obtain a stable oxide layer over a long period of time. As an example of this, an oxide thin film can be formed on the surface of an alloy of Mg and Ag in water vapor at a temperature of 500 to 400 C, and this oxide thin film is stable for a long period of time.
これらの材料の使用形状は、板状、プリーツ状、網状等
測れの形状でもよいが、紫外線の照射面積及び空気との
接触面積の大きな形状のものが好ましく、このような観
点からは網状のものが好ましい。These materials may be used in any shape such as a plate, pleats, or net, but it is preferable to have a shape that has a large area of irradiation with ultraviolet rays and a large contact area with air. is preferred.
紫外線の種類は、その照射に:り光電子放出材が光電子
を放出しうるものであれば何れでもよいが、殺菌作用を
併せてもつものが好ましい。The type of ultraviolet light may be any type as long as the photoelectron-emitting material can emit photoelectrons upon irradiation, but it is preferable to use one that also has a bactericidal effect.
適用分野、作業内容、用途、経済性などにより適宜法め
ることができる。例えば、バイオロジカル分野において
は、殺菌作用、効率の面から遠紫外線を併用するのが好
ましい。Laws can be established as appropriate depending on the field of application, content of work, purpose, economic efficiency, etc. For example, in the biological field, it is preferable to use deep ultraviolet rays together in terms of bactericidal action and efficiency.
イオン交換フィルタ10は一定期間使用すると目詰tり
を生ずるので、必要に応じカートリッジ構造とし、圧力
損失の検出によジ交換するようにすることによジ長期間
にわたって安定した運転が可能となる。Since the ion exchange filter 10 becomes clogged when used for a certain period of time, stable operation over a long period of time is possible by using a cartridge structure as necessary and replacing the filter by detecting pressure loss. .
空気中の微粒子を荷電する方式として、紫外線照射部に
電場を形成しないで行9方式について説明して米たが、
比較的高電圧を印加した電場において光電子放出材上に
紫外線(又は放射線)を照射することKより、光電子の
放出並びに空気中の微粒子の帯電をより効率的に行なう
ことができる。As a method of charging fine particles in the air, I explained the method in line 9 without forming an electric field in the ultraviolet irradiation part.
By irradiating the photoelectron emitting material with ultraviolet rays (or radiation) in an electric field to which a relatively high voltage is applied, photoelectrons can be emitted and fine particles in the air can be charged more efficiently.
次に、イオン交換フィルタについて詳しく説明する。Next, the ion exchange filter will be explained in detail.
イオン交換フィルタは、ガス流から荷電微粒子を捕集し
うる機能を有するものであればどのようなものでもよい
が、ネット状、織物状或いは繊維状の空隙性高分子支持
体上にイオン交換体をグラフト重合により支持させたも
のが用いられ、これらは周知の方法により適宜製造する
ことができる。The ion exchange filter may be of any type as long as it has the function of collecting charged particles from the gas flow. Supported by graft polymerization is used, and these can be appropriately produced by well-known methods.
イオン交換体としては、アニオン交換体或いはカチオン
交換体が使用できる。As the ion exchanger, an anion exchanger or a cation exchanger can be used.
支持体としては、ポリエチレン、ポリプロピレン、ポリ
ブチレン、ポリブテン等の脂肪族系不飽和炭化水素の重
合体、ポリスチレン、ポリα−メチルスチレン等の芳香
族系炭化水素の重合体、ポリビニルシクロヘキサン等の
脂環式系炭化水素の重合体、あるいはこれらの炭化水素
の共重合体、あるいは、ポリ四フッ化エチレン、ポリ7
ツ化ビニリデン、エチレン−四7ツ化エチレン共重合体
、四7ツ化エチレンー六フッ化プロピレン共重合体、フ
ン化ビニリデン−六フッ化プロピレン共重合体等のフッ
素含有不飽和炭化水素の重合体又はその共重合体などが
用いられる。Supports include polymers of aliphatic unsaturated hydrocarbons such as polyethylene, polypropylene, polybutylene, and polybutene, polymers of aromatic hydrocarbons such as polystyrene and polyα-methylstyrene, and alicyclic polymers such as polyvinylcyclohexane. Polymers of hydrocarbons, copolymers of these hydrocarbons, polytetrafluoroethylene, poly7
Polymers of fluorine-containing unsaturated hydrocarbons such as vinylidene fluoride, ethylene-ethylene tetra7ide copolymer, ethylene tetra7ide-propylene hexafluoride copolymer, and vinylidene fluoride-propylene hexafluoride copolymer or a copolymer thereof.
マタ、ポリビニルアルコール、ポリアミド、ポリエステ
ル、セルロース、羊毛、絹するいはこれらの混合物を用
いることもできる。It is also possible to use matte, polyvinyl alcohol, polyamide, polyester, cellulose, wool, silk or mixtures thereof.
これら支持体は、空隙性支持体として用いられ、その形
状はガス流との接触面積が広く、かつ、抵抗の少ない形
状であればよく、例えば適宜の薄膜状の布、好ましくは
ネット状などの織物状あるいは繊維状等、適宜の形状の
ものが用いられる。These supports are used as porous supports, and their shape may be any shape as long as they have a large contact area with the gas flow and have low resistance, such as an appropriate thin film-like cloth, preferably a net-like shape. An appropriate shape such as woven or fibrous shape is used.
空隙性支持体の空隙率は10〜95X好ましくは50〜
85%である。空隙性支持体の形状、厚さ、空隙率は装
置の形状、使用する材質、構造、期待する効果等により
適宜法めることが出来る。The porosity of the porous support is 10 to 95X, preferably 50 to
It is 85%. The shape, thickness, and porosity of the porous support can be determined as appropriate depending on the shape of the device, the materials used, the structure, the expected effects, etc.
本発明で使用しうるイオン交換体としては、特に限定さ
れることはなく、種々の陽イオン交換体あるいは陰イオ
ン交換体が使用される。The ion exchanger that can be used in the present invention is not particularly limited, and various cation exchangers or anion exchangers can be used.
例えば、カルボキシル基、スルホン酸基、リン酸基、フ
ェノール性水酸基などの陽イオン交換基含有交換体、第
1級〜第3級アミノ基、第4級アンモニウム基、スルホ
ニウム基、ホスホニウム基などの陰イオン交換基含有交
換体、あるいは前記陽及び陰画イオン交換基金含有する
重合型または縮合型の均質型または不均質型のイオン交
換体が挙げられる。For example, exchangers containing cation exchange groups such as carboxyl groups, sulfonic acid groups, phosphoric acid groups, and phenolic hydroxyl groups, anionic exchangers such as primary to tertiary amino groups, quaternary ammonium groups, sulfonium groups, and phosphonium groups. Examples include exchangers containing ion exchange groups, or polymerized or condensed homogeneous or heterogeneous ion exchangers containing the above-mentioned positive and negative ion exchange groups.
代表例としては、アクリル酸、メタクリル酸、マタハス
チレン、ハロメチルスチレン、アシルオキシスチレン、
ヒドロキシスチレン、アミノスチレン、ビニルベンゼン
スルホン酸等のスチレン化合物、ビニルピリジン、2−
メチル−5−ビニルピリジン、2−メチル−5ビニルイ
ミダゾール、アクリルニトリル、あるいは硫酸、クロル
スルホン酸、スルホン酸などの陽または陰イオン交換基
、またはこれに転換し得る基を有するモノマーの重合体
またはこれらのモノマートシビニルベンゼン、トリビニ
ルベンゼン、ブタジェン、エチレングリコールジビニル
エーテル、エチレングリコールジメタクリレート、など
の二個以上の二重結合を有するモノマーとの共重合体、
またはポリエチレン、ポリビニルフルオロカーボンエー
テルもしくはポリテトラフルオロエチレンにスチレンを
グラフト重合したポリマー等に夫々必要に応じて陽およ
び/または陰のイオン交換基金導入するか、またはイオ
ン交換基に転換してなるイオン交換体、テトラフルオロ
エチレン、クロロトリフルオロエチレンなどのビニルモ
ノマーとイオン交換基tたはイオン交換基に変換しつる
基を有するパーフルオロビニルモノマーとのコポリマー
からなるイオン交換体がある。Typical examples include acrylic acid, methacrylic acid, matahastyrene, halomethylstyrene, acyloxystyrene,
Styrene compounds such as hydroxystyrene, aminostyrene, vinylbenzenesulfonic acid, vinylpyridine, 2-
Polymers of monomers having cationic or anionic exchange groups such as methyl-5-vinylpyridine, 2-methyl-5vinylimidazole, acrylonitrile, or sulfuric acid, chlorosulfonic acid, sulfonic acid, or groups convertible thereto; Copolymers of these monomers with monomers having two or more double bonds, such as sivinylbenzene, trivinylbenzene, butadiene, ethylene glycol divinyl ether, ethylene glycol dimethacrylate,
Or an ion exchanger obtained by introducing cationic and/or anionic ion exchange groups as necessary into polyethylene, polyvinyl fluorocarbon ether, or polytetrafluoroethylene grafted with styrene, or converting them into ion exchange groups. There is an ion exchanger made of a copolymer of a vinyl monomer such as , tetrafluoroethylene, or chlorotrifluoroethylene and a perfluorovinyl monomer having an ion exchange group or a vine group converted into an ion exchange group.
支持体にイオン交換体を担持させる方法は、特に限定さ
れることはなく、周知の方法で実施しうる。The method for supporting the ion exchanger on the support is not particularly limited, and can be carried out by any known method.
例えば支持体く、紫外線またはα線、β線、電子線、γ
線などの電離性放射線の照射、あるいは酸素、オゾン、
クロルスルホン酸、過酸化水素、過酸化ベンゾイル、過
酢酸などの酸化剤による処理、またはこれらの2種以上
の処理を行なった後モノマーをグラフトし、イオン交換
体を担持させる方法、あるいは、支持体(例えばポリエ
チレン)に電離性放射線全照射した後、アクリル酸およ
び/またはメタクリル酸の水溶液を反応させてグラフト
重合体を得、これを水酸化す) IJウム水溶液で処理
する方法等が挙げられる。For example, if the support is
Irradiation with ionizing radiation such as radiation, oxygen, ozone,
A method of carrying an ion exchanger by grafting a monomer after treatment with an oxidizing agent such as chlorosulfonic acid, hydrogen peroxide, benzoyl peroxide, peracetic acid, or two or more of these treatments, or a method of supporting an ion exchanger. (For example, polyethylene is fully irradiated with ionizing radiation, then reacted with an aqueous solution of acrylic acid and/or methacrylic acid to obtain a graft polymer, which is then hydroxylated).
別の方法として、支持体にイオン交換体との親和性の大
きい重合層(接着層)を介して、イオン交換体を支持さ
せる方法がある。この方法は、先ず支持体に、イオン交
換体との接着層全形成するためモノマーをグラフト重合
させる。Another method is to make the support support the ion exchanger through a polymer layer (adhesive layer) that has a high affinity for the ion exchanger. In this method, first, monomers are graft-polymerized on the support to form a complete adhesive layer with the ion exchanger.
接着層を形成するためのモノマーは、その重合体がイオ
ン交換体に対して、大きい親和力乃至は接着性を有する
ものが使用される。このような七ツマ−としては例えば
プロピレンなどのオレフィンモノマー、塩化ビニル−1
どのハロゲン化ビニルモノマー、スチレン誘導体、アク
リロニトリルなどのニトリル基金有するモノマー、ブタ
ジェンのようなジエンモノマー、酢酸ビニル、アクリル
酸エチルのような酸エステル基を有するモノマーがある
。As the monomer for forming the adhesive layer, one whose polymer has a high affinity or adhesion to the ion exchanger is used. Examples of such monomers include olefin monomers such as propylene, vinyl chloride-1
These include vinyl halide monomers, styrene derivatives, monomers with nitrile groups such as acrylonitrile, diene monomers such as butadiene, and monomers with acid ester groups such as vinyl acetate and ethyl acrylate.
これらのモノマーを支持体に前述の電離性放射線照射及
び/又は酸化剤処理などの手段にてグラフト重合させる
。即ち、支持体を予めこれら手段にて前処理した後、上
記グラフトさせるべきモノマー溶液を含浸させて重合さ
せるか、或いは紫外線、放射線の場合は支持体にモノマ
ー溶液を含浸させた状態で照射しても良い。次釦、支持
体に前記イオン交換体を支持させる。These monomers are graft-polymerized onto the support by means such as irradiation with ionizing radiation and/or treatment with an oxidizing agent as described above. That is, after the support is pretreated by these means, it is impregnated with the monomer solution to be grafted and polymerized, or in the case of ultraviolet rays or radiation, the support is irradiated with the monomer solution impregnated. Also good. Next button is to support the ion exchanger on the support.
この方法は、イオン交換体の種類やその製造性などによ
ジ異なるが、例えば次の様に行う。前記イオン交換体の
原料モノマー混合物を重Gat)合する前に支持体に含
浸させ、含浸後に該モノマー混合物を重(縮)合させる
か、或いは予め部分的に重(縮)合させた初期重(縮)
合体をそのまま、又は必要に応じて適宜の溶媒に溶解さ
せて支持体に含浸させ、含浸後に′M(縮)合を完結さ
せる。This method varies depending on the type of ion exchanger, its productivity, etc., but is carried out, for example, as follows. Either the raw material monomer mixture of the ion exchanger is impregnated into a support before polypolymerization, and the monomer mixture is poly(condensed) after impregnation, or the initial polymerization is partially poly(condensed) in advance. (shrink)
The combined product is impregnated onto a support as it is or, if necessary, dissolved in a suitable solvent, and after the impregnation, the 'M (condensation) reaction is completed.
この方法の特長は、支持体にはイオン交換体形成モノマ
ーと親和性の大きいグラフト重合物が存在するので、モ
ノマー混合物又はその初期重(縮)金物によって、支持
体の接着層は、膨潤又は溶解し、含浸が充分に行なわれ
る。この結果続いて行われるモノマー混合物又はその初
期重(縮)合物の重合により、その重合物がグラフト重
合層を介して支持体と緊密に一体化した構造が得られる
。The feature of this method is that since the support contains a graft polymer with a high affinity for the ion exchanger-forming monomer, the adhesive layer of the support will swell or dissolve due to the monomer mixture or its initial polymerization (condensation). However, impregnation is carried out sufficiently. As a result, the subsequent polymerization of the monomer mixture or its initial poly(condensation) product provides a structure in which the polymer is closely integrated with the support via the graft polymerization layer.
支持体に含浸し重合させた重合物が、十分にイオン交換
基を有しない場合は、続いて周知の手段により陽又は陰
イオン交換基が導入され、イオン交換フィルタが得られ
る。If the polymer impregnated into the support and polymerized does not have sufficient ion exchange groups, then cation or anion exchange groups are introduced by well-known means to obtain an ion exchange filter.
この様にして、イオン交換フィルタが製造され、繊維状
又は織物状のアニオン交゛換フィルタ及びカチオン交換
フィルタが得られる。In this way, an ion exchange filter is produced, and a fibrous or woven anion exchange filter and a cation exchange filter are obtained.
使用するアニオン交換フィルタ及びカチオン交換フィル
タの種類、充填量、及びその比率は、ガス流中荷電微粒
子の荷電状態や濃度等にょジ適宜決めることが出来る。The type, filling amount, and ratio of the anion exchange filter and cation exchange filter to be used can be determined as appropriate depending on the charge state, concentration, etc. of the charged particles in the gas flow.
例えば、アニオン交換フィルタは負荷電の微粒子の捕集
に1又カチオン交換フイルタは正荷電の微粒子の捕集に
効果的である。又、充填量やその比率は、荷電微粒子の
濃度、濃度比率に対応して見合う量を、装置の形状、構
造、圧損等を考慮し、適宜法めれば良い。例えば微粒子
が予備荷電により、負荷電を帯びており、又、元来空気
中に正荷電の微粒子があることからアニオン交換フィル
タ80 (V/V%)、に対しカチオン交換フィルタ2
0(V/T/%)の割合で充填されたものを用うればよ
い。For example, an anion exchange filter is effective for collecting negatively charged particles, and a cation exchange filter is effective for collecting positively charged particles. Further, the filling amount and its ratio may be determined as appropriate in accordance with the concentration and concentration ratio of the charged fine particles, taking into consideration the shape, structure, pressure loss, etc. of the device. For example, the particles are negatively charged due to pre-charging, and since there are naturally positively charged particles in the air, the anion exchange filter is 80 (V/V%), while the cation exchange filter is 2.
It is sufficient to use one filled with a ratio of 0 (V/T/%).
9面に関する説明では、予備荷電部後流のフィルタ10
、2’ 4のみにイオン交換樹脂膜を使用する方式を
説明したが、予備荷電部入口の粗フィルタ25にも同様
に使用出来ることは言うまでもない。In the explanation regarding surface 9, the filter 10 downstream of the pre-charging section is
, 2' and 4 has been described, but it goes without saying that it can be similarly used for the coarse filter 25 at the inlet of the pre-charging section.
実施例
下記の手段で製造した繊維状のイオン交換フィルタを用
い第2図に示した空気清浄器を用いて試験した。EXAMPLE A fibrous ion exchange filter manufactured by the following method was tested using the air purifier shown in FIG.
ただし、
紫外線光源;水銀−キセノンランプ
光電子放出面;黄銅
充填割合;アニオン交換フィルタ70%:カチオン交換
フィルタ50%(フィ
ルタは繊維状である)
発生微粒子は、煙草の煙(平均粒径0.5〜0.4μl
11) ′ft用い、適宜清浄空気で希釈し10p/m
1nで吸引して、入口(粗フイルタ後方)及び出口(イ
オン交換樹脂膜後方)で粒子測定器を用い濃度を測定し
た。結果全下記表−1に示す。However, ultraviolet light source; mercury-xenon lamp photoelectron emitting surface; brass filling ratio; anion exchange filter 70%: cation exchange filter 50% (filter is fibrous). The generated fine particles are cigarette smoke (average particle size 0.5 ~0.4μl
11) Use 'ft, dilute with clean air as appropriate and add 10p/m.
The concentration was measured using a particle measuring device at the inlet (behind the coarse filter) and the outlet (behind the ion exchange resin membrane) by suctioning at 1 n. All results are shown in Table 1 below.
表 1
イオン交換フィルタの製造法
■アニオン交換フィルタ二繊維状のポリプロピレンを窒
素中で電子線20Mrad’i照射し、次いでヒドロキ
シスチレンモノマーとイソグレンを含む溶液に浸漬し、
グラフト重合反応を行った。反応後、四級アミン化を行
い、アニオン交換フィルタを得た。Table 1 Manufacturing method of ion exchange filter ■Anion exchange filter Two fibrous polypropylene is irradiated with 20 Mrad'i of electron beam in nitrogen, then immersed in a solution containing hydroxystyrene monomer and isogrene,
A graft polymerization reaction was performed. After the reaction, quaternary amination was performed to obtain an anion exchange filter.
■カチオン交換フィルタ:繊維状のポリプロピレンを窒
素中で電子線20Mradk照射し、次いでアクリル酸
水溶液に浸漬し、グラフト重合反応を行った。反応後、
水酸化ナトリウム溶液で処理全行い、カチオン交換フィ
ルタを得た。(2) Cation exchange filter: Fibrous polypropylene was irradiated with an electron beam of 20 Mradk in nitrogen, and then immersed in an aqueous acrylic acid solution to perform a graft polymerization reaction. After the reaction,
All treatments were performed with a sodium hydroxide solution to obtain a cation exchange filter.
本実施例では、イオン変換フィルタのみを用いた捕集方
法を示したが、イオン交換フィルタを用いる方法に他の
周知の捕東方法金組合せて行うことが出来ることは言う
迄もない。Although this embodiment shows a collection method using only an ion exchange filter, it goes without saying that the collection method using an ion exchange filter can be combined with other known collection methods.
例えば、流路の前流にイオン交換フィルタを用いてラフ
に捕集全行い又は特定成分金主に捕集全行い、後流で集
じん板又は静電フィルタで捕集全行う方法。又、逆に、
流路の前流で集じん板金用いラフに捕集を行い(例えば
、比較的大きい微粒子のみ前流で捕集全行う)、後流で
イオン交換フィルタで高効率で捕集全行う方法などがあ
る。For example, a method in which an ion exchange filter is used in the upstream of the flow path to perform rough collection, or a specific component is mainly collected, and a dust collection plate or an electrostatic filter is used in the downstream to perform complete collection. Also, conversely,
There is a method where rough collection is performed using a dust collection sheet metal in the upstream of the flow path (for example, only relatively large particles are collected completely in the upstream), and all collection is performed with high efficiency using an ion exchange filter in the downstream. be.
すなわち、イオン交換フィルタを本方式の適用分野、用
途、装置の構造、形状、経済性等により、その特質を活
用した使用方法を適宜選択して用いることが出来る。That is, the ion exchange filter can be used by appropriately selecting a usage method that takes advantage of its characteristics, depending on the field of application of the present system, usage, structure, shape, economic efficiency, etc. of the device.
t 荷電粒子の捕集方法として、イオン交換フィルタを
用いたことで、
■ ガス流中の荷電粒子を効率良く捕集することが出来
之。t By using an ion exchange filter as a method for collecting charged particles, it is possible to efficiently collect charged particles in a gas flow;
■ 捕集粒子の再飛散が無くなジ、定常運転状態が長期
間にわたり保持出来た。■ Since there was no re-scattering of the collected particles, a steady operating state could be maintained for a long period of time.
2 イオン変換フィルタの形状全ネットなどの織物状又
は繊維状にしたことで、
■ 抵抗が少ない、実用的なアニオン交換フィルタ、カ
チオン交換フィルタが得られた。2. Shape of the ion exchange filter By making the filter into a woven or fibrous form such as a full net, practical anion exchange filters and cation exchange filters with low resistance were obtained.
五 紫外線照射又は放射線照射法により予備荷電を行い
、後流でイオン交換フィルタで荷電粒子を捕集すること
で、
■ ガス流中の粒子は、後流への流出が実質的に無視で
きる位、高効率で捕集され、超高清浄度のガス流が得ら
れた。(v) By pre-charging by ultraviolet irradiation or radiation irradiation method and collecting charged particles with an ion exchange filter in the wake, the particles in the gas flow are reduced to such an extent that their outflow to the wake can be virtually ignored. A gas stream with high efficiency and ultra-high purity was obtained.
■ 各分野、用途への適用が出来、特に、従来法では限
界、かつ困難のあったクリーンルーム関連、なかでもバ
イオクリーンルーム関連へ有効な設備が供給できた。■ It can be applied to various fields and uses, and in particular, we have been able to supply effective equipment for clean rooms, where conventional methods had limitations and difficulties, especially for bio-clean rooms.
4、7ニオン交換フイルタ及びカチオン交換フィルタを
粒子の荷電状態等により、適宜使い分け、又組合せて使
用出来るので、目的に応じた最適な捕集方法、装置が供
給出来九。4.7 The ion exchange filter and cation exchange filter can be used appropriately or in combination depending on the charge state of particles, etc., so it is possible to provide the optimal collection method and device depending on the purpose.
5、 予備荷電しない、流路で、イオン交換フィルタを
用いることで、(予備荷電部前流で、プレフィルタとし
て用いることで)、
■ 後流の予備荷電部の負荷が減少し、保守管理、が容
易となジ、連続運転がより長期に行えた。5. By using an ion exchange filter in the flow path without pre-charging (by using it as a pre-filter upstream of the pre-charging section), ■ the load on the downstream pre-charging section is reduced, making maintenance management easier. This made it easier to operate continuously for a longer period of time.
以上により、紫外線照射方式及び放射線照射方式の適用
分野、用途が広がった。As a result of the above, the application fields and uses of the ultraviolet irradiation method and the radiation irradiation method have expanded.
@1図は本発明をクリーンルームに適用した例を説明す
るための図面、第2図は予備荷電部をより詳しく説明す
るための図面である。
1・・・クリーンルーム、6・・・HKP&フィルタ、
8・・・7アン部、9・・・紫外線照射部、10−會→
・・・イオン交換フィルタ、11・・・クリーンベンチ
、15・・・作業台、21・・・光電子放出材、22・
・・紫外線ランプ、Figure 1 is a diagram for explaining an example in which the present invention is applied to a clean room, and Figure 2 is a diagram for explaining the pre-charging section in more detail. 1...Clean room, 6...HKP & filter,
8...7 part, 9...ultraviolet irradiation part, 10-kai →
... Ion exchange filter, 11 ... Clean bench, 15 ... Workbench, 21 ... Photoelectron emission material, 22.
・UV lamp,
Claims (1)
イオン交換体をグラフト重合法により支持されたイオン
交換フィルタに通ずることを特徴とする荷電微粒子を含
むガス流から荷電微粒子を除去する方法。 2、ガス流中の微粒子に予備荷電を行なつた後イオン交
換フィルタに通ずる特許請求の範囲第1項記載の方法。 3、紫外線又は放射線を照射することにより予備荷電を
行なう特許請求の範囲第2項記載の方法。 4、予備荷電を電場で行なう特許請求の範囲第3項記載
の方法。 5、イオン交換フィルタが織物状又は繊維状のものであ
る特許請求の範囲第1項乃至第4項の何れか1つに記載
の方法。 6、荷電微粒子を含むガス流吸入口からガス流排出口ま
でのガス流路上に、少くとも紫外線照射部又は放射線照
射部よりなる予備荷電部及びイオン交換フィルタを順次
設けてなるガス流から荷電微粒子を除去する装置。 7、予備荷電部に電場を設けるようにしてなる特許請求
の範囲第6項記載の装置。[Claims] 1. A gas flow containing charged fine particles, characterized in that the gas flow containing charged fine particles is passed through an ion exchange filter in which an ion exchanger is supported by a graft polymerization method on a porous polymer support. A method for removing charged particles from. 2. The method of claim 1, wherein the particles in the gas stream are precharged and then passed through an ion exchange filter. 3. The method according to claim 2, wherein the precharging is performed by irradiating ultraviolet light or radiation. 4. The method according to claim 3, wherein the precharging is performed using an electric field. 5. The method according to any one of claims 1 to 4, wherein the ion exchange filter is woven or fibrous. 6. Charged particulates are removed from the gas flow by sequentially providing at least a pre-charging unit consisting of an ultraviolet irradiation unit or a radiation irradiation unit and an ion exchange filter on the gas flow path from the gas flow inlet to the gas flow outlet that contains the charged particulates. A device that removes 7. The device according to claim 6, wherein an electric field is provided in the pre-charging section.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61198083A JPS6354959A (en) | 1986-08-26 | 1986-08-26 | Method and apparatus for removing particulate material from gas flow |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61198083A JPS6354959A (en) | 1986-08-26 | 1986-08-26 | Method and apparatus for removing particulate material from gas flow |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6354959A true JPS6354959A (en) | 1988-03-09 |
JPH059123B2 JPH059123B2 (en) | 1993-02-04 |
Family
ID=16385228
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61198083A Granted JPS6354959A (en) | 1986-08-26 | 1986-08-26 | Method and apparatus for removing particulate material from gas flow |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6354959A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5060805A (en) * | 1989-06-20 | 1991-10-29 | Ebara Research Co., Ltd. | Photoelectron emitting member |
US5154733A (en) * | 1990-03-06 | 1992-10-13 | Ebara Research Co., Ltd. | Photoelectron emitting member and method of electrically charging fine particles with photoelectrons |
-
1986
- 1986-08-26 JP JP61198083A patent/JPS6354959A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5060805A (en) * | 1989-06-20 | 1991-10-29 | Ebara Research Co., Ltd. | Photoelectron emitting member |
US5154733A (en) * | 1990-03-06 | 1992-10-13 | Ebara Research Co., Ltd. | Photoelectron emitting member and method of electrically charging fine particles with photoelectrons |
Also Published As
Publication number | Publication date |
---|---|
JPH059123B2 (en) | 1993-02-04 |
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