JPH0634941B2 - Method and apparatus for cleaning air by irradiation of ultraviolet rays or radiation - Google Patents
Method and apparatus for cleaning air by irradiation of ultraviolet rays or radiationInfo
- Publication number
- JPH0634941B2 JPH0634941B2 JP24427586A JP24427586A JPH0634941B2 JP H0634941 B2 JPH0634941 B2 JP H0634941B2 JP 24427586 A JP24427586 A JP 24427586A JP 24427586 A JP24427586 A JP 24427586A JP H0634941 B2 JPH0634941 B2 JP H0634941B2
- Authority
- JP
- Japan
- Prior art keywords
- emitting material
- photoelectron emitting
- air
- reflecting surface
- photoelectron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/34—Constructional details or accessories or operation thereof
- B03C3/38—Particle charging or ionising stations, e.g. using electric discharge, radioactive radiation or flames
- B03C3/383—Particle charging or ionising stations, e.g. using electric discharge, radioactive radiation or flames using radiation
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、電子工業、薬品工業、食品工業、農林産業、
医療、精密機械工業等におけるクリーンルーム、クリー
ンブース、クリーントンネル、クリーンベンチ、安全キ
ヤビネツト、無菌室、バスボツクス、無菌エアカーテ
ン、クリーンチユーブ等における空気清浄方法及びその
装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to an electronic industry, a pharmaceutical industry, a food industry, an agriculture and forestry industry,
The present invention relates to an air cleaning method and its apparatus in a clean room, a clean booth, a clean tunnel, a clean bench, a safety cabinet, a sterile room, a bath box, a sterile air curtain, a clean tube, etc. in the medical and precision machinery industries.
従来の室内の空気清浄方法或いはその装置を大別する
と、 (1) 機械的濾過方式（例えばＨＥＰＡフイルター） (2) 静電的に微粒子の捕集を行なう高電圧による荷電
及び導電性フイルターによる濾過方式（例えばＭＥＳＡ
フイルター） があるが、これらの方式には夫々次のような欠点があつ
た。The conventional indoor air cleaning methods or the apparatus therefor are roughly classified into (1) a mechanical filtration method (for example, a HEPA filter) (2) a high-voltage charged and conductive filter that electrostatically collects fine particles. Method (eg MESA
However, each of these methods has the following drawbacks.
即ち、機械的濾過方式においては、空気の清浄度（クラ
ス）をあげるためには目の細かいフイルターを使用する
必要があるが、この場合圧損が高く、また目づまりによ
る圧損の増加も著るしく、フイルター寿命も短かく、フ
イルターの維持、管理或いは交換が面倒であるばかりで
なく、フイルターの交換を行う場合、その間作業をスト
ツプする必要があり、復帰までには長時間を要してお
り、生産能率が悪いという欠点があつた。That is, in the mechanical filtration method, it is necessary to use a fine filter to increase the air cleanliness (class), but in this case, the pressure loss is high, and the pressure loss due to clogging is also remarkable. In addition, the life of the filter is short, and maintenance, management or replacement of the filter is not only troublesome, but when replacing the filter, it is necessary to stop the work during that time, and it takes a long time to return. It had the drawback of poor production efficiency.
また、空気の清浄度を上げる為に換気回数（フアンによ
る空気循環回数）を増加することも行われているが、こ
の場合動力費が高くつくという欠点があつた。Further, in order to improve the cleanliness of the air, the number of ventilations (the number of air circulations by a fan) is also increased, but in this case, there is a drawback that the power cost becomes high.
また、従来のフイルターによる方法は微粒子の除去だけ
を目的としているので、工業用クリーンルーム用として
は使用できるが、フイルターには必ずと言ってよい程ピ
ンホールがあり、汚染空気の一部がリークするため、バ
イオロジカルクリーンルームでの使用には限界があつ
た。Further, since the conventional method using a filter is intended only for removing fine particles, it can be used as an industrial clean room, but the filter has pinholes, and some of the contaminated air leaks. Therefore, there was a limit to use in a biological clean room.
また、静電的に微粒子の捕集を行う方式においては、予
備荷電部に例えば１５〜７０ｋＶという高電圧を必要と
するため、装置が大型となり、また安全性、維持管理の
面で問題があつた。Further, in the method of electrostatically collecting fine particles, a high voltage of, for example, 15 to 70 kV is required in the pre-charging portion, so that the device becomes large and there is a problem in safety and maintenance. It was
これらの問題点を解決するために本発明者は高電子放出
材上への紫外線照射、又は放射線照射による空気清浄方
法を提案した（特願昭６０−１８７２３、特願昭６１−
８５９９６）。In order to solve these problems, the present inventor has proposed an air cleaning method by irradiating a high electron emission material with ultraviolet rays or radiation (Japanese Patent Application Nos. 60-18723 and 61-61).
85996).
この方式を効果的に行なうためには、光電子放出材から
の光電子の放出をいかに効率良く行えない微粒子を荷電
するかが課題であつた。例えば、通常平板状の光電子放
出材へ紫外線又は放射照射を行なう場合、光電子放出材
の先端部や四隅部は十分に作用しておらず、微粒子のシ
ヨートパスにより荷電せず、流出するなど、性能低下を
招く原因となり、改善の余地があつた。In order to effectively carry out this method, the problem was how to charge the fine particles that cannot efficiently emit photoelectrons from the photoelectron emitting material. For example, when the flat plate-shaped photoelectron emission material is irradiated with ultraviolet rays or radiation, the tips and the four corners of the photoelectron emission material do not work sufficiently, and the particles are not charged by the short pass of the photoelectron emission and flow out. There was room for improvement.
例えば、クリーンベンチ１１（第１図）の断面図を示す
第６図において、２１は光電子放出材、２２は紫外線ラ
ンプ、Ａは四隅部を示すものであるが、この様な装置の
場合、四隅部Ａへの紫外線照射は不十分となり、光電子
放出が効果的に起こらず、この部分の微粒子の一部は荷
電されずシヨートパスする恐れがあつた。又、光電子放
出面は、微粒子が多く存在する空気流れの中心部から離
れているため、荷電が効果的に行なわれない場合があつ
た。For example, in FIG. 6 showing a cross-sectional view of the clean bench 11 (FIG. 1), 21 is a photoelectron emitting material, 22 is an ultraviolet lamp, and A is a four-corner portion. Irradiation of the part A with ultraviolet rays became insufficient, photoelectron emission did not occur effectively, and some of the fine particles in this part were not charged, and there was a risk of short pass. Further, since the photoelectron emitting surface is away from the center of the air flow where many fine particles are present, charging may not be performed effectively.
この種の装置は、かなりの高効率な性能、例えば９９％
以上、好ましくは９９．９％以上で微粒子除去を行なう
必要があるので改善の余地があつた。This kind of device has a very high efficiency performance, for example 99%.
As described above, there is room for improvement because it is necessary to remove fine particles at 99.9% or more.
本発明は、光電子放出材に紫外線又は放射線照射を行な
う空気清浄方法及び装置に関し、反射面、好ましくは曲
面状の反射面を利用して、又必要により光電子放出材を
空気流れの任意の空間部に設置して光電子放出を効果的
に行ない、発生する光電子により微粒子を効率良く荷電
する方法及び装置を提供することを目的とする。TECHNICAL FIELD The present invention relates to an air cleaning method and apparatus for irradiating a photoelectron emitting material with ultraviolet rays or radiations, utilizing a reflecting surface, preferably a curved reflecting surface, and if necessary, applying the photoelectron emitting material to an arbitrary space portion of an air flow. It is an object of the present invention to provide a method and a device for effectively discharging photoelectrons by installing the device in a battery and efficiently charging fine particles with generated photoelectrons.
本発明は、 (1) 光電子放出材上に紫外線又は放射線を照射するこ
とにより光電子放出材より光電子を放出せしめ、該光電
子により空気中の微粒子を荷電せしめた後、該荷電した
粒子を捕集することにより空気を清浄する方法において
反射面を利用して光電子の放出を効率良く行なうことを
特徴とする空気の清浄方法。及び (2) 空気吸入口から空気排出口までの空気流路上に、
少なくとも光電子放出材上への紫外線又は放射線照射
部、反射面部及び光電子放出材により放出された光電子
により荷電された微粒子を捕集する荷電微粒子捕集部を
設けてなる空気清浄装置 である。(1) The photoelectron emitting material is irradiated with ultraviolet rays or radiation to emit photoelectrons from the photoelectron emitting material, the fine particles in the air are charged by the photoelectron, and then the charged particles are collected. Thus, in the method for cleaning air, a method for cleaning air is characterized in that photoelectrons are efficiently emitted by utilizing a reflecting surface. And (2) On the air flow path from the air intake port to the air exhaust port,
An air cleaning device comprising at least an ultraviolet or radiation irradiating part on a photoelectron emitting material, a reflecting surface part, and a charged fine particle collecting part for collecting fine particles charged by photoelectrons emitted by the photoelectron emitting material.
つぎに、図面に基いて本発明を詳しく説明する。Next, the present invention will be described in detail with reference to the drawings.
第２図はバイオロジカルクリーンルームにおけるクリー
ンベンチ併用方式、即ち、作業領域内の一部だけを高清
浄度にした方式の概略図を示すものである。FIG. 2 is a schematic diagram of a clean bench combination system in a biological clean room, that is, a system in which only a part of the work area is highly clean.
第１図は、紫外線照射部の概略図を示す。FIG. 1 shows a schematic view of an ultraviolet irradiation unit.
先づ、第２図に基いて説明する。クリーンルーム１内に
は、配管２から導入される外気の粗粒子をプレフィルタ
３で濾過した後、クリーンルーム１の空気取出し口４か
ら取り出された空気と共にフアン５を介して空気調和装
置６にて温度及び湿度を調節した後、ＨＥＰＡフイルタ
ー７により微粒子を除去した空気が循環供給されてお
り、清浄度（クラス）１０，０００程度に保持されてい
る。First, description will be made with reference to FIG. In the clean room 1, after the coarse particles of the outside air introduced from the pipe 2 are filtered by the pre-filter 3, the temperature in the air conditioner 6 is passed through the fan 5 together with the air taken out from the air outlet 4 of the clean room 1. After adjusting the temperature and humidity, the air from which fine particles have been removed by the HEPA filter 7 is circulated and supplied, and the cleanliness (class) is maintained at about 10,000.
一方、クリーンルーム１内のフアン部８、紫外線照射部
９、フイルター１０を設けたクリーンベンチ１１内の作
業台１３上は、高清浄度（クラス１０）の無菌雰囲気に
保持される。On the other hand, the workbench 13 in the clean bench 11 provided with the fan section 8, the ultraviolet irradiation section 9, and the filter 10 in the clean room 1 is maintained in a high cleanliness (class 10) aseptic atmosphere.
即ち、クリーンベンチ１１においては、クリーンルーム
１内の清浄度（クラス）１０，０００程度の空気がフア
ン部８のフアンにより吸引され、紫外線照射部９で紫外
線を照射することにより空気中の微粒子は荷電されると
共に、ウイルス、バクテリヤ、酵母、かび等の微生物が
殺菌された後、フイルター１０で荷電された微粒子を除
去することにより、作業台１３上は高清浄度に保持され
る。That is, in the clean bench 11, air having a cleanliness (class) of about 10,000 in the clean room 1 is sucked by the fan of the fan unit 8, and ultraviolet rays are irradiated by the ultraviolet irradiation unit 9 so that the fine particles in the air are charged. At the same time, the microorganisms such as viruses, bacteria, yeasts and molds are sterilized, and the charged fine particles are removed by the filter 10, so that the workbench 13 is maintained at a high degree of cleanliness.
クリーンベンチ１１内の作業台１３への器具、製品等の
出し入れは、クリーンベンチ１１に設けた可動シヤッタ
ー１２により行なう。The movable shutter 12 provided in the clean bench 11 performs the loading / unloading of instruments, products, etc. to / from the workbench 13 in the clean bench 11.
紫外線照射部９は、その概略図が第１図に示されている
如く、主として反射面２０、網状の光電子放出材２１、
紫外線ランプ２２から成り、網状の光電子放出材面に紫
外線ランプ２２からの紫外線が直接又は反射面２０によ
り裏面からも照射され、光電子放出材の表及び裏面上で
効率良く光電子が放出される。これらの空間にフアン８
により粗フイルター２４を介して導入された空気２３を
通すことにより、空気中の微粒子が光電子により荷電さ
れ、荷電された微粒子はフイルター１０で捕集され、高
清浄な空気２５が得られる。網状の光電子放出材よりな
る金属面２１を紫外線ランプ２２と反射面２０の空間に
適宜の位置、個数、形状で設置することにより、空間に
おける微粒子への荷電が効果的に行なわれる。As shown in FIG. 1, the ultraviolet irradiation unit 9 mainly has a reflecting surface 20, a net-like photoelectron emitting material 21,
An ultraviolet lamp 22 is provided, and the surface of the net-like photoelectron emitting material is irradiated with the ultraviolet light from the ultraviolet lamp 22 either directly or from the back surface by the reflecting surface 20, so that photoelectrons are efficiently emitted on the front and back surfaces of the photoelectron emitting material. Juan 8 in these spaces
By passing the air 23 introduced through the coarse filter 24, the fine particles in the air are charged by photoelectrons, the charged fine particles are collected by the filter 10, and highly clean air 25 is obtained. By installing the metal surface 21 made of a net-like photoelectron emitting material in the space between the ultraviolet lamp 22 and the reflecting surface 20 at an appropriate position, number and shape, the particles in the space can be effectively charged.
第１図に示す例における光電子放出材は、空間に１個設
置した場合であるが、複数個設置し、又は光電子放出材
の形状を適宜の形状とすることにより、空間における光
電子を任意に分布させることが出来る。これにより、例
えば光電子の放出を微粒子濃度分布等に対応させて行な
うことにより微粒子への荷電が効果的に行なわれる。The photoelectron emitting material in the example shown in FIG. 1 is a case where one photoelectron emitting material is installed in the space, but by installing a plurality of photoelectron emitting materials or by setting the shape of the photoelectron emitting material to an appropriate shape, the photoelectrons in the space can be arbitrarily distributed. It can be done. Thus, for example, the photoelectrons are emitted in accordance with the particle concentration distribution and the like, whereby the particles are effectively charged.
反射面２０の材質としては紫外線を反射するものであれ
ば良く、鏡（ガラス質）、金属材料等を、又形状として
紫外線を効果的に光電子放出材に照射出来る形状を適宜
用いることが出来る。The reflective surface 20 may be made of any material that reflects ultraviolet light, such as a mirror (glassy material), a metal material, or a shape that can effectively irradiate the photoelectron emitting material with ultraviolet light.
好ましい材質は、後述の仕事関数の小さい材料が好まし
い。すなわち、反射作用に加え、それ自体光電子放出材
となりうるから一石二鳥となる。反射面の好ましい材料
として、Al、Ag、Auがある。又、反射性に欠ける材料
は、適宜研摩加工等の加工を行なうことにより使用可能
となる。A preferable material is a material having a low work function described later. In other words, in addition to the reflection function, it can be a photoelectron emitting material itself, and thus becomes one bird and two birds. Preferred materials for the reflective surface include Al, Ag and Au. Further, a material lacking in reflectivity can be used by appropriately performing processing such as polishing processing.
好ましい形状は、反射面の少なくとも一部が曲面、例え
ば円状の曲面で、光電子放出材への紫外線照射が効果的
に行われる形状であれば良い。A preferable shape is that at least a part of the reflecting surface is a curved surface, for example, a circular curved surface, and the photoelectron emitting material can be effectively irradiated with ultraviolet rays.
例として、第３図、第４図及び第５図に第１図に示した
紫外線照射部の断面図を示す。第５図は、網状の光電子
放出材２１をプリーツ状に形成した場合である。反射面
は第３図、第４図及び第５図の符号２０で示した形状の
他に楕円形等の第３図と第４図に示す反射面の中間的な
形状、又はこれらの図に示されている右又は左半分の形
状であつても良い事は言う迄もない。As an example, FIGS. 3, 4, and 5 show cross-sectional views of the ultraviolet irradiation unit shown in FIG. FIG. 5 shows the case where the net-shaped photoelectron emitting material 21 is formed in a pleat shape. In addition to the shape shown by the reference numeral 20 in FIGS. 3, 4, and 5, the reflecting surface is an elliptical shape or the like, which is an intermediate shape between the reflecting surfaces shown in FIGS. 3 and 4, or these drawings. It goes without saying that the right or left half shape shown may be used.
反射面２０の材質や形状は、装置の構造、種類、用途、
効果、経済性、光源の種類、紫外線の照射の方法、光電
子放出材の形状、設置の方法等により適宜決めることが
出来る。The material and the shape of the reflecting surface 20 depend on the structure, type, application of the device,
It can be appropriately determined depending on the effect, economy, type of light source, irradiation method of ultraviolet rays, shape of photoelectron emitting material, installation method, and the like.
これらの例は、反射面２０と光電子放出材２１とが個別
に設置された場合を示すものであるが、これらを兼ねて
行なつても良い。この場合の形状は、前述のごとく、少
なくとも一部が曲面、例えば円状の曲面とすることで、
光電子放出材から放出された光電子は、効果的に微粒子
に作用し、荷電が行なわれる。Although these examples show the case where the reflecting surface 20 and the photoelectron emitting material 21 are individually installed, they may be combined. The shape in this case is, as described above, at least a part of a curved surface, for example, a circular curved surface,
The photoelectrons emitted from the photoelectron emitting material effectively act on the fine particles to be charged.
すなわち、反射面を兼ねた光電子放出面を曲面とするこ
とで、従来の光電子放出面の先端部や四隅部が有効に利
用され、光電子が流路中心部方向へシヤワー状に注がれ
微粒子への荷電が効果的に行なわれる。That is, by making the photoelectron emission surface that also serves as a reflection surface a curved surface, the tips and four corners of the conventional photoelectron emission surface are effectively used, and photoelectrons are poured in a shower-like shape toward the center of the flow path to form fine particles. Is effectively charged.
反射面と光電子放出材を個別に設置するか、又はこれら
を兼ねて行なうかは、装置の構造、種類、用途、規模、
効果、経済性等で適宜決めることが出来る。Whether the reflective surface and the photoelectron emitting material are separately installed, or whether they are combined, the structure, type, application, scale of the device,
It can be appropriately determined depending on the effect, economy, etc.
例えば、通常反射面と光電子放出材が個別の装置は、か
なりの高性能な装置（例、クラス10以下）や大型の装置
に、又反射面が光電子放出材を兼ねた装置は、比較的高
性能な装置（例、クラス１０〜１００）や小型の装置に
向いている。For example, a device in which the reflective surface and the photoemissive material are usually separate is a relatively high-performance device (eg, class 10 or less) or a large device, and a device in which the reflective surface also serves as a photoemissive material is relatively high. It is suitable for high-performance devices (eg class 10-100) and small devices.
次に、光電子放出材について説明する。光電子放出材
は、紫外線照射により光電子を放出するものであれば何
れでも良く、光電的な仕事関数の小さいもの程好まし
い。効果や経済性の面から、Ba、Sr、Ca、Ｙ、Gd、La、
Ce、Nd、Th、Pr、Be、Zr、Fe、Ni、Zn、Cu、Ag、Pt、C
d、Pb、Al、Ｃ、Mg、Au、In、Bi、Nb、Si、Ti、Ta、S
n、Ｐのいずれか又はこれらの化合物又は合金が好まし
く、これらは単独で又は二種以上を複合して用いられ
る。複合材としては、アマルガムの如く物理的な複合材
も用いうる。Next, the photoelectron emitting material will be described. Any photoelectron emitting material may be used as long as it emits photoelectrons upon irradiation with ultraviolet rays, and a material having a smaller photoelectric work function is preferable. From the viewpoint of effect and economy, Ba, Sr, Ca, Y, Gd, La,
Ce, Nd, Th, Pr, Be, Zr, Fe, Ni, Zn, Cu, Ag, Pt, C
d, Pb, Al, C, Mg, Au, In, Bi, Nb, Si, Ti, Ta, S
Either n or P, or a compound or alloy thereof is preferable, and these are used alone or in combination of two or more. As the composite material, a physical composite material such as amalgam can also be used.
例えば、化合物としては酸化物、ほう化物、炭化物があ
り、酸化物にはBaO、SrO、CaO、Y2O6、Gd2O3、Na2O3、T
hO2、Zro2、Fe2O3、ZnO、CuO、Ag2O、PtO、PbO、Al
2O3、MgO、In2O3、BiO、NbO、BeOなどがあり、またほう
化物にはYB6、GdB6、CeB6、CeB6、PrB6、ZrB2などがあ
り、さらに炭化物としてはZrC、TaC、TiC、NbCなどがあ
る。For example, compounds include oxides, borides, and carbides, and oxides include BaO, SrO, CaO, Y 2 O 6 , Gd 2 O 3 , Na 2 O 3 , and T.
hO 2 , Zro 2 , Fe 2 O 3 , ZnO, CuO, Ag 2 O, PtO, PbO, Al
2 O 3 , MgO, In 2 O 3 , BiO, NbO, BeO, etc., and boride include YB 6 , GdB 6 , CeB 6 , CeB 6 , PrB 6 , ZrB 2, etc. Examples include ZrC, TaC, TiC, NbC.
また、合金としては黄銅、青銅、リン青銅、AgとMgとの
合金（Mgが２〜２０wt％）、CuとBeとの合金（Beが１〜
１０wt％）及びBeとAlとの合金を用いることができ、上
記AgとMgとの合金、CuとBeとの合金及びBeとAlとの合金
が好ましい。酸化物は金属表面のみを空気中で加熱した
り、或いは薬品で酸化することによつても得ることがで
きる。As the alloy, brass, bronze, phosphor bronze, an alloy of Ag and Mg (Mg is 2 to 20 wt%), an alloy of Cu and Be (Be is 1 to 1).
10 wt%) and an alloy of Be and Al can be used, and the alloys of Ag and Mg, the alloys of Cu and Be, and the alloys of Be and Al are preferable. Oxides can also be obtained by heating only the metal surface in air or by oxidizing with a chemical.
さらに他の方法としては使用前に加熱し、表面に酸化層
を形成して長期にわたつて安定な酸化層を得ることもで
きる。この例としてはMgとAgとの合金を水蒸気中で３０
０〜４００℃の温度の条件下でその表面に酸化薄膜を形
成させることができ、この酸化薄膜は長期間にわたつて
安定なものである。As another method, it is possible to heat before use to form an oxide layer on the surface to obtain a stable oxide layer over a long period of time. An example of this is an alloy of Mg and Ag in water vapor at 30
An oxide thin film can be formed on the surface thereof under the temperature condition of 0 to 400 ° C., and the oxide thin film is stable for a long period of time.
これらの材料の使用形状は、曲面状、板状、プリーツ
状、網状等何れの形状でもよいが、紫外線の照射面積及
び空気との接触面積の大きな形状のものが好ましく、こ
のような観点からは網状のものが好ましいが、光電子放
出材を反射面と兼ねているか、又は光電子放出材として
個別で用いるか等で適宜組めることが出来る。The shape of these materials to be used may be any shape such as a curved surface, a plate shape, a pleated shape, and a net shape, but a shape having a large irradiation area of ultraviolet rays and a large contact area with air is preferable. A net-like material is preferable, but it can be appropriately assembled depending on whether the photoelectron emitting material also serves as the reflecting surface, or is used individually as the photoelectron emitting material.
クリーンベンチ１１（第１図）を説明すると、フアン８
によりクリーンルーム１（第２図）から空気が吸引さ
れ、空気中の比較的粗い微粒子は粗フイルター２４で捕
集、除去される。Explaining the clean bench 11 (Fig. 1), Juan 8
As a result, air is sucked from the clean room 1 (FIG. 2), and relatively coarse particles in the air are collected and removed by the coarse filter 24.
比較的粗い微粒子を除去された空気２３中の微粒子は、
紫外線ランプ２１により直接に、及び反射面２０により
裏面から紫外線照射された網状の光電子放出材よりなる
金属面２１から放出される光電子の作用により、効率良
く荷電される。The particles in the air 23 from which relatively coarse particles have been removed are
It is efficiently charged by the action of photoelectrons emitted directly from the ultraviolet lamp 21 and from the metal surface 21 made of a net-like photoelectron emitting material irradiated with ultraviolet rays from the back surface by the reflecting surface 20.
又、空気中の微生物は、ここで紫外線エネルギーにより
殺菌作用を受ける。Microorganisms in the air are also sterilized by ultraviolet energy here.
死滅した生物を含む荷電された微粒子は静電フィルター
１０で捕集される。荷電された粒子の捕集器は、何れで
も良い。通常の荷電装置における集じん板（集じん電
極）や静電フイルター方式が一般的であるが、スチール
ウール電極としたような捕集部自体が電極を構成する構
造のものも有効である。又、本発明者がすでに提案した
イオン交換フイルターによる方式も有効である。フイル
ター方式な取り扱いが容易であることや、性能、経済性
の点で有効であるが、一定期間使用すると目詰まりを生
ずるので、必要に応じカートリツジ構造とし、圧力損失
の検出により交換するようにすることにより長期間にわ
たつて安定した運転が可能となる。The charged fine particles containing dead organisms are collected by the electrostatic filter 10. The charged particle collector may be any collector. A dust collecting plate (dust collecting electrode) or an electrostatic filter system in a normal charging device is generally used, but a structure in which the collecting portion itself constitutes an electrode such as a steel wool electrode is also effective. Further, the method using an ion exchange filter, which the present inventor has already proposed, is also effective. It is easy to handle with a filter system and is effective in terms of performance and economy, but it will be clogged if it is used for a certain period of time, so a cartridge type structure should be used if necessary, and it should be replaced when pressure loss is detected. This enables stable operation over a long period of time.
２５は、高清浄な無菌空気（クラス１０）である。25 is highly clean sterile air (class 10).
紫外線の種類は、その照射により光電子放出材が光電子
に放出しうるものであれば何れでもよいが、殺菌作用を
併せてもつものが好ましい。適用分野、作業内容、用
途、経済性などにより適宜決めることができる。Any kind of ultraviolet light may be used as long as it can be emitted by the photoelectron emitting material into photoelectrons upon irradiation thereof, but one having a bactericidal action is also preferable. It can be appropriately determined depending on the application field, work content, application, economy, and the like.
空気中の微粒子への荷電方式として、光電子放出材に電
場が存在しない方式について説明したが、本発明者がす
でに提案した様に、比較的高電圧を印加した電場におい
て、高電子放出材に紫外線又は放射線照射を行なうこと
によりより効率よく空気中の微粒子に荷電させることが
出来る。As a method for charging fine particles in the air, a method in which an electric field does not exist in the photoelectron emitting material has been described, but as already proposed by the present inventor, in the electric field to which a relatively high voltage is applied, the high electron emitting material is exposed to ultraviolet Alternatively, by irradiating radiation, fine particles in the air can be charged more efficiently.
1. 光電子放出に際し、反射面を利用することにより、 光電子放出材への紫外線又は放射線照射が効果的に
行なわれ、光電子の放出が促進され微粒子への荷電が効
果的に行なわれる。1. When photoelectrons are emitted, the use of the reflective surface effectively irradiates the photoelectron emitting material with ultraviolet rays or radiation, promotes the emission of photoelectrons, and effectively charges the fine particles.
反射面を曲面状とすることにより、従来有効に利用
されていなかつた光電子放出材の先端部や四隅部（従来
この部分はシヨートパスが多く効率低下をもたらす原因
であつた）等も有効に利用され、光電子の放出が促進さ
れ微粒子への荷電が効果的に行なわれた。By making the reflecting surface curved, the tips and four corners of the photoelectron emitting material, which have not been effectively used in the past, can be effectively used as well. , The emission of photoelectrons was promoted and the particles were effectively charged.
2. 反射面と光電子放出材を個別に設置することによ
り、 紫外線又は放射線照射が光電子放出材の表面や裏面
等から行なわれ、光電子の放出が効果的に行なわれ、微
粒子への荷電が効果的に行なわれる。2. By installing the reflecting surface and the photoelectron emitting material separately, ultraviolet rays or radiation is irradiated from the front surface or the back surface of the photoelectron emitting material, the photoelectrons are effectively emitted, and the particles are effectively charged. To be done.
光電子放出材を空気流の空間に任意の位置、個数、
形状で設置出来るから、空気流の空間における光電子放
出を空気流中微粒子濃度の分布等に対応させるなど効果
的に行える。これにより、荷電が高効率で行なえる。Photoelectron emission material in the space of the air flow at any position, number,
Since it can be installed in a shape, it is possible to effectively perform photoelectron emission in the space of the air flow by corresponding to the distribution of the concentration of fine particles in the air flow. As a result, charging can be performed with high efficiency.
3. 反射面の少なくとも一部を曲面状の光電子放出材と
することにより、 紫外線又は放射線照射により放出された光電子は、流路
（空気流）中心部に向つてシヤワー状に注がれ、微粒子
への荷電が効果的に行なわれる。3. By using at least part of the reflecting surface as a curved photoelectron emitting material, the photoelectrons emitted by irradiation with ultraviolet rays or radiation are poured in a shower-like shape toward the center of the flow path (air flow) to form fine particles. Is effectively charged.
第１図は本発明を適用したクリーンベンチを説明するた
めの断面概略図、第２図はバイオロジカルクリーンルー
ムにおけるクリーンベンチ併用方式を説明するための概
略図、第３図、第４図及び第５図は本発明における光電
子放出材及び反射面の形状を説明するための図面、第６
図は従来のクリーンベンチにおいて光電子放出が効果的
に起こらない部分を説明するための図面である。 １……クリーンルーム、３……プレフイルター、 ６……空気調和装置、７……ＨＥＰＡフイルター、 ８……フアン部、９……紫外線照射部、 １０……フイルター、１１……クリーンベンチ、 １３……作業台、２０……反射面、 ２１……光電子放出材、２２……紫外線ランプFIG. 1 is a schematic cross-sectional view for explaining a clean bench to which the present invention is applied, and FIG. 2 is a schematic view for explaining a combined clean bench system in a biological clean room, FIGS. 3, 4, and 5. FIG. 6 is a view for explaining the shapes of the photoelectron emitting material and the reflecting surface according to the present invention.
The drawing is a view for explaining a portion where photoelectron emission does not occur effectively in a conventional clean bench. 1 ... Clean room, 3 ... Pre-filter, 6 ... Air conditioner, 7 ... HEPA filter, 8 ... Fan section, 9 ... UV irradiation section, 10 ... Filter, 11 ... Clean bench, 13 ... ... Work table, 20 ... Reflecting surface, 21 ... Photoelectron emitting material, 22 ... UV lamp
Claims (12)
することにより光電子放出材より光電子を放出せしめ、
該光電子により空気中の微粒子を荷電せしめた後該荷電
した粒子を捕集することにより空気を清浄にする方法に
おいて反射面を利用して光電子の放出を効率良く行なう
ことを特徴とする空気の清浄方法。1. A photoelectron emitting material is irradiated with ultraviolet rays or radiation to emit photoelectrons from the photoelectron emitting material,
A method for cleaning air by charging fine particles in the air with the photoelectrons and then collecting the charged particles, wherein the photoelectrons are efficiently emitted using a reflecting surface. Method.
請求の範囲第１項記載の方法。2. The method according to claim 1, wherein at least a part of the reflecting surface is a curved surface.
許請求の範囲第１項又は第２項記載の方法。3. The method according to claim 1, wherein the reflecting surface is made of a material having a low work function.
項、第２項又は第３項記載の方法。4. The first claim in which the reflecting surface is made of metal.
The method according to item 2, item 2, or item 3.
いる特許請求の範囲第１項、第２項、第３項又は第４項
記載の方法。5. The method according to claim 1, 2, 3, or 4, wherein the reflecting surface and the photoelectron emitting material are provided separately.
の範囲第５項記載の方法。6. The method according to claim 5, wherein the photoelectron emitting material has a mesh shape.
求の範囲第１項、第２項又は第３項記載の方法。7. The method according to claim 1, 2 or 3 wherein the reflecting surface also serves as a photoelectron emitting material.
r、Ca、Y、Gd、La、Ce、Nd、Th、Pr、Be、Zr、Fe、Ni、
Zn、Cu、Ag、Pt、Cd、Pb、Al、C、Mg、Au、In、Bi、N
b、Si、Ta、Ti、Sn、P及びその化合物から選ばれた材料
の１つより成る特許請求の範囲第１項乃至第７項の何れ
か１つに記載の方法。8. The reflective surface and / or the photoelectron emitting material is Ba, S
r, Ca, Y, Gd, La, Ce, Nd, Th, Pr, Be, Zr, Fe, Ni,
Zn, Cu, Ag, Pt, Cd, Pb, Al, C, Mg, Au, In, Bi, N
The method according to any one of claims 1 to 7, which comprises one of materials selected from b, Si, Ta, Ti, Sn, P and compounds thereof.
r、Ca、Y、Gd、La、Ce、Nd、Th、Pr、Be、Zr、Fe、Ni、
Zn、Cu、Ag、Pt、Cd、Pb、Al、C、Mg、Au、In、Bi、N
b、Si、Ta、Ti、Sn、P及びその化合物から選ばれた材料
の少なくとも二種以上の複合材より成る特許請求の範囲
第１項乃至第７項の何れか１つに記載の方法。9. The reflective surface and / or the photoelectron emitting material is Ba, S
r, Ca, Y, Gd, La, Ce, Nd, Th, Pr, Be, Zr, Fe, Ni,
Zn, Cu, Ag, Pt, Cd, Pb, Al, C, Mg, Au, In, Bi, N
The method according to any one of claims 1 to 7, which comprises a composite material of at least two kinds of materials selected from b, Si, Ta, Ti, Sn, P and compounds thereof.
Mgの合金又はCuとBeの合金又はBaとAlとの合金より構成
されたものである特許請求の範囲第１項乃至第７項の何
れか１つに記載の方法。10. The reflective surface and / or the photoelectron emitting material comprises Ag and
The method according to any one of claims 1 to 7, which is composed of an alloy of Mg, an alloy of Cu and Be, or an alloy of Ba and Al.
青銅又はリン青銅により構成されたものである特許請求
の範囲第１項乃至第７項の何れか１つに記載の方法。11. The reflection surface and / or the photoelectron emission material is brass,
The method according to any one of claims 1 to 7, which is constituted by bronze or phosphor bronze.
路上に、少なくとも光電子放出材上への紫外線又は放射
線照射部、反射面部及び光電子放出材により放出された
光電子により荷電された微粒子を捕集する荷電微粒子捕
集部を設けてなる空気清浄装置。12. Fine particles charged with photoelectrons emitted by at least an ultraviolet or radiation irradiating section on a photoelectron emitting material, a reflecting surface section, and photoelectron emitting materials are trapped in an air flow path from an air inlet to an air outlet. An air purifier provided with a charged fine particle collector for collecting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24427586A JPH0634941B2 (en) | 1986-10-16 | 1986-10-16 | Method and apparatus for cleaning air by irradiation of ultraviolet rays or radiation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24427586A JPH0634941B2 (en) | 1986-10-16 | 1986-10-16 | Method and apparatus for cleaning air by irradiation of ultraviolet rays or radiation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63100955A JPS63100955A (en) | 1988-05-06 |
| JPH0634941B2 true JPH0634941B2 (en) | 1994-05-11 |
Family
ID=17116324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24427586A Expired - Lifetime JPH0634941B2 (en) | 1986-10-16 | 1986-10-16 | Method and apparatus for cleaning air by irradiation of ultraviolet rays or radiation |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0634941B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5060805A (en) * | 1989-06-20 | 1991-10-29 | Ebara Research Co., Ltd. | Photoelectron emitting member |
| US5154733A (en) * | 1990-03-06 | 1992-10-13 | Ebara Research Co., Ltd. | Photoelectron emitting member and method of electrically charging fine particles with photoelectrons |
| JPH0793098B2 (en) * | 1990-11-02 | 1995-10-09 | 株式会社荏原総合研究所 | Method for charging fine particles using photo-emissive material |
| US7156897B2 (en) * | 2001-11-27 | 2007-01-02 | Wen Sheree H | Anti-infection and toxin elimination device |
| US20110100221A1 (en) * | 2009-11-02 | 2011-05-05 | Fu-Chi Wu | Air purifier |
| KR102089094B1 (en) * | 2018-07-31 | 2020-04-23 | 엘지전자 주식회사 | Sterilization and dust collect device, and home appliance including the same |
-
1986
- 1986-10-16 JP JP24427586A patent/JPH0634941B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63100955A (en) | 1988-05-06 |
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