JPS6354211B2 - - Google Patents

Info

Publication number
JPS6354211B2
JPS6354211B2 JP58090529A JP9052983A JPS6354211B2 JP S6354211 B2 JPS6354211 B2 JP S6354211B2 JP 58090529 A JP58090529 A JP 58090529A JP 9052983 A JP9052983 A JP 9052983A JP S6354211 B2 JPS6354211 B2 JP S6354211B2
Authority
JP
Japan
Prior art keywords
cap
arm
exhaust
exhaust duct
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58090529A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59215722A (ja
Inventor
Shigeaki Asakura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP58090529A priority Critical patent/JPS59215722A/ja
Publication of JPS59215722A publication Critical patent/JPS59215722A/ja
Publication of JPS6354211B2 publication Critical patent/JPS6354211B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/0436—
JP58090529A 1983-05-23 1983-05-23 半導体製造装置 Granted JPS59215722A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58090529A JPS59215722A (ja) 1983-05-23 1983-05-23 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58090529A JPS59215722A (ja) 1983-05-23 1983-05-23 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS59215722A JPS59215722A (ja) 1984-12-05
JPS6354211B2 true JPS6354211B2 (OSRAM) 1988-10-27

Family

ID=14000940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58090529A Granted JPS59215722A (ja) 1983-05-23 1983-05-23 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS59215722A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH071790Y2 (ja) * 1987-06-17 1995-01-18 国際電気株式会社 拡散装置用自動キャップ
JPH01170017A (ja) * 1987-12-25 1989-07-05 Toshiba Corp 半導体処理装置

Also Published As

Publication number Publication date
JPS59215722A (ja) 1984-12-05

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