JPS6352455B2 - - Google Patents
Info
- Publication number
- JPS6352455B2 JPS6352455B2 JP62013341A JP1334187A JPS6352455B2 JP S6352455 B2 JPS6352455 B2 JP S6352455B2 JP 62013341 A JP62013341 A JP 62013341A JP 1334187 A JP1334187 A JP 1334187A JP S6352455 B2 JPS6352455 B2 JP S6352455B2
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- light
- mask
- observation
- illumination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 85
- 238000005286 illumination Methods 0.000 claims description 36
- 238000003384 imaging method Methods 0.000 claims description 35
- 210000001747 pupil Anatomy 0.000 claims description 19
- 238000001514 detection method Methods 0.000 claims description 11
- 230000008859 change Effects 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims 8
- 238000006243 chemical reaction Methods 0.000 claims 1
- 239000000284 extract Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 10
- 230000004907 flux Effects 0.000 description 5
- 230000000737 periodic effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62013341A JPS62216231A (ja) | 1987-01-24 | 1987-01-24 | アライメント装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62013341A JPS62216231A (ja) | 1987-01-24 | 1987-01-24 | アライメント装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8746279A Division JPS5612729A (en) | 1979-07-12 | 1979-07-12 | ?alignmening device for ic projection exposure equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62216231A JPS62216231A (ja) | 1987-09-22 |
| JPS6352455B2 true JPS6352455B2 (US08197722-20120612-C00042.png) | 1988-10-19 |
Family
ID=11830418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62013341A Granted JPS62216231A (ja) | 1987-01-24 | 1987-01-24 | アライメント装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62216231A (US08197722-20120612-C00042.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0371933U (US08197722-20120612-C00042.png) * | 1989-10-31 | 1991-07-19 | ||
| JPH0377723U (US08197722-20120612-C00042.png) * | 1989-11-30 | 1991-08-06 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0568478A1 (en) * | 1992-04-29 | 1993-11-03 | International Business Machines Corporation | Darkfield alignment system using a confocal spatial filter |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5212577A (en) * | 1975-07-21 | 1977-01-31 | Nippon Kogaku Kk <Nikon> | Automatic location device |
| JPS53137673A (en) * | 1977-05-03 | 1978-12-01 | Massachusetts Inst Technology | Device for and method of matching plate position |
| JPS541553A (en) * | 1977-06-07 | 1979-01-08 | Toshiba Corp | Group management control method of elevator |
| JPS5453562A (en) * | 1977-10-05 | 1979-04-26 | Canon Inc | Photoelectric detector |
-
1987
- 1987-01-24 JP JP62013341A patent/JPS62216231A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5212577A (en) * | 1975-07-21 | 1977-01-31 | Nippon Kogaku Kk <Nikon> | Automatic location device |
| JPS53137673A (en) * | 1977-05-03 | 1978-12-01 | Massachusetts Inst Technology | Device for and method of matching plate position |
| JPS541553A (en) * | 1977-06-07 | 1979-01-08 | Toshiba Corp | Group management control method of elevator |
| JPS5453562A (en) * | 1977-10-05 | 1979-04-26 | Canon Inc | Photoelectric detector |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0371933U (US08197722-20120612-C00042.png) * | 1989-10-31 | 1991-07-19 | ||
| JPH0377723U (US08197722-20120612-C00042.png) * | 1989-11-30 | 1991-08-06 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62216231A (ja) | 1987-09-22 |
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