JPS635166Y2 - - Google Patents

Info

Publication number
JPS635166Y2
JPS635166Y2 JP1981048760U JP4876081U JPS635166Y2 JP S635166 Y2 JPS635166 Y2 JP S635166Y2 JP 1981048760 U JP1981048760 U JP 1981048760U JP 4876081 U JP4876081 U JP 4876081U JP S635166 Y2 JPS635166 Y2 JP S635166Y2
Authority
JP
Japan
Prior art keywords
target plate
rotating target
charged particle
rotating
particle beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981048760U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57161856U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981048760U priority Critical patent/JPS635166Y2/ja
Publication of JPS57161856U publication Critical patent/JPS57161856U/ja
Application granted granted Critical
Publication of JPS635166Y2 publication Critical patent/JPS635166Y2/ja
Expired legal-status Critical Current

Links

JP1981048760U 1981-04-04 1981-04-04 Expired JPS635166Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981048760U JPS635166Y2 (enrdf_load_stackoverflow) 1981-04-04 1981-04-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981048760U JPS635166Y2 (enrdf_load_stackoverflow) 1981-04-04 1981-04-04

Publications (2)

Publication Number Publication Date
JPS57161856U JPS57161856U (enrdf_load_stackoverflow) 1982-10-12
JPS635166Y2 true JPS635166Y2 (enrdf_load_stackoverflow) 1988-02-12

Family

ID=29845488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981048760U Expired JPS635166Y2 (enrdf_load_stackoverflow) 1981-04-04 1981-04-04

Country Status (1)

Country Link
JP (1) JPS635166Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4234797A (en) * 1979-05-23 1980-11-18 Nova Associates, Inc. Treating workpieces with beams

Also Published As

Publication number Publication date
JPS57161856U (enrdf_load_stackoverflow) 1982-10-12

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