JPS6351362B2 - - Google Patents

Info

Publication number

JPS6351362B2

JPS6351362B2 JP56095440A JP9544081A JPS6351362B2 JP S6351362 B2 JPS6351362 B2 JP S6351362B2 JP 56095440 A JP56095440 A JP 56095440A JP 9544081 A JP9544081 A JP 9544081A JP S6351362 B2 JPS6351362 B2 JP S6351362B2

Authority

JP

Japan

Prior art keywords

moisture

electrodes

sensitive

humidity

powder

Prior art date

1981-06-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 239000000843 powder Substances 0.000 claims description 26
• 239000011521 glass Substances 0.000 claims description 11
• 239000000758 substrate Substances 0.000 claims description 11
• 229910044991 metal oxide Inorganic materials 0.000 claims description 10
• 150000004706 metal oxides Chemical class 0.000 claims description 10
• 239000000203 mixture Substances 0.000 claims description 9
• WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 7
• 229910052744 lithium Inorganic materials 0.000 claims description 7
• 229910010413 TiO 2 Inorganic materials 0.000 claims description 3
• 239000000919 ceramic Substances 0.000 claims description 3
• 229910006404 SnO 2 Inorganic materials 0.000 claims description 2
• 239000010410 layer Substances 0.000 description 15
• 230000035945 sensitivity Effects 0.000 description 5
• KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 4
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
• 238000001816 cooling Methods 0.000 description 3
• 239000002245 particle Substances 0.000 description 3
• 239000000126 substance Substances 0.000 description 3
• 239000001856 Ethyl cellulose Substances 0.000 description 2
• ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
• 229910004298 SiO 2 Inorganic materials 0.000 description 2
• 230000032683 aging Effects 0.000 description 2
• 229920001249 ethyl cellulose Polymers 0.000 description 2
• 235000019325 ethyl cellulose Nutrition 0.000 description 2
• 238000010304 firing Methods 0.000 description 2
• 238000004519 manufacturing process Methods 0.000 description 2
• 238000000034 method Methods 0.000 description 2
• 238000002156 mixing Methods 0.000 description 2
• VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
• FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 1
• 239000004925 Acrylic resin Substances 0.000 description 1
• 229920000178 Acrylic resin Polymers 0.000 description 1
• 229910005793 GeO 2 Inorganic materials 0.000 description 1
• 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
• 229910013457 LiZrO Inorganic materials 0.000 description 1
• BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
• HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
• 238000005299 abrasion Methods 0.000 description 1
• 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
• 150000001342 alkaline earth metals Chemical class 0.000 description 1
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
• 230000015572 biosynthetic process Effects 0.000 description 1
• 238000009835 boiling Methods 0.000 description 1
• 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
• 239000001913 cellulose Substances 0.000 description 1
• 229920002678 cellulose Polymers 0.000 description 1
• 238000004140 cleaning Methods 0.000 description 1
• 239000011247 coating layer Substances 0.000 description 1
• 239000002131 composite material Substances 0.000 description 1
• 238000007796 conventional method Methods 0.000 description 1
• 238000009826 distribution Methods 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 238000000227 grinding Methods 0.000 description 1
• 238000010438 heat treatment Methods 0.000 description 1
• 238000007654 immersion Methods 0.000 description 1
• 238000009434 installation Methods 0.000 description 1
• GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
• 238000005259 measurement Methods 0.000 description 1
• 238000002844 melting Methods 0.000 description 1
• 230000008018 melting Effects 0.000 description 1
• 229910000000 metal hydroxide Inorganic materials 0.000 description 1
• 150000004692 metal hydroxides Chemical class 0.000 description 1
• 230000000737 periodic effect Effects 0.000 description 1
• 239000011148 porous material Substances 0.000 description 1
• 239000002994 raw material Substances 0.000 description 1
• 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
• WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
• 238000007650 screen-printing Methods 0.000 description 1
• 229910052725 zinc Inorganic materials 0.000 description 1
• 239000011701 zinc Substances 0.000 description 1
• ZFZQOKHLXAVJIF-UHFFFAOYSA-N zinc;boric acid;dihydroxy(dioxido)silane Chemical compound [Zn+2].OB(O)O.O[Si](O)([O-])[O-] ZFZQOKHLXAVJIF-UHFFFAOYSA-N 0.000 description 1