JPS6349882B2 - - Google Patents
Info
- Publication number
- JPS6349882B2 JPS6349882B2 JP55166991A JP16699180A JPS6349882B2 JP S6349882 B2 JPS6349882 B2 JP S6349882B2 JP 55166991 A JP55166991 A JP 55166991A JP 16699180 A JP16699180 A JP 16699180A JP S6349882 B2 JPS6349882 B2 JP S6349882B2
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- sensitive
- humidity
- soluble component
- resistor layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010410 layer Substances 0.000 claims description 22
- 229910044991 metal oxide Inorganic materials 0.000 claims description 13
- 150000004706 metal oxides Chemical class 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 12
- 239000000843 powder Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000007598 dipping method Methods 0.000 claims description 7
- 238000010304 firing Methods 0.000 claims description 6
- 238000007654 immersion Methods 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 238000005245 sintering Methods 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000011247 coating layer Substances 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 description 11
- 230000035945 sensitivity Effects 0.000 description 10
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 7
- 229910052744 lithium Inorganic materials 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 239000011148 porous material Substances 0.000 description 5
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 3
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 3
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000012736 aqueous medium Substances 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910005793 GeO 2 Inorganic materials 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 229910003327 LiNbO3 Inorganic materials 0.000 description 1
- 229910012463 LiTaO3 Inorganic materials 0.000 description 1
- 229910012657 LiTiO3 Inorganic materials 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910000000 metal hydroxide Inorganic materials 0.000 description 1
- 150000004692 metal hydroxides Chemical class 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000003746 solid phase reaction Methods 0.000 description 1
- 238000010671 solid-state reaction Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- ZFZQOKHLXAVJIF-UHFFFAOYSA-N zinc;boric acid;dihydroxy(dioxido)silane Chemical compound [Zn+2].OB(O)O.O[Si](O)([O-])[O-] ZFZQOKHLXAVJIF-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55166991A JPS5790902A (en) | 1980-11-26 | 1980-11-26 | Method of producing moisture sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55166991A JPS5790902A (en) | 1980-11-26 | 1980-11-26 | Method of producing moisture sensitive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5790902A JPS5790902A (en) | 1982-06-05 |
| JPS6349882B2 true JPS6349882B2 (enrdf_load_stackoverflow) | 1988-10-06 |
Family
ID=15841361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55166991A Granted JPS5790902A (en) | 1980-11-26 | 1980-11-26 | Method of producing moisture sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5790902A (enrdf_load_stackoverflow) |
-
1980
- 1980-11-26 JP JP55166991A patent/JPS5790902A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5790902A (en) | 1982-06-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4666628A (en) | Moisture sensitive material and process for its production | |
| JPS6349882B2 (enrdf_load_stackoverflow) | ||
| JPH0444691B2 (enrdf_load_stackoverflow) | ||
| JPS635881B2 (enrdf_load_stackoverflow) | ||
| JPS6351362B2 (enrdf_load_stackoverflow) | ||
| JPS6351361B2 (enrdf_load_stackoverflow) | ||
| JPH03190201A (ja) | 抵抗材料及びこれらから製造された温度測定用センサー中の温度依存性抵抗層 | |
| JPS6131352A (ja) | 感湿素子の後処理方法 | |
| JPS58161301A (ja) | 感湿素子 | |
| JPS6139614B2 (enrdf_load_stackoverflow) | ||
| JPS6139502A (ja) | 感湿素子 | |
| JPS61270649A (ja) | 感湿素子 | |
| JPS594102A (ja) | 感湿素子 | |
| JPS6318841B2 (enrdf_load_stackoverflow) | ||
| JPS61279082A (ja) | 遠赤外線ヒ−タ−並にその製造法 | |
| JPS59186303A (ja) | 感湿素子 | |
| JPS6184001A (ja) | 感湿素子およびその製造方法 | |
| JPS6250432B2 (enrdf_load_stackoverflow) | ||
| JPH0376562B2 (enrdf_load_stackoverflow) | ||
| JPH0464161B2 (enrdf_load_stackoverflow) | ||
| JPH02252202A (ja) | 湿度センサ素子 | |
| JPS6350841B2 (enrdf_load_stackoverflow) | ||
| JPS58200505A (ja) | 感湿素子 | |
| JPH0464162B2 (enrdf_load_stackoverflow) | ||
| JPS6355845B2 (enrdf_load_stackoverflow) |