JPS6350859B2 - - Google Patents

Info

Publication number
JPS6350859B2
JPS6350859B2 JP14954783A JP14954783A JPS6350859B2 JP S6350859 B2 JPS6350859 B2 JP S6350859B2 JP 14954783 A JP14954783 A JP 14954783A JP 14954783 A JP14954783 A JP 14954783A JP S6350859 B2 JPS6350859 B2 JP S6350859B2
Authority
JP
Japan
Prior art keywords
wiring
block
wiring layer
layer
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14954783A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5956742A (ja
Inventor
Mitsuhiro Koike
Yoshihisa Shioashi
Kimio Terada
Yasuo Nakada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP14954783A priority Critical patent/JPS5956742A/ja
Publication of JPS5956742A publication Critical patent/JPS5956742A/ja
Publication of JPS6350859B2 publication Critical patent/JPS6350859B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
JP14954783A 1983-08-18 1983-08-18 半導体装置の Granted JPS5956742A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14954783A JPS5956742A (ja) 1983-08-18 1983-08-18 半導体装置の

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14954783A JPS5956742A (ja) 1983-08-18 1983-08-18 半導体装置の

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP9541876A Division JPS5321584A (en) 1976-08-12 1976-08-12 Wiring system of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5956742A JPS5956742A (ja) 1984-04-02
JPS6350859B2 true JPS6350859B2 (de) 1988-10-12

Family

ID=15477534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14954783A Granted JPS5956742A (ja) 1983-08-18 1983-08-18 半導体装置の

Country Status (1)

Country Link
JP (1) JPS5956742A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07120709B2 (ja) * 1985-03-22 1995-12-20 日本電気株式会社 半導体集積回路の配線方式

Also Published As

Publication number Publication date
JPS5956742A (ja) 1984-04-02

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