JPS63501585A - 迅速吸着クライオポンプ - Google Patents

迅速吸着クライオポンプ

Info

Publication number
JPS63501585A
JPS63501585A JP61505914A JP50591486A JPS63501585A JP S63501585 A JPS63501585 A JP S63501585A JP 61505914 A JP61505914 A JP 61505914A JP 50591486 A JP50591486 A JP 50591486A JP S63501585 A JPS63501585 A JP S63501585A
Authority
JP
Japan
Prior art keywords
cryopanel
stage
cryopump
disk
disc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61505914A
Other languages
English (en)
Japanese (ja)
Inventor
レサード，フィリィップ，エイ
アンディーン，ブルース　アール
Original Assignee
ヘリツクス　テクノロジ−　コ−ポレ−シヨン
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ヘリツクス　テクノロジ−　コ−ポレ−シヨン filed Critical ヘリツクス　テクノロジ−　コ−ポレ−シヨン
Publication of JPS63501585A publication Critical patent/JPS63501585A/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP61505914A 1985-10-31 1986-10-23 迅速吸着クライオポンプ Pending JPS63501585A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US79370785A 1985-10-31 1985-10-31
US793707 1985-10-31

Publications (1)

Publication Number Publication Date
JPS63501585A true JPS63501585A (ja) 1988-06-16

Family

ID=25160592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61505914A Pending JPS63501585A (ja) 1985-10-31 1986-10-23 迅速吸着クライオポンプ

Country Status (4)

Country Link
JP (1) JPS63501585A (enExample)
DE (1) DE3690558T1 (enExample)
GB (1) GB2191247B (enExample)
WO (1) WO1987002743A1 (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012180846A (ja) * 2004-09-24 2012-09-20 Brooks Automation Inc 第３種の気体の排気用高コンダクタンス・クライオポンプ
JP2012237262A (ja) * 2011-05-12 2012-12-06 Sumitomo Heavy Ind Ltd クライオポンプ及びその製造方法
JP2013234670A (ja) * 2013-07-22 2013-11-21 Sumitomo Heavy Ind Ltd クライオポンプ及びその製造方法
JP2014509365A (ja) * 2011-02-09 2014-04-17 ブルックス オートメーション インコーポレイテッド クライオポンプ
CN103742389A (zh) * 2013-10-18 2014-04-23 昆山珍实复合材料有限公司 一种真空低温泵中的组合冷板
JP2022016630A (ja) * 2017-02-08 2022-01-21 住友重機械工業株式会社 クライオポンプ

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5301511A (en) * 1992-06-12 1994-04-12 Helix Technology Corporation Cryopump and cryopanel having frost concentrating device
DE4336035A1 (de) * 1993-10-22 1995-04-27 Leybold Ag Verfahren zum Betrieb einer Kryopumpe sowie Vakuumpumpensystem mit Kryopumpe und Vorpumpe
JP6013886B2 (ja) 2012-11-13 2016-10-25 住友重機械工業株式会社 クライオポンプ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2455712A1 (de) * 1974-11-25 1976-08-12 Eckhard Kellner Cryo-sorptionspumpe
CH652804A5 (en) * 1981-03-10 1985-11-29 Balzers Hochvakuum Method for regenerating the low-temperature condensation surfaces of a cryopump and cryopump appliance for implementing the method
IL71403A (en) * 1983-04-04 1991-01-31 Helix Tech Corp Cryopump with rapid cooldown and increased pressure stability
US4494381A (en) * 1983-05-13 1985-01-22 Helix Technology Corporation Cryopump with improved adsorption capacity
US4555907A (en) * 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012180846A (ja) * 2004-09-24 2012-09-20 Brooks Automation Inc 第３種の気体の排気用高コンダクタンス・クライオポンプ
JP2014509365A (ja) * 2011-02-09 2014-04-17 ブルックス オートメーション インコーポレイテッド クライオポンプ
JP2017015098A (ja) * 2011-02-09 2017-01-19 ブルックス オートメーション インコーポレイテッド クライオポンプ
US9926919B2 (en) 2011-02-09 2018-03-27 Brooks Automation, Inc. Cryopump
JP2012237262A (ja) * 2011-05-12 2012-12-06 Sumitomo Heavy Ind Ltd クライオポンプ及びその製造方法
JP2013234670A (ja) * 2013-07-22 2013-11-21 Sumitomo Heavy Ind Ltd クライオポンプ及びその製造方法
CN103742389A (zh) * 2013-10-18 2014-04-23 昆山珍实复合材料有限公司 一种真空低温泵中的组合冷板
CN103742389B (zh) * 2013-10-18 2015-12-23 石狮市台瑞精密机械有限公司 一种真空低温泵中的组合冷板
JP2022016630A (ja) * 2017-02-08 2022-01-21 住友重機械工業株式会社 クライオポンプ

Also Published As

Publication number Publication date
GB2191247B (en) 1989-10-11
GB8713719D0 (en) 1987-07-15
DE3690558T1 (enExample) 1987-12-10
WO1987002743A1 (en) 1987-05-07
GB2191247A (en) 1987-12-09

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