GB2191247B - Cryopump with quicker adsorption - Google Patents

Cryopump with quicker adsorption

Info

Publication number
GB2191247B
GB2191247B GB8713719A GB8713719A GB2191247B GB 2191247 B GB2191247 B GB 2191247B GB 8713719 A GB8713719 A GB 8713719A GB 8713719 A GB8713719 A GB 8713719A GB 2191247 B GB2191247 B GB 2191247B
Authority
GB
United Kingdom
Prior art keywords
cryopump
quicker
adsorption
quicker adsorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8713719A
Other versions
GB8713719D0 (en
GB2191247A (en
Inventor
Philip A Lessard
Bruce R Andeen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Publication of GB8713719D0 publication Critical patent/GB8713719D0/en
Publication of GB2191247A publication Critical patent/GB2191247A/en
Application granted granted Critical
Publication of GB2191247B publication Critical patent/GB2191247B/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
GB8713719A 1985-10-31 1986-10-23 Cryopump with quicker adsorption Expired GB2191247B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US79370785A 1985-10-31 1985-10-31
PCT/US1986/002242 WO1987002743A1 (en) 1985-10-31 1986-10-23 Cryopump with quicker adsorption

Publications (3)

Publication Number Publication Date
GB8713719D0 GB8713719D0 (en) 1987-07-15
GB2191247A GB2191247A (en) 1987-12-09
GB2191247B true GB2191247B (en) 1989-10-11

Family

ID=25160592

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8713719A Expired GB2191247B (en) 1985-10-31 1986-10-23 Cryopump with quicker adsorption

Country Status (4)

Country Link
JP (1) JPS63501585A (en)
DE (1) DE3690558T1 (en)
GB (1) GB2191247B (en)
WO (1) WO1987002743A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5301511A (en) * 1992-06-12 1994-04-12 Helix Technology Corporation Cryopump and cryopanel having frost concentrating device
DE4336035A1 (en) * 1993-10-22 1995-04-27 Leybold Ag Process for operating a cryopump and vacuum pump system with cryopump and backing pump
US7313922B2 (en) * 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
KR102033142B1 (en) * 2011-02-09 2019-10-16 브룩스 오토메이션, 인크. Cryopump
JP5460644B2 (en) * 2011-05-12 2014-04-02 住友重機械工業株式会社 Cryopump
JP6013886B2 (en) * 2012-11-13 2016-10-25 住友重機械工業株式会社 Cryopump
JP5669895B2 (en) * 2013-07-22 2015-02-18 住友重機械工業株式会社 Cryopump and manufacturing method thereof
CN103742389B (en) * 2013-10-18 2015-12-23 石狮市台瑞精密机械有限公司 Combination cold plate in a kind of vacuum low-temperature pump
JP7300494B2 (en) * 2017-02-08 2023-06-29 住友重機械工業株式会社 cryopump

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2455712A1 (en) * 1974-11-25 1976-08-12 Eckhard Kellner Cryogenic adsorption vacuum pump - has metal plates with adsorbent lacquer within insulated casing shielded from radiation
EP0126909A2 (en) * 1983-04-04 1984-12-05 Helix Technology Corporation Cryopump with rapid cooldown and increased pressure stability
US4494381A (en) * 1983-05-13 1985-01-22 Helix Technology Corporation Cryopump with improved adsorption capacity
CH652804A5 (en) * 1981-03-10 1985-11-29 Balzers Hochvakuum Method for regenerating the low-temperature condensation surfaces of a cryopump and cryopump appliance for implementing the method
WO1985005410A1 (en) * 1984-05-18 1985-12-05 Helix Technology Corporation Cryopump with improved second stage array

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2455712A1 (en) * 1974-11-25 1976-08-12 Eckhard Kellner Cryogenic adsorption vacuum pump - has metal plates with adsorbent lacquer within insulated casing shielded from radiation
CH652804A5 (en) * 1981-03-10 1985-11-29 Balzers Hochvakuum Method for regenerating the low-temperature condensation surfaces of a cryopump and cryopump appliance for implementing the method
EP0126909A2 (en) * 1983-04-04 1984-12-05 Helix Technology Corporation Cryopump with rapid cooldown and increased pressure stability
US4494381A (en) * 1983-05-13 1985-01-22 Helix Technology Corporation Cryopump with improved adsorption capacity
WO1985005410A1 (en) * 1984-05-18 1985-12-05 Helix Technology Corporation Cryopump with improved second stage array

Also Published As

Publication number Publication date
GB8713719D0 (en) 1987-07-15
WO1987002743A1 (en) 1987-05-07
GB2191247A (en) 1987-12-09
DE3690558T1 (en) 1987-12-10
JPS63501585A (en) 1988-06-16

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20041023