DE3690558T1 - - Google Patents

Info

Publication number
DE3690558T1
DE3690558T1 DE19863690558 DE3690558T DE3690558T1 DE 3690558 T1 DE3690558 T1 DE 3690558T1 DE 19863690558 DE19863690558 DE 19863690558 DE 3690558 T DE3690558 T DE 3690558T DE 3690558 T1 DE3690558 T1 DE 3690558T1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19863690558
Other languages
German (de)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of DE3690558T1 publication Critical patent/DE3690558T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE19863690558 1985-10-31 1986-10-23 Withdrawn DE3690558T1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US79370785A 1985-10-31 1985-10-31

Publications (1)

Publication Number Publication Date
DE3690558T1 true DE3690558T1 (en) 1987-12-10

Family

ID=25160592

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19863690558 Withdrawn DE3690558T1 (en) 1985-10-31 1986-10-23

Country Status (4)

Country Link
JP (1) JPS63501585A (en)
DE (1) DE3690558T1 (en)
GB (1) GB2191247B (en)
WO (1) WO1987002743A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4336035A1 (en) * 1993-10-22 1995-04-27 Leybold Ag Process for operating a cryopump and vacuum pump system with cryopump and backing pump
DE4392772B4 (en) * 1992-06-12 2006-05-04 Helix Technology Corp., Mansfield Cryopump and cryopanel, which has a maturing-concentrating facility

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7313922B2 (en) * 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
WO2012109304A2 (en) 2011-02-09 2012-08-16 Brooks Automation, Inc. Cryopump
JP5460644B2 (en) * 2011-05-12 2014-04-02 住友重機械工業株式会社 Cryopump
JP6013886B2 (en) * 2012-11-13 2016-10-25 住友重機械工業株式会社 Cryopump
JP5669895B2 (en) * 2013-07-22 2015-02-18 住友重機械工業株式会社 Cryopump and manufacturing method thereof
CN103742389B (en) * 2013-10-18 2015-12-23 石狮市台瑞精密机械有限公司 Combination cold plate in a kind of vacuum low-temperature pump
JP7300494B2 (en) * 2017-02-08 2023-06-29 住友重機械工業株式会社 cryopump

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2455712A1 (en) * 1974-11-25 1976-08-12 Eckhard Kellner Cryogenic adsorption vacuum pump - has metal plates with adsorbent lacquer within insulated casing shielded from radiation
CH652804A5 (en) * 1981-03-10 1985-11-29 Balzers Hochvakuum Method for regenerating the low-temperature condensation surfaces of a cryopump and cryopump appliance for implementing the method
IL71403A (en) * 1983-04-04 1991-01-31 Helix Tech Corp Cryopump with rapid cooldown and increased pressure stability
US4494381A (en) * 1983-05-13 1985-01-22 Helix Technology Corporation Cryopump with improved adsorption capacity
US4555907A (en) * 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4392772B4 (en) * 1992-06-12 2006-05-04 Helix Technology Corp., Mansfield Cryopump and cryopanel, which has a maturing-concentrating facility
DE4336035A1 (en) * 1993-10-22 1995-04-27 Leybold Ag Process for operating a cryopump and vacuum pump system with cryopump and backing pump

Also Published As

Publication number Publication date
GB2191247A (en) 1987-12-09
GB8713719D0 (en) 1987-07-15
GB2191247B (en) 1989-10-11
JPS63501585A (en) 1988-06-16
WO1987002743A1 (en) 1987-05-07

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Legal Events

Date Code Title Description
8141 Disposal/no request for examination