JPS63501585A - 迅速吸着クライオポンプ - Google Patents
迅速吸着クライオポンプInfo
- Publication number
- JPS63501585A JPS63501585A JP61505914A JP50591486A JPS63501585A JP S63501585 A JPS63501585 A JP S63501585A JP 61505914 A JP61505914 A JP 61505914A JP 50591486 A JP50591486 A JP 50591486A JP S63501585 A JPS63501585 A JP S63501585A
- Authority
- JP
- Japan
- Prior art keywords
- cryopanel
- stage
- cryopump
- disk
- disc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 title description 4
- 239000003463 adsorbent Substances 0.000 claims description 27
- 230000005855 radiation Effects 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 12
- 238000013459 approach Methods 0.000 claims description 7
- 239000007789 gas Substances 0.000 description 42
- 238000009833 condensation Methods 0.000 description 5
- 230000005494 condensation Effects 0.000 description 5
- 230000008929 regeneration Effects 0.000 description 5
- 238000011069 regeneration method Methods 0.000 description 5
- 238000009835 boiling Methods 0.000 description 4
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 229910021536 Zeolite Inorganic materials 0.000 description 3
- 239000003610 charcoal Substances 0.000 description 3
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052754 neon Inorganic materials 0.000 description 3
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 3
- 239000010457 zeolite Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 2
- 206010010071 Coma Diseases 0.000 description 1
- 241000287462 Phalacrocorax carbo Species 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US79370785A | 1985-10-31 | 1985-10-31 | |
| US793707 | 1985-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63501585A true JPS63501585A (ja) | 1988-06-16 |
Family
ID=25160592
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61505914A Pending JPS63501585A (ja) | 1985-10-31 | 1986-10-23 | 迅速吸着クライオポンプ |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS63501585A (enrdf_load_stackoverflow) |
| DE (1) | DE3690558T1 (enrdf_load_stackoverflow) |
| GB (1) | GB2191247B (enrdf_load_stackoverflow) |
| WO (1) | WO1987002743A1 (enrdf_load_stackoverflow) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012180846A (ja) * | 2004-09-24 | 2012-09-20 | Brooks Automation Inc | 第３種の気体の排気用高コンダクタンス・クライオポンプ |
| JP2012237262A (ja) * | 2011-05-12 | 2012-12-06 | Sumitomo Heavy Ind Ltd | クライオポンプ及びその製造方法 |
| JP2013234670A (ja) * | 2013-07-22 | 2013-11-21 | Sumitomo Heavy Ind Ltd | クライオポンプ及びその製造方法 |
| JP2014509365A (ja) * | 2011-02-09 | 2014-04-17 | ブルックス オートメーション インコーポレイテッド | クライオポンプ |
| CN103742389A (zh) * | 2013-10-18 | 2014-04-23 | 昆山珍实复合材料有限公司 | 一种真空低温泵中的组合冷板 |
| JP2022016630A (ja) * | 2017-02-08 | 2022-01-21 | 住友重機械工業株式会社 | クライオポンプ |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5301511A (en) * | 1992-06-12 | 1994-04-12 | Helix Technology Corporation | Cryopump and cryopanel having frost concentrating device |
| DE4336035A1 (de) * | 1993-10-22 | 1995-04-27 | Leybold Ag | Verfahren zum Betrieb einer Kryopumpe sowie Vakuumpumpensystem mit Kryopumpe und Vorpumpe |
| JP6013886B2 (ja) * | 2012-11-13 | 2016-10-25 | 住友重機械工業株式会社 | クライオポンプ |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2455712A1 (de) * | 1974-11-25 | 1976-08-12 | Eckhard Kellner | Cryo-sorptionspumpe |
| CH652804A5 (en) * | 1981-03-10 | 1985-11-29 | Balzers Hochvakuum | Method for regenerating the low-temperature condensation surfaces of a cryopump and cryopump appliance for implementing the method |
| IL71403A (en) * | 1983-04-04 | 1991-01-31 | Helix Tech Corp | Cryopump with rapid cooldown and increased pressure stability |
| US4494381A (en) * | 1983-05-13 | 1985-01-22 | Helix Technology Corporation | Cryopump with improved adsorption capacity |
| US4555907A (en) * | 1984-05-18 | 1985-12-03 | Helix Technology Corporation | Cryopump with improved second stage array |
-
1986
- 1986-10-23 JP JP61505914A patent/JPS63501585A/ja active Pending
- 1986-10-23 WO PCT/US1986/002242 patent/WO1987002743A1/en active Application Filing
- 1986-10-23 DE DE19863690558 patent/DE3690558T1/de not_active Withdrawn
- 1986-10-23 GB GB8713719A patent/GB2191247B/en not_active Expired
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012180846A (ja) * | 2004-09-24 | 2012-09-20 | Brooks Automation Inc | 第３種の気体の排気用高コンダクタンス・クライオポンプ |
| JP2014509365A (ja) * | 2011-02-09 | 2014-04-17 | ブルックス オートメーション インコーポレイテッド | クライオポンプ |
| JP2017015098A (ja) * | 2011-02-09 | 2017-01-19 | ブルックス オートメーション インコーポレイテッド | クライオポンプ |
| US9926919B2 (en) | 2011-02-09 | 2018-03-27 | Brooks Automation, Inc. | Cryopump |
| JP2012237262A (ja) * | 2011-05-12 | 2012-12-06 | Sumitomo Heavy Ind Ltd | クライオポンプ及びその製造方法 |
| JP2013234670A (ja) * | 2013-07-22 | 2013-11-21 | Sumitomo Heavy Ind Ltd | クライオポンプ及びその製造方法 |
| CN103742389A (zh) * | 2013-10-18 | 2014-04-23 | 昆山珍实复合材料有限公司 | 一种真空低温泵中的组合冷板 |
| CN103742389B (zh) * | 2013-10-18 | 2015-12-23 | 石狮市台瑞精密机械有限公司 | 一种真空低温泵中的组合冷板 |
| JP2022016630A (ja) * | 2017-02-08 | 2022-01-21 | 住友重機械工業株式会社 | クライオポンプ |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2191247A (en) | 1987-12-09 |
| WO1987002743A1 (en) | 1987-05-07 |
| GB8713719D0 (en) | 1987-07-15 |
| GB2191247B (en) | 1989-10-11 |
| DE3690558T1 (enrdf_load_stackoverflow) | 1987-12-10 |
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