JPS634960Y2 - - Google Patents
Info
- Publication number
- JPS634960Y2 JPS634960Y2 JP20330785U JP20330785U JPS634960Y2 JP S634960 Y2 JPS634960 Y2 JP S634960Y2 JP 20330785 U JP20330785 U JP 20330785U JP 20330785 U JP20330785 U JP 20330785U JP S634960 Y2 JPS634960 Y2 JP S634960Y2
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- support shaft
- furnace body
- heating
- locking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 31
- 239000000837 restrainer Substances 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 10
- 238000003780 insertion Methods 0.000 description 7
- 230000037431 insertion Effects 0.000 description 7
- 238000001816 cooling Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 230000000452 restraining effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20330785U JPS634960Y2 (enrdf_load_stackoverflow) | 1985-12-28 | 1985-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20330785U JPS634960Y2 (enrdf_load_stackoverflow) | 1985-12-28 | 1985-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62112100U JPS62112100U (enrdf_load_stackoverflow) | 1987-07-16 |
| JPS634960Y2 true JPS634960Y2 (enrdf_load_stackoverflow) | 1988-02-09 |
Family
ID=31168511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20330785U Expired JPS634960Y2 (enrdf_load_stackoverflow) | 1985-12-28 | 1985-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS634960Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-12-28 JP JP20330785U patent/JPS634960Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62112100U (enrdf_load_stackoverflow) | 1987-07-16 |
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