JPS634957Y2 - - Google Patents
Info
- Publication number
- JPS634957Y2 JPS634957Y2 JP17195785U JP17195785U JPS634957Y2 JP S634957 Y2 JPS634957 Y2 JP S634957Y2 JP 17195785 U JP17195785 U JP 17195785U JP 17195785 U JP17195785 U JP 17195785U JP S634957 Y2 JPS634957 Y2 JP S634957Y2
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- tight box
- outside
- gas
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 48
- 238000010438 heat treatment Methods 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 19
- 239000011261 inert gas Substances 0.000 claims description 14
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 13
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 13
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 13
- 239000011810 insulating material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Powder Metallurgy (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17195785U JPS634957Y2 (US20030199744A1-20031023-C00003.png) | 1985-11-07 | 1985-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17195785U JPS634957Y2 (US20030199744A1-20031023-C00003.png) | 1985-11-07 | 1985-11-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6280199U JPS6280199U (US20030199744A1-20031023-C00003.png) | 1987-05-22 |
| JPS634957Y2 true JPS634957Y2 (US20030199744A1-20031023-C00003.png) | 1988-02-09 |
Family
ID=31108062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17195785U Expired JPS634957Y2 (US20030199744A1-20031023-C00003.png) | 1985-11-07 | 1985-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS634957Y2 (US20030199744A1-20031023-C00003.png) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0634338Y2 (ja) * | 1987-09-29 | 1994-09-07 | 株式会社島津製作所 | 焼結炉 |
| JP2005325371A (ja) * | 2004-05-12 | 2005-11-24 | Ishikawajima Harima Heavy Ind Co Ltd | 真空浸炭炉 |
| CN111566428B (zh) * | 2017-12-15 | 2022-03-29 | 芝浦机械电子株式会社 | 有机膜形成装置 |
-
1985
- 1985-11-07 JP JP17195785U patent/JPS634957Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6280199U (US20030199744A1-20031023-C00003.png) | 1987-05-22 |
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