JPS6349545B2 - - Google Patents

Info

Publication number
JPS6349545B2
JPS6349545B2 JP57183934A JP18393482A JPS6349545B2 JP S6349545 B2 JPS6349545 B2 JP S6349545B2 JP 57183934 A JP57183934 A JP 57183934A JP 18393482 A JP18393482 A JP 18393482A JP S6349545 B2 JPS6349545 B2 JP S6349545B2
Authority
JP
Japan
Prior art keywords
rotary table
substrate
substrate magazine
guide
magazine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57183934A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5973067A (ja
Inventor
Yasuo Taki
Yoshio Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP18393482A priority Critical patent/JPS5973067A/ja
Publication of JPS5973067A publication Critical patent/JPS5973067A/ja
Publication of JPS6349545B2 publication Critical patent/JPS6349545B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Centrifugal Separators (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP18393482A 1982-10-19 1982-10-19 遠心分離装置 Granted JPS5973067A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18393482A JPS5973067A (ja) 1982-10-19 1982-10-19 遠心分離装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18393482A JPS5973067A (ja) 1982-10-19 1982-10-19 遠心分離装置

Publications (2)

Publication Number Publication Date
JPS5973067A JPS5973067A (ja) 1984-04-25
JPS6349545B2 true JPS6349545B2 (enrdf_load_stackoverflow) 1988-10-05

Family

ID=16144358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18393482A Granted JPS5973067A (ja) 1982-10-19 1982-10-19 遠心分離装置

Country Status (1)

Country Link
JP (1) JPS5973067A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04107552A (ja) * 1990-08-28 1992-04-09 Toppan Printing Co Ltd フィルム位置合せ装置及びそれを用いた位置合せ方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS559286U (enrdf_load_stackoverflow) * 1978-07-06 1980-01-21
JPS55127163A (en) * 1979-03-24 1980-10-01 Mitsubishi Electric Corp Automatic centrifugal dehydrating apparatus
JPS57148455U (enrdf_load_stackoverflow) * 1981-03-14 1982-09-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04107552A (ja) * 1990-08-28 1992-04-09 Toppan Printing Co Ltd フィルム位置合せ装置及びそれを用いた位置合せ方法

Also Published As

Publication number Publication date
JPS5973067A (ja) 1984-04-25

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