JPS6349291A - シリコン研磨廃水の浮上分離処理方法 - Google Patents

シリコン研磨廃水の浮上分離処理方法

Info

Publication number
JPS6349291A
JPS6349291A JP19281286A JP19281286A JPS6349291A JP S6349291 A JPS6349291 A JP S6349291A JP 19281286 A JP19281286 A JP 19281286A JP 19281286 A JP19281286 A JP 19281286A JP S6349291 A JPS6349291 A JP S6349291A
Authority
JP
Japan
Prior art keywords
flotation
silicon
polishing
added
wastewater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19281286A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0314516B2 (enrdf_load_stackoverflow
Inventor
Yukio Ito
伊藤　征生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kurita Water Industries Ltd
Original Assignee
Kurita Water Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kurita Water Industries Ltd filed Critical Kurita Water Industries Ltd
Priority to JP19281286A priority Critical patent/JPS6349291A/ja
Publication of JPS6349291A publication Critical patent/JPS6349291A/ja
Publication of JPH0314516B2 publication Critical patent/JPH0314516B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Suspended Particles By Flocculating Agents (AREA)
  • Physical Water Treatments (AREA)
JP19281286A 1986-08-20 1986-08-20 シリコン研磨廃水の浮上分離処理方法 Granted JPS6349291A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19281286A JPS6349291A (ja) 1986-08-20 1986-08-20 シリコン研磨廃水の浮上分離処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19281286A JPS6349291A (ja) 1986-08-20 1986-08-20 シリコン研磨廃水の浮上分離処理方法

Publications (2)

Publication Number Publication Date
JPS6349291A true JPS6349291A (ja) 1988-03-02
JPH0314516B2 JPH0314516B2 (enrdf_load_stackoverflow) 1991-02-26

Family

ID=16297396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19281286A Granted JPS6349291A (ja) 1986-08-20 1986-08-20 シリコン研磨廃水の浮上分離処理方法

Country Status (1)

Country Link
JP (1) JPS6349291A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0928777A1 (en) * 1993-08-16 1999-07-14 Ebara Corporation Waste treatment system in a polishing apparatus
JP2008238030A (ja) * 2007-03-27 2008-10-09 Kurita Water Ind Ltd 凝集処理方法
WO2009081245A1 (en) * 2007-12-19 2009-07-02 Applied Materials Switzerland Sa Method for recovering silicon from sawing waste
KR100917919B1 (ko) 2007-11-02 2009-09-16 주식회사 일신환경기술 마그네슘 판재용 버핑용수 재이용장치
JP2010082568A (ja) * 2008-09-30 2010-04-15 Daido Chem Ind Co Ltd 廃液の処理方法
JP2012050948A (ja) * 2010-09-02 2012-03-15 Nippon Rensui Co Ltd 排水処理装置および排水処理方法
JP2019041606A (ja) * 2017-08-30 2019-03-22 株式会社カネカ ポリヒドロキシアルカノエートの製造方法
CN112158983A (zh) * 2020-09-16 2021-01-01 天津市市政工程设计研究院 一种用于光伏废水的高效除硅除氟系统及其方法

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0928777A1 (en) * 1993-08-16 1999-07-14 Ebara Corporation Waste treatment system in a polishing apparatus
JP2008238030A (ja) * 2007-03-27 2008-10-09 Kurita Water Ind Ltd 凝集処理方法
KR100917919B1 (ko) 2007-11-02 2009-09-16 주식회사 일신환경기술 마그네슘 판재용 버핑용수 재이용장치
WO2009081245A1 (en) * 2007-12-19 2009-07-02 Applied Materials Switzerland Sa Method for recovering silicon from sawing waste
US8381914B2 (en) 2007-12-19 2013-02-26 Ecole Polytechnique Federale De Lausanne (Epfl) Method for recovering silicon from sawing waste
JP2010082568A (ja) * 2008-09-30 2010-04-15 Daido Chem Ind Co Ltd 廃液の処理方法
JP2012050948A (ja) * 2010-09-02 2012-03-15 Nippon Rensui Co Ltd 排水処理装置および排水処理方法
JP2019041606A (ja) * 2017-08-30 2019-03-22 株式会社カネカ ポリヒドロキシアルカノエートの製造方法
CN112158983A (zh) * 2020-09-16 2021-01-01 天津市市政工程设计研究院 一种用于光伏废水的高效除硅除氟系统及其方法

Also Published As

Publication number Publication date
JPH0314516B2 (enrdf_load_stackoverflow) 1991-02-26

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