JPS6348188B2 - - Google Patents
Info
- Publication number
- JPS6348188B2 JPS6348188B2 JP54171181A JP17118179A JPS6348188B2 JP S6348188 B2 JPS6348188 B2 JP S6348188B2 JP 54171181 A JP54171181 A JP 54171181A JP 17118179 A JP17118179 A JP 17118179A JP S6348188 B2 JPS6348188 B2 JP S6348188B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- polycrystalline silicon
- forming
- thermal oxide
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Bipolar Transistors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17118179A JPS5696858A (en) | 1979-12-29 | 1979-12-29 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17118179A JPS5696858A (en) | 1979-12-29 | 1979-12-29 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5696858A JPS5696858A (en) | 1981-08-05 |
| JPS6348188B2 true JPS6348188B2 (enrdf_load_stackoverflow) | 1988-09-28 |
Family
ID=15918497
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17118179A Granted JPS5696858A (en) | 1979-12-29 | 1979-12-29 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5696858A (enrdf_load_stackoverflow) |
-
1979
- 1979-12-29 JP JP17118179A patent/JPS5696858A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5696858A (en) | 1981-08-05 |
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