JPS6348013B2 - - Google Patents
Info
- Publication number
- JPS6348013B2 JPS6348013B2 JP17315480A JP17315480A JPS6348013B2 JP S6348013 B2 JPS6348013 B2 JP S6348013B2 JP 17315480 A JP17315480 A JP 17315480A JP 17315480 A JP17315480 A JP 17315480A JP S6348013 B2 JPS6348013 B2 JP S6348013B2
- Authority
- JP
- Japan
- Prior art keywords
- glass
- diaphragm
- pressure
- pressure sensor
- beads
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011521 glass Substances 0.000 claims description 46
- 239000000758 substrate Substances 0.000 claims description 10
- 239000011324 bead Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- 239000005394 sealing glass Substances 0.000 claims description 4
- 239000002245 particle Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17315480A JPS5797422A (en) | 1980-12-10 | 1980-12-10 | Manufacture of electrostatic capacity type pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17315480A JPS5797422A (en) | 1980-12-10 | 1980-12-10 | Manufacture of electrostatic capacity type pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5797422A JPS5797422A (en) | 1982-06-17 |
| JPS6348013B2 true JPS6348013B2 (enrdf_load_stackoverflow) | 1988-09-27 |
Family
ID=15955098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17315480A Granted JPS5797422A (en) | 1980-12-10 | 1980-12-10 | Manufacture of electrostatic capacity type pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5797422A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59148842A (ja) * | 1983-02-15 | 1984-08-25 | Matsushita Electric Ind Co Ltd | 静電容量形圧力センサの製造方法 |
| JPS6092670A (ja) * | 1983-10-26 | 1985-05-24 | Nec Corp | 力変換器 |
| JPH0652212B2 (ja) * | 1986-12-12 | 1994-07-06 | 富士電機株式会社 | 静電容量式圧力センサにおけるギヤツプ形成方法 |
| JPH0187230U (enrdf_load_stackoverflow) * | 1987-11-30 | 1989-06-08 | ||
| US10724907B2 (en) * | 2017-07-12 | 2020-07-28 | Sensata Technologies, Inc. | Pressure sensor element with glass barrier material configured for increased capacitive response |
-
1980
- 1980-12-10 JP JP17315480A patent/JPS5797422A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5797422A (en) | 1982-06-17 |
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