JPS5797422A - Manufacture of electrostatic capacity type pressure sensor - Google Patents

Manufacture of electrostatic capacity type pressure sensor

Info

Publication number
JPS5797422A
JPS5797422A JP55173154A JP17315480A JPS5797422A JP S5797422 A JPS5797422 A JP S5797422A JP 55173154 A JP55173154 A JP 55173154A JP 17315480 A JP17315480 A JP 17315480A JP S5797422 A JPS5797422 A JP S5797422A
Authority
JP
Japan
Prior art keywords
sealing
alumina
manufacture
pressure sensor
airtightness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55173154A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6348013B2 (enrdf_load_stackoverflow
Inventor
Osamu Makino
Toru Ishida
Jun Yasuda
Seiji Oikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP55173154A priority Critical patent/JPS5797422A/ja
Publication of JPS5797422A publication Critical patent/JPS5797422A/ja
Publication of JPS6348013B2 publication Critical patent/JPS6348013B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP55173154A 1980-12-10 1980-12-10 Manufacture of electrostatic capacity type pressure sensor Granted JPS5797422A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55173154A JPS5797422A (en) 1980-12-10 1980-12-10 Manufacture of electrostatic capacity type pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55173154A JPS5797422A (en) 1980-12-10 1980-12-10 Manufacture of electrostatic capacity type pressure sensor

Publications (2)

Publication Number Publication Date
JPS5797422A true JPS5797422A (en) 1982-06-17
JPS6348013B2 JPS6348013B2 (enrdf_load_stackoverflow) 1988-09-27

Family

ID=15955098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55173154A Granted JPS5797422A (en) 1980-12-10 1980-12-10 Manufacture of electrostatic capacity type pressure sensor

Country Status (1)

Country Link
JP (1) JPS5797422A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59148842A (ja) * 1983-02-15 1984-08-25 Matsushita Electric Ind Co Ltd 静電容量形圧力センサの製造方法
JPS6092670A (ja) * 1983-10-26 1985-05-24 Nec Corp 力変換器
JPS63265128A (ja) * 1986-12-12 1988-11-01 Fuji Electric Co Ltd 静電容量式圧力センサにおけるギヤツプ形成方法
JPH0187230U (enrdf_load_stackoverflow) * 1987-11-30 1989-06-08
JP2019020398A (ja) * 2017-07-12 2019-02-07 センサータ テクノロジーズ インコーポレーテッド 増加した容量性応答のために構成されるガラス障壁材料を備える圧力センサ素子

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59148842A (ja) * 1983-02-15 1984-08-25 Matsushita Electric Ind Co Ltd 静電容量形圧力センサの製造方法
JPS6092670A (ja) * 1983-10-26 1985-05-24 Nec Corp 力変換器
JPS63265128A (ja) * 1986-12-12 1988-11-01 Fuji Electric Co Ltd 静電容量式圧力センサにおけるギヤツプ形成方法
JPH0187230U (enrdf_load_stackoverflow) * 1987-11-30 1989-06-08
JP2019020398A (ja) * 2017-07-12 2019-02-07 センサータ テクノロジーズ インコーポレーテッド 増加した容量性応答のために構成されるガラス障壁材料を備える圧力センサ素子

Also Published As

Publication number Publication date
JPS6348013B2 (enrdf_load_stackoverflow) 1988-09-27

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