JPS6347583B2 - - Google Patents
Info
- Publication number
- JPS6347583B2 JPS6347583B2 JP24299084A JP24299084A JPS6347583B2 JP S6347583 B2 JPS6347583 B2 JP S6347583B2 JP 24299084 A JP24299084 A JP 24299084A JP 24299084 A JP24299084 A JP 24299084A JP S6347583 B2 JPS6347583 B2 JP S6347583B2
- Authority
- JP
- Japan
- Prior art keywords
- wire
- coating layer
- metal
- abrasive grains
- crack
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 239000011247 coating layer Substances 0.000 claims description 13
- 239000006061 abrasive grain Substances 0.000 description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 238000007747 plating Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910001297 Zn alloy Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000010622 cold drawing Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D61/00—Tools for sawing machines or sawing devices; Clamping devices for these tools
- B23D61/18—Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
- B23D61/185—Saw wires; Saw cables; Twisted saw strips
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は半導体、セラミツクス等硬質材料の切
断に用いるワイヤーソー用ワイヤーに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a wire for a wire saw used for cutting hard materials such as semiconductors and ceramics.
ワイヤーソーは、ピアノ線、タンクステン線な
どの抗張力が大きく硬い金属線を、張力を加えた
状態で往復動させつつ、被加工物に圧接し、金属
線と被加工物との間にカーボランダム粉等の硬い
砥粒を流し込み金属線の移動に伴なつて運動する
砥粒によつて被加工物を研削し切断するものであ
る。
A wire saw uses a hard metal wire with high tensile strength, such as piano wire or tank stainless steel wire, to press it against the workpiece while reciprocating under tension.Carborundum is created between the metal wire and the workpiece. Hard abrasive grains such as powder are poured into the machine, and the workpiece is ground and cut by the abrasive grains that move as the metal wire moves.
現在使用されているソーワイヤーは表面が滑ら
かであるため、砥粒を移動させる力が弱く切断速
度を向上できない。ワイヤーと砥粒との相対変位
を防ぐためにワイヤーに、銅、ニツケル、半田、
真鍮のような比較的軟かい金属のコーテイングを
施し、ワイヤーを被加工物へ押しつける力で、砥
粒をワイヤーのコーテイング層に食い込ませ、ワ
イヤーと砥粒の相対変位を防ぎワイヤーの摩耗を
防ぐようにしたものが特公昭52−14873号公報に
て公知であるが、砥粒が容易に食い込むようなコ
ーテイング層は、またコーテイング層が短時間で
摩耗してなくなり、結局はコーテイング層のない
表面の滑らかなワイヤーとなつて切断速度が低下
してしまう。 The saw wires currently in use have a smooth surface, so the power to move the abrasive grains is weak and cutting speed cannot be improved. Copper, nickel, solder,
The wire is coated with a relatively soft metal such as brass, and the force of pressing the wire against the workpiece causes the abrasive grains to dig into the coating layer of the wire, preventing relative displacement between the wire and the abrasive grains and preventing wire wear. It is known from Japanese Patent Publication No. 52-14873, however, a coating layer into which abrasive grains can easily penetrate will cause the coating layer to wear out in a short period of time, and eventually the surface without the coating layer will be damaged. The wire becomes smooth and the cutting speed decreases.
本発明は上記した従来のワイヤーよりも砥粒を
よく移動させうると共に、この砥粒移動作用を長
くもたせることのできるワイヤーソー用ワイヤー
を供せんとするものである。
The present invention aims to provide a wire for a wire saw that can move abrasive grains better than the above-mentioned conventional wires and can maintain this abrasive grain movement effect for a long time.
本発明は金属線の表面にクラツク溝を有する金
属の被覆層を設けたことを特徴とするワイヤーソ
ー用ワイヤーを構成したものである。
The present invention comprises a wire for a wire saw, characterized in that a metal coating layer having crack grooves is provided on the surface of the metal wire.
本発明ワイヤーは、ピアノ線、タングステン線
の表面に、展延性に乏しいか又は加工硬化の大き
い金属、例えばニツケル、コバルト、鉄、亜鉛合
金等のメツキを施し、冷間伸線することにより、
メツキ層を加工硬化し、同時にメツキ層にクラツ
ク溝を発生させたり、金属線の表面に樹脂のマス
キングを斑状にローラーで施して硬質メツキを施
し、マスキング部を溶解して除去し、除去した跡
をクラツク溝とする等して作ることができる。 The wire of the present invention is produced by plating the surface of a piano wire or tungsten wire with a metal that has poor malleability or is highly work hardened, such as nickel, cobalt, iron, zinc alloy, etc., and then cold drawing it.
The plating layer is work-hardened and at the same time crack grooves are generated in the plating layer, or resin masking is applied to the surface of the metal wire in spots with a roller to form a hard plating, and the masking portion is dissolved and removed, leaving no trace of the removal. It can be made by using crack grooves, etc.
上記のワイヤーを２本あるいは３本撚り合わせ
撚線にして使用しても良い。 Two or three of the above wires may be twisted to form a twisted wire.
本発明ワイヤーでは表面にクラツク溝を設けた
ことにより、第２図に示すように、ワイヤーと被
加工物４との間に供給した砥粒５が、被覆層２に
形成したクラツク溝３に入り込み、ワイヤーの往
復運動に従つて、砥粒５を強制的に被加工物４の
表面に対し摺動させるので、研削量が増し、切断
速度が向上する。そして被覆層２が硬質金属で形
成されている場合は被覆層２は容易に摩耗せず、
摩耗し易いクラツク溝３の入口角度が摩耗してク
ラツク溝３が滑らかな凹部となつても、砥粒５を
強制的に移動させる作用は残るので、切断速度は
表面の滑らかなワイヤーよりも優れ、表面に軟か
い金属のコーテイング層を設けたものより長期に
優れた切れ味を持続させうる。又、比較的軟かい
金属にてクラツク溝のある被覆層を形成した場合
でも同様な効果を得られる。
By providing the crack grooves on the surface of the wire of the present invention, the abrasive grains 5 supplied between the wire and the workpiece 4 enter the crack grooves 3 formed in the coating layer 2, as shown in FIG. Since the abrasive grains 5 are forced to slide on the surface of the workpiece 4 according to the reciprocating motion of the wire, the amount of grinding increases and the cutting speed improves. If the coating layer 2 is made of hard metal, the coating layer 2 will not be easily worn out.
Even if the entrance angle of the crack groove 3, which is prone to wear, wears out and the crack groove 3 becomes a smooth recess, the effect of forcibly moving the abrasive grains 5 remains, so the cutting speed is superior to that of a wire with a smooth surface. , can maintain superior sharpness for a longer period of time than those with a soft metal coating layer on the surface. Further, the same effect can be obtained even when the coating layer with crack grooves is formed of a relatively soft metal.
また、金属線を２本あるいは３本撚り合わせて
撚線としたワイヤーを使用すると、第３図に示す
ように撚り合わせた面に砥粒５が抱えられ、ワイ
ヤーの往復運動に従い砥粒を強制的に移動させる
ので、クラツク溝３の作用にこの作用が加わり切
断速度を一層向上できる。 In addition, if you use a wire made by twisting two or three metal wires together, the abrasive grains 5 will be held on the twisted surface as shown in Figure 3, and the abrasive grains will be forced as the wire reciprocates. Since the cutting member is moved centrally, this action is added to the action of the crack groove 3, and the cutting speed can be further improved.
直径0.5mmまで伸線したピアノ線の表面に硬質
ニツケルメツキを5μｍの厚さにメツキし、ダイ
スを通して直径0.16mmまで伸線した。得られたワ
イヤーは、第１図に示すように、ピアノ線１の表
面に施したニツケルメツキの被覆層２に多数のク
ラツク溝３が形成されていた。
The surface of the piano wire drawn to a diameter of 0.5 mm was plated with hard nickel plating to a thickness of 5 μm, and the wire was drawn to a diameter of 0.16 mm through a die. As shown in FIG. 1, the obtained wire had a large number of crack grooves 3 formed in the nickel plating coating layer 2 applied to the surface of the piano wire 1.
直径0.16mmのピアノ線、直径0.14mmのピアノ線
に10μｍの厚さに銅メツキしたままの外径0.16mm
の銅メツキ被覆ピアノ線と共に、一定条件下で切
断試験を行なつた。 0.16mm diameter piano wire, 0.14mm diameter piano wire plated with copper to a thickness of 10μm, outer diameter 0.16mm
A cutting test was conducted under certain conditions with copper-plated piano wire.
ピアノ線のままのものを１とすると、銅メツキ
被覆ピアノ線は1.2倍、上記本発明ワイヤーでは
2.3倍の速度で切断できた。 If the original piano wire is 1, the copper plating coated piano wire is 1.2 times, and the above invention wire is 1.2 times as high.
It was possible to cut 2.3 times faster.
また耐久性も、本発明ワイヤーはピアノ線、銅
メツキ被覆ピアノ線の1.5倍であつた。 Furthermore, the durability of the wire of the present invention was 1.5 times that of piano wire and copper-plated piano wire.
本発明によれば、切断速度、耐久性共に従来よ
り優れたワイヤーソー用ワイヤーを提供できる。
According to the present invention, it is possible to provide a wire for a wire saw that is superior in cutting speed and durability to conventional wire saws.
第１図は本発明によるワイヤーソー用ワイヤー
の一実施例の一部側面図、第２図は本発明ワイヤ
ーの作用説明図、第３図は本発明ワイヤーの他の
実施例の作用説明図である。
１……金属線、２……被覆層、３……クラツク
溝、４……被加工物、５……砥粒、６……ワイヤ
ー。
Fig. 1 is a partial side view of one embodiment of the wire for a wire saw according to the present invention, Fig. 2 is an explanatory diagram of the action of the wire of the invention, and Fig. 3 is an explanatory diagram of the action of another embodiment of the wire of the invention. be. DESCRIPTION OF SYMBOLS 1...Metal wire, 2...Coating layer, 3...Crack groove, 4...Workpiece, 5...Abrasive grain, 6...Wire.
Claims (1)
覆層を有することを特徴とするワイヤーソー用ワ
イヤー。 ２ 金属線が撚線からなる特許請求の範囲１項に
記載のワイヤーソー用ワイヤー。[Scope of Claims] 1. A wire for a wire saw, comprising a metal coating layer having crack grooves on the surface of the metal wire. 2. The wire for a wire saw according to claim 1, wherein the metal wire is a stranded wire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24299084A JPS61121817A (en) | 1984-11-16 | 1984-11-16 | Wire for wire saw |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24299084A JPS61121817A (en) | 1984-11-16 | 1984-11-16 | Wire for wire saw |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61121817A JPS61121817A (en) | 1986-06-09 |
| JPS6347583B2 true JPS6347583B2 (en) | 1988-09-22 |
Family
ID=17097252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24299084A Granted JPS61121817A (en) | 1984-11-16 | 1984-11-16 | Wire for wire saw |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61121817A (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4856490A (en) * | 1987-09-09 | 1989-08-15 | Osaka Diamond Industrial Co., Ltd. | Wire saw |
| JP2001198790A (en) * | 2000-01-18 | 2001-07-24 | Seiko Epson Corp | Wire and wire saw |
| TW201111106A (en) * | 2009-03-02 | 2011-04-01 | Sumitomo Electric Industries | Diamond wire saw, process for manufacturing diamond wire saw |
| CN102172995B (en) * | 2011-01-27 | 2014-07-30 | 王楚雯 | Metal composite wire and preparation method thereof |
| CN102152416B (en) * | 2011-01-27 | 2014-05-28 | 盛利维尔（中国）新材料技术有限公司 | Diamond fretsaw and manufacture method thereof |
| CN102172994B (en) * | 2011-01-27 | 2014-11-26 | 王楚雯 | Metal composite wire, preparation method thereof and metal wire |
| CN102166792B (en) * | 2011-01-27 | 2014-03-12 | 王楚雯 | Diamond fret saw and manufacture method thereof |
-
1984
- 1984-11-16 JP JP24299084A patent/JPS61121817A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61121817A (en) | 1986-06-09 |
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