JPS6347584B2 - - Google Patents
Info
- Publication number
- JPS6347584B2 JPS6347584B2 JP24299284A JP24299284A JPS6347584B2 JP S6347584 B2 JPS6347584 B2 JP S6347584B2 JP 24299284 A JP24299284 A JP 24299284A JP 24299284 A JP24299284 A JP 24299284A JP S6347584 B2 JPS6347584 B2 JP S6347584B2
- Authority
- JP
- Japan
- Prior art keywords
- wire
- metal
- abrasive grains
- wires
- cutting speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 19
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000006061 abrasive grain Substances 0.000 description 12
- 238000005520 cutting process Methods 0.000 description 10
- 239000011247 coating layer Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D61/00—Tools for sawing machines or sawing devices; Clamping devices for these tools
- B23D61/18—Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
- B23D61/185—Saw wires; Saw cables; Twisted saw strips
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は半導体、セラミツクス等の硬質材料の
切断に用いるワイヤーソー用ワイヤーに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a wire for a wire saw used for cutting hard materials such as semiconductors and ceramics.
ワイヤーソーは、ピアノ線、タングステン線な
どの抗張力が大きく硬い金属線を、張力を加えた
状態で往復動させつつ、被加工物に圧接し、金属
線と被加工物との間にカーボランダム粉等の硬い
砥粒を流し込み、金属線の移動に伴なつて運動す
る砥粒によつて被加工物を研削し切断するもので
ある。
A wire saw uses a hard metal wire with high tensile strength, such as a piano wire or tungsten wire, to press against the workpiece while reciprocating under tension.Carborundum powder is inserted between the metal wire and the workpiece. The workpiece is ground and cut by pouring hard abrasive grains such as, etc., and using the abrasive grains that move as the metal wire moves.
現在使用されているソーワイヤーは表面が滑ら
かであるため、砥粒を移動させる力が弱く切断速
度を向上できない。 The saw wires currently in use have a smooth surface, so the power to move the abrasive grains is weak and cutting speed cannot be improved.
ワイヤーと砥粒との相対変位を防ぐためにワイ
ヤーに、銅、ニツケル、半田、真鍮のような比較
的軟かい金属のコーテイングを施し、ワイヤーを
被加工物へ押しつける力で、砥粒をワイヤーのコ
ーテイング層に食い込ませ、ワイヤーと砥粒の相
対変位を防ぎワイヤーの摩耗を防ぐようにしたも
のが特公昭52−14873号公報にて公知であるが、
砥粒が容易に食い込むようなコーテイング層は、
またコーテイング層が短時間で摩耗してなくな
り、結局はコーテイング層のない表面の滑らかな
ワイヤーとなつて切断速度が低下してしまう。 In order to prevent relative displacement between the wire and the abrasive grains, the wire is coated with a relatively soft metal such as copper, nickel, solder, or brass, and the abrasive grains are coated on the wire by the force of pressing the wire against the workpiece. A device that bites into the layer to prevent relative displacement between the wire and abrasive grains and prevent wire wear is known from Japanese Patent Publication No. 14873/1983.
A coating layer into which abrasive grains can easily penetrate is
In addition, the coating layer wears away in a short period of time, resulting in a wire with a smooth surface without a coating layer, resulting in a reduction in cutting speed.
本発明は上記した従来のワイヤーよりも砥粒を
よく移動させうると共に、この砥粒移動作用を長
くもたせることのできるワイヤーソー用ワイヤー
を供せんとするものである。
The present invention aims to provide a wire for a wire saw that can move abrasive grains better than the above-mentioned conventional wires and can maintain this abrasive grain movement effect for a long time.
本発明は上記の目的を達するため、金属線がら
せん状に巻きつけられている金属線をワイヤーソ
ー用ワイヤーとしたことにある。
In order to achieve the above object, the present invention uses a metal wire that is spirally wound as a wire for a wire saw.
金属線を巻きつける金属線は単線でも複数本引
き揃えたものでも良い。らせん状に巻きつける金
属線も、単線に限らず、２重ねじ、３重ねじと同
様に複数本を単層あるいは複層に巻きつけたり、
撚線を巻きつけても良い。用いる金属線はピアノ
線やタングステン線のように抗張力の大きく硬い
材料の線が用いられる。金属線の巻きつけ方は密
に巻きつけるほか、線間に間隙ができるように巻
きつけても良い。 The metal wire around which the metal wire is wound may be a single wire or a plurality of wires drawn in parallel. Metal wires that are wound in a spiral are not limited to single wires, but can also be wrapped in multiple layers in a single layer or in multiple layers, as in double-layered or triple-layered wires.
You can also wrap twisted wire around it. The metal wire used is made of a hard material with high tensile strength, such as piano wire or tungsten wire. The metal wire can be wrapped tightly, or it can be wrapped so that there are gaps between the wires.
巻きつけた金属線によつて外周に形成されたら
せん状の溝によつて、ワイヤーを往復動したと
き、ワイヤーと被加工物との間に供給した砥粒を
強制的に往復させることができるので、砥粒によ
る研削性を高め、切削速度を向上できる。また中
心の金属線はらせん状に巻かれた金属線によつて
砥粒による摩耗から保護され摩耗しないので、材
料又は製線加工上の欠陥が原因で断線する以外、
断線を生ずることがなくなる。
The spiral groove formed on the outer periphery of the wound metal wire allows the abrasive grains supplied between the wire and the workpiece to be forced to reciprocate when the wire is reciprocated. Therefore, the abrasive grains can improve the grindability and increase the cutting speed. In addition, the metal wire at the center is protected from abrasion by abrasive grains by the spirally wound metal wire, so it does not wear out, so unless it breaks due to defects in the material or wire manufacturing process, it will not wear out.
This eliminates the possibility of wire breakage.
直径0.08mmのピアノ線からなる単線の金属線１
に直径0.04mmのピアノ線からなる金属線２を２本
引き揃え２重ねじ状に密に巻きつけ両端を中心の
金属線１に固定し図に示す外径0.16mmのワイヤー
を作つた。これを外径0.16mmのピアノ線の単線か
らなるワイヤー、及び外径0.14mmのピアノ線に銅
メツキを10μｍの厚さに施した銅メツキ線と共
に、ワイヤーソーを用いて一定条件下でセラミツ
クスの切断速度比較試験を行なつた処、ピアノ線
単線の切断速度を100とすると、銅メツキ線の切
断速度は120、本発明ワイヤーでは180で、ピアノ
線単線の1.8倍の切断速度で切断できた。
Single metal wire 1 made of piano wire with a diameter of 0.08 mm
Two metal wires 2 made of piano wire with a diameter of 0.04 mm were aligned and tightly wound in a double-ply manner, and both ends were fixed to the central metal wire 1 to produce a wire with an outer diameter of 0.16 mm as shown in the figure. This is made into ceramics under certain conditions using a wire saw with a wire made of a single piano wire with an outer diameter of 0.16 mm, and a copper-plated wire made of a piano wire with an outer diameter of 0.14 mm coated with copper plating to a thickness of 10 μm. In a cutting speed comparison test, when the cutting speed of solid piano wire was 100, the cutting speed of copper-plated wire was 120, and the cutting speed of the present invention wire was 180, which was 1.8 times the cutting speed of solid piano wire. .
本発明ワイヤーによれば、従来より切断速度が
大きく、寿命の長いワイヤーソー用ワイヤーを提
供できる。
According to the wire of the present invention, it is possible to provide a wire for a wire saw that has a higher cutting speed than conventional wires and has a longer life.
図面は本発明によるワイヤーソー用ワイヤーの
一実施例の一部を断面で示した側面図である。
１，２……金属線。
The drawing is a side view showing a part of an embodiment of the wire for a wire saw according to the present invention in cross section. 1, 2...metal wire.
Claims (1)
いることを特徴とするワイヤーソー用ワイヤー。1. A wire for a wire saw, characterized in that a metal wire is spirally wound around a metal wire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24299284A JPS61121819A (en) | 1984-11-16 | 1984-11-16 | Wire for wire saw |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24299284A JPS61121819A (en) | 1984-11-16 | 1984-11-16 | Wire for wire saw |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61121819A JPS61121819A (en) | 1986-06-09 |
| JPS6347584B2 true JPS6347584B2 (en) | 1988-09-22 |
Family
ID=17097278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24299284A Granted JPS61121819A (en) | 1984-11-16 | 1984-11-16 | Wire for wire saw |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61121819A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0188470U (en) * | 1987-12-02 | 1989-06-12 | ||
| JPH0347264Y2 (en) * | 1987-05-29 | 1991-10-08 | ||
| JPH03130176U (en) * | 1990-04-10 | 1991-12-26 | ||
| JPH056760U (en) * | 1991-07-03 | 1993-01-29 | ヒロセ電機株式会社 | Surface mount connector structure |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61137421U (en) * | 1985-02-18 | 1986-08-26 | ||
| CN103692566A (en) * | 2013-12-13 | 2014-04-02 | 镇江耐丝新型材料有限公司 | Threaded metal wire |
-
1984
- 1984-11-16 JP JP24299284A patent/JPS61121819A/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0347264Y2 (en) * | 1987-05-29 | 1991-10-08 | ||
| JPH0188470U (en) * | 1987-12-02 | 1989-06-12 | ||
| JPH03130176U (en) * | 1990-04-10 | 1991-12-26 | ||
| JPH056760U (en) * | 1991-07-03 | 1993-01-29 | ヒロセ電機株式会社 | Surface mount connector structure |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61121819A (en) | 1986-06-09 |
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