JPS6347252B2 - - Google Patents

Info

Publication number
JPS6347252B2
JPS6347252B2 JP56209770A JP20977081A JPS6347252B2 JP S6347252 B2 JPS6347252 B2 JP S6347252B2 JP 56209770 A JP56209770 A JP 56209770A JP 20977081 A JP20977081 A JP 20977081A JP S6347252 B2 JPS6347252 B2 JP S6347252B2
Authority
JP
Japan
Prior art keywords
insulating film
silicon
substrate
single crystal
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56209770A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58114422A (ja
Inventor
Haruhisa Mori
Junji Sakurai
Hajime Kamioka
Seiichiro Kawamura
Motoo Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56209770A priority Critical patent/JPS58114422A/ja
Publication of JPS58114422A publication Critical patent/JPS58114422A/ja
Publication of JPS6347252B2 publication Critical patent/JPS6347252B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P34/42—

Landscapes

  • Recrystallisation Techniques (AREA)
JP56209770A 1981-12-28 1981-12-28 半導体装置用基板の製造方法 Granted JPS58114422A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56209770A JPS58114422A (ja) 1981-12-28 1981-12-28 半導体装置用基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56209770A JPS58114422A (ja) 1981-12-28 1981-12-28 半導体装置用基板の製造方法

Publications (2)

Publication Number Publication Date
JPS58114422A JPS58114422A (ja) 1983-07-07
JPS6347252B2 true JPS6347252B2 (OSRAM) 1988-09-21

Family

ID=16578317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56209770A Granted JPS58114422A (ja) 1981-12-28 1981-12-28 半導体装置用基板の製造方法

Country Status (1)

Country Link
JP (1) JPS58114422A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3478170D1 (en) * 1983-07-15 1989-06-15 Toshiba Kk A c-mos device and process for manufacturing the same
JPH0693428B2 (ja) * 1987-12-04 1994-11-16 工業技術院長 多層半導体基板の製造方法

Also Published As

Publication number Publication date
JPS58114422A (ja) 1983-07-07

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