JPS6345819A - 投影露光装置におけるステ−ジ誤差測定装置 - Google Patents

投影露光装置におけるステ−ジ誤差測定装置

Info

Publication number
JPS6345819A
JPS6345819A JP61190063A JP19006386A JPS6345819A JP S6345819 A JPS6345819 A JP S6345819A JP 61190063 A JP61190063 A JP 61190063A JP 19006386 A JP19006386 A JP 19006386A JP S6345819 A JPS6345819 A JP S6345819A
Authority
JP
Japan
Prior art keywords
stage
yawing
projection exposure
disk
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61190063A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0529130B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kozo Kurimoto
栗本　宏三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP61190063A priority Critical patent/JPS6345819A/ja
Publication of JPS6345819A publication Critical patent/JPS6345819A/ja
Publication of JPH0529130B2 publication Critical patent/JPH0529130B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP61190063A 1986-08-13 1986-08-13 投影露光装置におけるステ−ジ誤差測定装置 Granted JPS6345819A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61190063A JPS6345819A (ja) 1986-08-13 1986-08-13 投影露光装置におけるステ−ジ誤差測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61190063A JPS6345819A (ja) 1986-08-13 1986-08-13 投影露光装置におけるステ−ジ誤差測定装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP10966595A Division JP2724979B2 (ja) 1995-05-08 1995-05-08 投影露光装置および投影露光方法

Publications (2)

Publication Number Publication Date
JPS6345819A true JPS6345819A (ja) 1988-02-26
JPH0529130B2 JPH0529130B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-04-28

Family

ID=16251727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61190063A Granted JPS6345819A (ja) 1986-08-13 1986-08-13 投影露光装置におけるステ−ジ誤差測定装置

Country Status (1)

Country Link
JP (1) JPS6345819A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0438813A (ja) * 1990-06-04 1992-02-10 Canon Inc 半導体露光装置
CN1066156C (zh) * 1998-09-11 2001-05-23 化学工业部北京化工研究院 吸水树脂的制备方法及搅拌器
WO2006134922A1 (ja) * 2005-06-15 2006-12-21 Fujifilm Corporation 露光装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57201025A (en) * 1981-06-03 1982-12-09 Mitsubishi Electric Corp Stepping and repeating device
JPS5972135A (ja) * 1982-10-18 1984-04-24 Hitachi Ltd 超精密ｘｙ移動装置
JPS60173550A (ja) * 1984-02-20 1985-09-06 Canon Inc 半導体焼付装置
JPS60224225A (ja) * 1984-04-23 1985-11-08 Canon Inc 半導体焼付装置
JPS60249323A (ja) * 1984-05-25 1985-12-10 Hitachi Ltd 縮小投影露光装置
JPS6187330A (ja) * 1984-10-01 1986-05-02 Canon Inc 半導体製造装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57201025A (en) * 1981-06-03 1982-12-09 Mitsubishi Electric Corp Stepping and repeating device
JPS5972135A (ja) * 1982-10-18 1984-04-24 Hitachi Ltd 超精密ｘｙ移動装置
JPS60173550A (ja) * 1984-02-20 1985-09-06 Canon Inc 半導体焼付装置
JPS60224225A (ja) * 1984-04-23 1985-11-08 Canon Inc 半導体焼付装置
JPS60249323A (ja) * 1984-05-25 1985-12-10 Hitachi Ltd 縮小投影露光装置
JPS6187330A (ja) * 1984-10-01 1986-05-02 Canon Inc 半導体製造装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0438813A (ja) * 1990-06-04 1992-02-10 Canon Inc 半導体露光装置
CN1066156C (zh) * 1998-09-11 2001-05-23 化学工业部北京化工研究院 吸水树脂的制备方法及搅拌器
WO2006134922A1 (ja) * 2005-06-15 2006-12-21 Fujifilm Corporation 露光装置

Also Published As

Publication number Publication date
JPH0529130B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-04-28

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term