JPS6345734Y2 - - Google Patents
Info
- Publication number
- JPS6345734Y2 JPS6345734Y2 JP2254983U JP2254983U JPS6345734Y2 JP S6345734 Y2 JPS6345734 Y2 JP S6345734Y2 JP 2254983 U JP2254983 U JP 2254983U JP 2254983 U JP2254983 U JP 2254983U JP S6345734 Y2 JPS6345734 Y2 JP S6345734Y2
- Authority
- JP
- Japan
- Prior art keywords
- extraction electrode
- anode
- shield plate
- ion source
- field emission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000605 extraction Methods 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 description 11
- 229910001338 liquidmetal Inorganic materials 0.000 description 7
- 238000010884 ion-beam technique Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000009413 insulation Methods 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2254983U JPS59129155U (ja) | 1983-02-18 | 1983-02-18 | 電界放射型イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2254983U JPS59129155U (ja) | 1983-02-18 | 1983-02-18 | 電界放射型イオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59129155U JPS59129155U (ja) | 1984-08-30 |
| JPS6345734Y2 true JPS6345734Y2 (tr) | 1988-11-28 |
Family
ID=30153645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2254983U Granted JPS59129155U (ja) | 1983-02-18 | 1983-02-18 | 電界放射型イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59129155U (tr) |
-
1983
- 1983-02-18 JP JP2254983U patent/JPS59129155U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59129155U (ja) | 1984-08-30 |
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