JPS6345469B2 - - Google Patents

Info

Publication number
JPS6345469B2
JPS6345469B2 JP60063422A JP6342285A JPS6345469B2 JP S6345469 B2 JPS6345469 B2 JP S6345469B2 JP 60063422 A JP60063422 A JP 60063422A JP 6342285 A JP6342285 A JP 6342285A JP S6345469 B2 JPS6345469 B2 JP S6345469B2
Authority
JP
Japan
Prior art keywords
etching
etched
gas
ccl
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60063422A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60221586A (ja
Inventor
Masakatsu Kimizuka
Kazuo Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP6342285A priority Critical patent/JPS60221586A/ja
Publication of JPS60221586A publication Critical patent/JPS60221586A/ja
Publication of JPS6345469B2 publication Critical patent/JPS6345469B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP6342285A 1985-03-29 1985-03-29 プラズマエツチング方法 Granted JPS60221586A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6342285A JPS60221586A (ja) 1985-03-29 1985-03-29 プラズマエツチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6342285A JPS60221586A (ja) 1985-03-29 1985-03-29 プラズマエツチング方法

Publications (2)

Publication Number Publication Date
JPS60221586A JPS60221586A (ja) 1985-11-06
JPS6345469B2 true JPS6345469B2 (enExample) 1988-09-09

Family

ID=13228833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6342285A Granted JPS60221586A (ja) 1985-03-29 1985-03-29 プラズマエツチング方法

Country Status (1)

Country Link
JP (1) JPS60221586A (enExample)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4943844A (enExample) * 1972-09-01 1974-04-25
JPS5914546B2 (ja) * 1975-12-10 1984-04-05 株式会社東芝 ドライエッチング方法
JPS5623752A (en) * 1979-08-01 1981-03-06 Matsushita Electronics Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS60221586A (ja) 1985-11-06

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