JPS60221586A - プラズマエツチング方法 - Google Patents

プラズマエツチング方法

Info

Publication number
JPS60221586A
JPS60221586A JP6342285A JP6342285A JPS60221586A JP S60221586 A JPS60221586 A JP S60221586A JP 6342285 A JP6342285 A JP 6342285A JP 6342285 A JP6342285 A JP 6342285A JP S60221586 A JPS60221586 A JP S60221586A
Authority
JP
Japan
Prior art keywords
etching
etched
gas
chamber
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6342285A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6345469B2 (enExample
Inventor
Masakatsu Kimizuka
君塚　正勝
Kazuo Hirata
一雄 平田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP6342285A priority Critical patent/JPS60221586A/ja
Publication of JPS60221586A publication Critical patent/JPS60221586A/ja
Publication of JPS6345469B2 publication Critical patent/JPS6345469B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP6342285A 1985-03-29 1985-03-29 プラズマエツチング方法 Granted JPS60221586A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6342285A JPS60221586A (ja) 1985-03-29 1985-03-29 プラズマエツチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6342285A JPS60221586A (ja) 1985-03-29 1985-03-29 プラズマエツチング方法

Publications (2)

Publication Number Publication Date
JPS60221586A true JPS60221586A (ja) 1985-11-06
JPS6345469B2 JPS6345469B2 (enExample) 1988-09-09

Family

ID=13228833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6342285A Granted JPS60221586A (ja) 1985-03-29 1985-03-29 プラズマエツチング方法

Country Status (1)

Country Link
JP (1) JPS60221586A (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4943844A (enExample) * 1972-09-01 1974-04-25
JPS5269831A (en) * 1975-12-10 1977-06-10 Tokyo Shibaura Electric Co Etching device
JPS5623752A (en) * 1979-08-01 1981-03-06 Matsushita Electronics Corp Manufacture of semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4943844A (enExample) * 1972-09-01 1974-04-25
JPS5269831A (en) * 1975-12-10 1977-06-10 Tokyo Shibaura Electric Co Etching device
JPS5623752A (en) * 1979-08-01 1981-03-06 Matsushita Electronics Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS6345469B2 (enExample) 1988-09-09

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