JPS634487Y2 - - Google Patents

Info

Publication number
JPS634487Y2
JPS634487Y2 JP1982169555U JP16955582U JPS634487Y2 JP S634487 Y2 JPS634487 Y2 JP S634487Y2 JP 1982169555 U JP1982169555 U JP 1982169555U JP 16955582 U JP16955582 U JP 16955582U JP S634487 Y2 JPS634487 Y2 JP S634487Y2
Authority
JP
Japan
Prior art keywords
cooling
inner cylinder
exhaust system
vacuum exhaust
cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982169555U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5974803U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16955582U priority Critical patent/JPS5974803U/ja
Publication of JPS5974803U publication Critical patent/JPS5974803U/ja
Application granted granted Critical
Publication of JPS634487Y2 publication Critical patent/JPS634487Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP16955582U 1982-11-09 1982-11-09 真空排気系用冷却トラツプ Granted JPS5974803U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16955582U JPS5974803U (ja) 1982-11-09 1982-11-09 真空排気系用冷却トラツプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16955582U JPS5974803U (ja) 1982-11-09 1982-11-09 真空排気系用冷却トラツプ

Publications (2)

Publication Number Publication Date
JPS5974803U JPS5974803U (ja) 1984-05-21
JPS634487Y2 true JPS634487Y2 (cg-RX-API-DMAC7.html) 1988-02-05

Family

ID=30370392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16955582U Granted JPS5974803U (ja) 1982-11-09 1982-11-09 真空排気系用冷却トラツプ

Country Status (1)

Country Link
JP (1) JPS5974803U (cg-RX-API-DMAC7.html)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5345672A (en) * 1976-10-08 1978-04-24 Hitachi Ltd Cold trap for collecting gas

Also Published As

Publication number Publication date
JPS5974803U (ja) 1984-05-21

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