JPS5974803U - 真空排気系用冷却トラツプ - Google Patents

真空排気系用冷却トラツプ

Info

Publication number
JPS5974803U
JPS5974803U JP16955582U JP16955582U JPS5974803U JP S5974803 U JPS5974803 U JP S5974803U JP 16955582 U JP16955582 U JP 16955582U JP 16955582 U JP16955582 U JP 16955582U JP S5974803 U JPS5974803 U JP S5974803U
Authority
JP
Japan
Prior art keywords
vacuum exhaust
cooling
exhaust system
trap
cooling trap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16955582U
Other languages
English (en)
Japanese (ja)
Other versions
JPS634487Y2 (cg-RX-API-DMAC7.html
Inventor
釼先　友明
草柳　政夫
Original Assignee
双葉酸素株式会社
ソニ−株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 双葉酸素株式会社, ソニ−株式会社 filed Critical 双葉酸素株式会社
Priority to JP16955582U priority Critical patent/JPS5974803U/ja
Publication of JPS5974803U publication Critical patent/JPS5974803U/ja
Application granted granted Critical
Publication of JPS634487Y2 publication Critical patent/JPS634487Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP16955582U 1982-11-09 1982-11-09 真空排気系用冷却トラツプ Granted JPS5974803U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16955582U JPS5974803U (ja) 1982-11-09 1982-11-09 真空排気系用冷却トラツプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16955582U JPS5974803U (ja) 1982-11-09 1982-11-09 真空排気系用冷却トラツプ

Publications (2)

Publication Number Publication Date
JPS5974803U true JPS5974803U (ja) 1984-05-21
JPS634487Y2 JPS634487Y2 (cg-RX-API-DMAC7.html) 1988-02-05

Family

ID=30370392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16955582U Granted JPS5974803U (ja) 1982-11-09 1982-11-09 真空排気系用冷却トラツプ

Country Status (1)

Country Link
JP (1) JPS5974803U (cg-RX-API-DMAC7.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5345672A (en) * 1976-10-08 1978-04-24 Hitachi Ltd Cold trap for collecting gas

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5345672A (en) * 1976-10-08 1978-04-24 Hitachi Ltd Cold trap for collecting gas

Also Published As

Publication number Publication date
JPS634487Y2 (cg-RX-API-DMAC7.html) 1988-02-05

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