JPS5974803U - Cooling trap for vacuum exhaust system - Google Patents
Cooling trap for vacuum exhaust systemInfo
- Publication number
- JPS5974803U JPS5974803U JP16955582U JP16955582U JPS5974803U JP S5974803 U JPS5974803 U JP S5974803U JP 16955582 U JP16955582 U JP 16955582U JP 16955582 U JP16955582 U JP 16955582U JP S5974803 U JPS5974803 U JP S5974803U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum exhaust
- cooling
- exhaust system
- trap
- cooling trap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はこの考案の実施例の縦断面図、第２図は同じく
横断面図、第３図は同じ（一部を破切した斜視図、第４
図はこの考案の他の実施例の一部縦断面図である。
１・・・・・・外側筒体、３・・・・・・内側筒体、６
，６ａ・・・・・・蓋板、７・・・・・・間隙部、３ａ
、 ８ｂ・・・・・・羽根板、１０・・・・・・冷媒
循環パイプ、１１−’−・・・・冷却体。
第４図Figure 1 is a longitudinal cross-sectional view of an embodiment of this invention, Figure 2 is a cross-sectional view, Figure 3 is the same (partially cut away perspective view, Figure 4 is a partially cutaway perspective view,
The figure is a partial vertical sectional view of another embodiment of this invention. 1... Outer cylindrical body, 3... Inner cylindrical body, 6
, 6a... Lid plate, 7... Gap, 3a
, 8b... Vane plate, 10... Refrigerant circulation pipe, 11-'-... Cooling body. Figure 4
Claims (1)
排気系に連通させると共に、内側筒体内に冷却媒体を装
入するようにした冷却トラップにおいて、前記内側筒体
の外壁に複数の羽根板を放射状に取付けて、筒体間隙に
蛇行通路を形成すると共に、内側筒体の内側には冷媒循
環パイプで構成した冷却体を着脱自在に嵌入したことを
特徴とした真空排気系用冷却トラップ。 ２ 蛇行通路は、上端縁を外側筒体の蓋板下面に当接さ
せた羽根板と、下端縁を外側筒体の底板上面に当接させ
た羽根板を交互に配置して形成した実用新案登録請求の
範囲第１項記載の真空排気系用冷却トラップ。 ３゛内側筒体は、外側筒体内に着脱自在に嵌装しである
実用新案登録請求の範囲第１項記載の真空排気系用冷却
トラップ。[Claims for Utility Model Registration] Cooling system in which 12 bottomed cylinders are fitted inside and outside, the gap between the cylinders is communicated with a vacuum exhaust system, and a cooling medium is charged into the inner cylinder. In the trap, a plurality of vanes are radially attached to the outer wall of the inner cylinder to form a meandering passage in the gap between the cylinders, and a cooling body composed of a refrigerant circulation pipe is detachably attached to the inside of the inner cylinder. A cooling trap for vacuum exhaust systems characterized by an inset. 2. A utility model in which the meandering passage is formed by alternately arranging vanes whose upper edges are in contact with the lower surface of the lid plate of the outer cylinder and vanes whose lower edges are in contact with the upper surface of the bottom plate of the outer cylinder. A cooling trap for a vacuum exhaust system according to claim 1. 3. The cooling trap for a vacuum exhaust system according to claim 1, wherein the inner cylindrical body is detachably fitted into the outer cylindrical body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16955582U JPS5974803U (en) | 1982-11-09 | 1982-11-09 | Cooling trap for vacuum exhaust system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16955582U JPS5974803U (en) | 1982-11-09 | 1982-11-09 | Cooling trap for vacuum exhaust system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5974803U true JPS5974803U (en) | 1984-05-21 |
| JPS634487Y2 JPS634487Y2 (en) | 1988-02-05 |
Family
ID=30370392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16955582U Granted JPS5974803U (en) | 1982-11-09 | 1982-11-09 | Cooling trap for vacuum exhaust system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5974803U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5345672A (en) * | 1976-10-08 | 1978-04-24 | Hitachi Ltd | Cold trap for collecting gas |
-
1982
- 1982-11-09 JP JP16955582U patent/JPS5974803U/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5345672A (en) * | 1976-10-08 | 1978-04-24 | Hitachi Ltd | Cold trap for collecting gas |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS634487Y2 (en) | 1988-02-05 |
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