JPS5345672A - Cold trap for collecting gas - Google Patents

Cold trap for collecting gas

Info

Publication number
JPS5345672A
JPS5345672A JP12038376A JP12038376A JPS5345672A JP S5345672 A JPS5345672 A JP S5345672A JP 12038376 A JP12038376 A JP 12038376A JP 12038376 A JP12038376 A JP 12038376A JP S5345672 A JPS5345672 A JP S5345672A
Authority
JP
Japan
Prior art keywords
cold trap
collecting gas
gas
chamber
gas chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12038376A
Other languages
Japanese (ja)
Inventor
Michio Kunikata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12038376A priority Critical patent/JPS5345672A/en
Publication of JPS5345672A publication Critical patent/JPS5345672A/en
Pending legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)

Abstract

PURPOSE: The above-mentioned apparatus which has the simple structure and a high reliability, can collect the gas efficiently and is obtained by installing the vacuum chamber, the nitrogen chamber and the gas chamber and the gas chamber from the upper part and providing a large number of cylindrical fins alternately from the upper and lower sides in the gas chamber.
COPYRIGHT: (C)1978,JPO&Japio
JP12038376A 1976-10-08 1976-10-08 Cold trap for collecting gas Pending JPS5345672A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12038376A JPS5345672A (en) 1976-10-08 1976-10-08 Cold trap for collecting gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12038376A JPS5345672A (en) 1976-10-08 1976-10-08 Cold trap for collecting gas

Publications (1)

Publication Number Publication Date
JPS5345672A true JPS5345672A (en) 1978-04-24

Family

ID=14784838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12038376A Pending JPS5345672A (en) 1976-10-08 1976-10-08 Cold trap for collecting gas

Country Status (1)

Country Link
JP (1) JPS5345672A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5974803U (en) * 1982-11-09 1984-05-21 双葉酸素株式会社 Cooling trap for vacuum exhaust system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5974803U (en) * 1982-11-09 1984-05-21 双葉酸素株式会社 Cooling trap for vacuum exhaust system
JPS634487Y2 (en) * 1982-11-09 1988-02-05

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