JPS6343888B2 - - Google Patents

Info

Publication number
JPS6343888B2
JPS6343888B2 JP58240039A JP24003983A JPS6343888B2 JP S6343888 B2 JPS6343888 B2 JP S6343888B2 JP 58240039 A JP58240039 A JP 58240039A JP 24003983 A JP24003983 A JP 24003983A JP S6343888 B2 JPS6343888 B2 JP S6343888B2
Authority
JP
Japan
Prior art keywords
silicon
single crystal
porous
region
crystal silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58240039A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60130842A (ja
Inventor
Takanobu Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EASTERN STEEL
Original Assignee
EASTERN STEEL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EASTERN STEEL filed Critical EASTERN STEEL
Priority to JP58240039A priority Critical patent/JPS60130842A/ja
Publication of JPS60130842A publication Critical patent/JPS60130842A/ja
Publication of JPS6343888B2 publication Critical patent/JPS6343888B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01—Manufacture or treatment

Landscapes

  • Element Separation (AREA)
JP58240039A 1983-12-20 1983-12-20 誘電体分離基板の製造方法 Granted JPS60130842A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58240039A JPS60130842A (ja) 1983-12-20 1983-12-20 誘電体分離基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58240039A JPS60130842A (ja) 1983-12-20 1983-12-20 誘電体分離基板の製造方法

Publications (2)

Publication Number Publication Date
JPS60130842A JPS60130842A (ja) 1985-07-12
JPS6343888B2 true JPS6343888B2 (enExample) 1988-09-01

Family

ID=17053558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58240039A Granted JPS60130842A (ja) 1983-12-20 1983-12-20 誘電体分離基板の製造方法

Country Status (1)

Country Link
JP (1) JPS60130842A (enExample)

Also Published As

Publication number Publication date
JPS60130842A (ja) 1985-07-12

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