JPS6343411U - - Google Patents
Info
- Publication number
- JPS6343411U JPS6343411U JP13596286U JP13596286U JPS6343411U JP S6343411 U JPS6343411 U JP S6343411U JP 13596286 U JP13596286 U JP 13596286U JP 13596286 U JP13596286 U JP 13596286U JP S6343411 U JPS6343411 U JP S6343411U
- Authority
- JP
- Japan
- Prior art keywords
- conductive thin
- insulating film
- thin films
- film
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims 6
- 239000010408 film Substances 0.000 claims 4
- 239000004020 conductor Substances 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Coils Or Transformers For Communication (AREA)
Description
第１図は本考案の一実施例の断面図、第２図は
導電路の平面図、第３図は同じく斜視図である。 １：シリコン基板、３，６：Ａｌ条、４：酸化
膜、５：コンタクト・ホール。
導電路の平面図、第３図は同じく斜視図である。 １：シリコン基板、３，６：Ａｌ条、４：酸化
膜、５：コンタクト・ホール。
Claims (1)
- 絶縁膜の一面上に形成された複数の平行帯状導
電性薄膜と、前記絶縁膜の他面上に形成された複
数の平行帯状導電性薄膜と、前記絶縁膜を貫通す
る接続孔内に充填されて絶縁膜の一面上の各導電
性薄膜の端部および他面上の各導電性薄膜の端部
間をそれぞれ接続する導体とが螺旋状の１本の導
電路をなすことを特徴とする薄膜インダクタ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13596286U JPS6343411U (ja) | 1986-09-04 | 1986-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13596286U JPS6343411U (ja) | 1986-09-04 | 1986-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6343411U true JPS6343411U (ja) | 1988-03-23 |
Family
ID=31038638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13596286U Pending JPS6343411U (ja) | 1986-09-04 | 1986-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6343411U (ja) |
-
1986
- 1986-09-04 JP JP13596286U patent/JPS6343411U/ja active Pending