JPS6342997Y2 - - Google Patents

Info

Publication number
JPS6342997Y2
JPS6342997Y2 JP1983115958U JP11595883U JPS6342997Y2 JP S6342997 Y2 JPS6342997 Y2 JP S6342997Y2 JP 1983115958 U JP1983115958 U JP 1983115958U JP 11595883 U JP11595883 U JP 11595883U JP S6342997 Y2 JPS6342997 Y2 JP S6342997Y2
Authority
JP
Japan
Prior art keywords
stage
air
static pressure
joint
flexible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983115958U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6022239U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11595883U priority Critical patent/JPS6022239U/ja
Publication of JPS6022239U publication Critical patent/JPS6022239U/ja
Application granted granted Critical
Publication of JPS6342997Y2 publication Critical patent/JPS6342997Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
JP11595883U 1983-07-25 1983-07-25 Ｘｙステ−ジ Granted JPS6022239U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11595883U JPS6022239U (ja) 1983-07-25 1983-07-25 Ｘｙステ−ジ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11595883U JPS6022239U (ja) 1983-07-25 1983-07-25 Ｘｙステ−ジ

Publications (2)

Publication Number Publication Date
JPS6022239U JPS6022239U (ja) 1985-02-15
JPS6342997Y2 true JPS6342997Y2 (OSRAM) 1988-11-10

Family

ID=30267499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11595883U Granted JPS6022239U (ja) 1983-07-25 1983-07-25 Ｘｙステ−ジ

Country Status (1)

Country Link
JP (1) JPS6022239U (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005268293A (ja) * 2004-03-16 2005-09-29 Psc Kk 微小移動機構
JP4794900B2 (ja) * 2005-05-02 2011-10-19 ピー・エス・シー株式会社 気体制御回転移動装置及び気体制御アクチュエータ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS529186A (en) * 1975-07-14 1977-01-24 Hitachi Ltd Machine tool
JPS5642831U (OSRAM) * 1979-09-12 1981-04-18

Also Published As

Publication number Publication date
JPS6022239U (ja) 1985-02-15

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