JPS6342324Y2 - - Google Patents
Info
- Publication number
- JPS6342324Y2 JPS6342324Y2 JP19009882U JP19009882U JPS6342324Y2 JP S6342324 Y2 JPS6342324 Y2 JP S6342324Y2 JP 19009882 U JP19009882 U JP 19009882U JP 19009882 U JP19009882 U JP 19009882U JP S6342324 Y2 JPS6342324 Y2 JP S6342324Y2
- Authority
- JP
- Japan
- Prior art keywords
- lens
- curvature
- optical axis
- prototype
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 26
- 238000003384 imaging method Methods 0.000 claims description 15
- 238000001514 detection method Methods 0.000 claims description 10
- 238000007689 inspection Methods 0.000 claims 1
- 230000002452 interceptive effect Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19009882U JPS5995205U (ja) | 1982-12-16 | 1982-12-16 | レ−ザ−干渉計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19009882U JPS5995205U (ja) | 1982-12-16 | 1982-12-16 | レ−ザ−干渉計 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5995205U JPS5995205U (ja) | 1984-06-28 |
| JPS6342324Y2 true JPS6342324Y2 (enExample) | 1988-11-07 |
Family
ID=30409680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19009882U Granted JPS5995205U (ja) | 1982-12-16 | 1982-12-16 | レ−ザ−干渉計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5995205U (enExample) |
-
1982
- 1982-12-16 JP JP19009882U patent/JPS5995205U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5995205U (ja) | 1984-06-28 |
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