JPS6341493B2 - - Google Patents

Info

Publication number
JPS6341493B2
JPS6341493B2 JP5165882A JP5165882A JPS6341493B2 JP S6341493 B2 JPS6341493 B2 JP S6341493B2 JP 5165882 A JP5165882 A JP 5165882A JP 5165882 A JP5165882 A JP 5165882A JP S6341493 B2 JPS6341493 B2 JP S6341493B2
Authority
JP
Japan
Prior art keywords
light
random pattern
main scale
pattern
fixed point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5165882A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58168914A (ja
Inventor
Shigeyuki Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP5165882A priority Critical patent/JPS58168914A/ja
Publication of JPS58168914A publication Critical patent/JPS58168914A/ja
Publication of JPS6341493B2 publication Critical patent/JPS6341493B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP5165882A 1982-03-30 1982-03-30 光学式定点検出装置 Granted JPS58168914A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5165882A JPS58168914A (ja) 1982-03-30 1982-03-30 光学式定点検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5165882A JPS58168914A (ja) 1982-03-30 1982-03-30 光学式定点検出装置

Publications (2)

Publication Number Publication Date
JPS58168914A JPS58168914A (ja) 1983-10-05
JPS6341493B2 true JPS6341493B2 (enrdf_load_stackoverflow) 1988-08-17

Family

ID=12892970

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5165882A Granted JPS58168914A (ja) 1982-03-30 1982-03-30 光学式定点検出装置

Country Status (1)

Country Link
JP (1) JPS58168914A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0365687U (enrdf_load_stackoverflow) * 1989-10-27 1991-06-26
JPH049290U (enrdf_load_stackoverflow) * 1990-05-11 1992-01-27
EP2650654A1 (en) 2012-04-11 2013-10-16 Mitutoyo Corporation Encoder

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60183818U (ja) * 1984-05-16 1985-12-06 東洋電装株式会社 回転エンコ−ダ
US5168364A (en) * 1988-11-30 1992-12-01 Canon Kabushiki Kaisha Image sensing apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0365687U (enrdf_load_stackoverflow) * 1989-10-27 1991-06-26
JPH049290U (enrdf_load_stackoverflow) * 1990-05-11 1992-01-27
EP2650654A1 (en) 2012-04-11 2013-10-16 Mitutoyo Corporation Encoder

Also Published As

Publication number Publication date
JPS58168914A (ja) 1983-10-05

Similar Documents

Publication Publication Date Title
US5302820A (en) Opto-electronic scale reading apparatus having an array of elongate photo-sensitive elements and a periodic light pattern
CA1300245C (en) Reference signal generation apparatus for position detector
US12359941B2 (en) Encoder apparatus
EP1577645B1 (en) Optical encoder
JPH0658779A (ja) 測定装置
JPH04157319A (ja) 影絵パターンを利用するエンコーダ
JPH0376428B2 (enrdf_load_stackoverflow)
JPS6341493B2 (enrdf_load_stackoverflow)
US11353342B2 (en) Shadow-cast encoder apparatus with scale and readhead producing a fringe pattern on the detector with a specific harmonic distortion
JPS6051650B2 (ja) 光電型エンコ−ダの零点検出装置
JPS61182522A (ja) リニアスケ−ル測定装置
JPS6118123B2 (enrdf_load_stackoverflow)
JPH0861990A (ja) エンコーダ
JP2004029019A (ja) 光学位置感知装置
JPS62128615A (ja) 光学式エンコ−ダ
JPS62172219A (ja) 回転検出器
JPS59211822A (ja) 変位変換器
JP2000241145A (ja) 回転角度検出装置
JPS6342420A (ja) 回転角検出器
JPS61117414A (ja) 光学式アブソリユ−ト形ロ−タリエンコ−ダ
JPH03152419A (ja) 光学式エンコーダ
JPS60171462A (ja) 光学式速度検出器
JPH02143113A (ja) 光学式エンコーダ
JPH06180239A (ja) 光学式インクリメンタルエンコーダ装置
JPS6264127A (ja) アブソリユ−トエンコ−ダ