JPS6341055B2 - - Google Patents
Info
- Publication number
- JPS6341055B2 JPS6341055B2 JP54134163A JP13416379A JPS6341055B2 JP S6341055 B2 JPS6341055 B2 JP S6341055B2 JP 54134163 A JP54134163 A JP 54134163A JP 13416379 A JP13416379 A JP 13416379A JP S6341055 B2 JPS6341055 B2 JP S6341055B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- organic semiconductor
- weight
- photoresist film
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 46
- 229920002120 photoresistant polymer Polymers 0.000 claims description 42
- 239000000758 substrate Substances 0.000 claims description 25
- 230000007423 decrease Effects 0.000 claims description 12
- 229910052785 arsenic Inorganic materials 0.000 claims description 11
- 230000001681 protective effect Effects 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 9
- 239000010409 thin film Substances 0.000 claims 2
- 230000035945 sensitivity Effects 0.000 description 20
- 239000004020 conductor Substances 0.000 description 8
- 229910052711 selenium Inorganic materials 0.000 description 8
- 239000011521 glass Substances 0.000 description 6
- 229920003227 poly(N-vinyl carbazole) Polymers 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000000975 dye Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910018110 Se—Te Inorganic materials 0.000 description 1
- PJANXHGTPQOBST-VAWYXSNFSA-N Stilbene Natural products C=1C=CC=CC=1/C=C/C1=CC=CC=C1 PJANXHGTPQOBST-VAWYXSNFSA-N 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000003219 pyrazolines Chemical class 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 150000004771 selenides Chemical class 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- PJANXHGTPQOBST-UHFFFAOYSA-N stilbene Chemical compound C=1C=CC=CC=1C=CC1=CC=CC=C1 PJANXHGTPQOBST-UHFFFAOYSA-N 0.000 description 1
- 235000021286 stilbenes Nutrition 0.000 description 1
- 150000004763 sulfides Chemical class 0.000 description 1
- 150000004772 tellurides Chemical class 0.000 description 1
- ANRHNWWPFJCPAZ-UHFFFAOYSA-M thionine Chemical compound [Cl-].C1=CC(N)=CC2=[S+]C3=CC(N)=CC=C3N=C21 ANRHNWWPFJCPAZ-UHFFFAOYSA-M 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Landscapes
- Light Receiving Elements (AREA)
- Photoreceptors In Electrophotography (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13416379A JPS5659238A (en) | 1979-10-19 | 1979-10-19 | Photosensitive film |
| US06/158,369 US4314014A (en) | 1979-06-15 | 1980-06-11 | Electrophotographic plate and process for preparation thereof |
| DE8080302002T DE3062885D1 (en) | 1979-06-15 | 1980-06-13 | Electrophotographic plate and a process for preparation of such a plate |
| EP80302002A EP0021751B1 (en) | 1979-06-15 | 1980-06-13 | Electrophotographic plate and a process for preparation of such a plate |
| CA000354038A CA1142789A (en) | 1979-06-15 | 1980-06-16 | Electrophotographic plate and process for preparation thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13416379A JPS5659238A (en) | 1979-10-19 | 1979-10-19 | Photosensitive film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5659238A JPS5659238A (en) | 1981-05-22 |
| JPS6341055B2 true JPS6341055B2 (enrdf_load_stackoverflow) | 1988-08-15 |
Family
ID=15121923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13416379A Granted JPS5659238A (en) | 1979-06-15 | 1979-10-19 | Photosensitive film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5659238A (enrdf_load_stackoverflow) |
-
1979
- 1979-10-19 JP JP13416379A patent/JPS5659238A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5659238A (en) | 1981-05-22 |
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