JPS634058A - 薄膜形成方法 - Google Patents

薄膜形成方法

Info

Publication number
JPS634058A
JPS634058A JP14883386A JP14883386A JPS634058A JP S634058 A JPS634058 A JP S634058A JP 14883386 A JP14883386 A JP 14883386A JP 14883386 A JP14883386 A JP 14883386A JP S634058 A JPS634058 A JP S634058A
Authority
JP
Japan
Prior art keywords
panel
panels
shaped substrates
rotating
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14883386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0373630B2 (enrdf_load_stackoverflow
Inventor
Shinji Noguchi
晋治 野口
Youtarou Nakao
中尾　養太郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHINCHIYOU PLAST SHOMEI KK
Panasonic Electric Works Co Ltd
Original Assignee
SHINCHIYOU PLAST SHOMEI KK
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHINCHIYOU PLAST SHOMEI KK, Matsushita Electric Works Ltd filed Critical SHINCHIYOU PLAST SHOMEI KK
Priority to JP14883386A priority Critical patent/JPS634058A/ja
Publication of JPS634058A publication Critical patent/JPS634058A/ja
Publication of JPH0373630B2 publication Critical patent/JPH0373630B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP14883386A 1986-06-24 1986-06-24 薄膜形成方法 Granted JPS634058A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14883386A JPS634058A (ja) 1986-06-24 1986-06-24 薄膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14883386A JPS634058A (ja) 1986-06-24 1986-06-24 薄膜形成方法

Publications (2)

Publication Number Publication Date
JPS634058A true JPS634058A (ja) 1988-01-09
JPH0373630B2 JPH0373630B2 (enrdf_load_stackoverflow) 1991-11-22

Family

ID=15461752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14883386A Granted JPS634058A (ja) 1986-06-24 1986-06-24 薄膜形成方法

Country Status (1)

Country Link
JP (1) JPS634058A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010095745A (ja) * 2008-10-15 2010-04-30 Sumitomo Electric Ind Ltd 成膜方法及び成膜装置
JP2012017511A (ja) * 2010-07-09 2012-01-26 Optorun Co Ltd 成膜基板ホルダ及び成膜装置
JP2012224878A (ja) * 2011-04-15 2012-11-15 Nissan Motor Co Ltd 蒸着装置用ワーク移動機構とこれを用いた蒸着方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010095745A (ja) * 2008-10-15 2010-04-30 Sumitomo Electric Ind Ltd 成膜方法及び成膜装置
JP2012017511A (ja) * 2010-07-09 2012-01-26 Optorun Co Ltd 成膜基板ホルダ及び成膜装置
JP2012224878A (ja) * 2011-04-15 2012-11-15 Nissan Motor Co Ltd 蒸着装置用ワーク移動機構とこれを用いた蒸着方法

Also Published As

Publication number Publication date
JPH0373630B2 (enrdf_load_stackoverflow) 1991-11-22

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term