JPS6340016B2 - - Google Patents
Info
- Publication number
- JPS6340016B2 JPS6340016B2 JP56202081A JP20208181A JPS6340016B2 JP S6340016 B2 JPS6340016 B2 JP S6340016B2 JP 56202081 A JP56202081 A JP 56202081A JP 20208181 A JP20208181 A JP 20208181A JP S6340016 B2 JPS6340016 B2 JP S6340016B2
- Authority
- JP
- Japan
- Prior art keywords
- flushing
- emitter
- power source
- power
- flashing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000011010 flushing procedure Methods 0.000 claims description 22
- 238000000605 extraction Methods 0.000 claims description 20
- 238000010438 heat treatment Methods 0.000 description 11
- 230000001133 acceleration Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 238000010849 ion bombardment Methods 0.000 description 7
- 239000000523 sample Substances 0.000 description 7
- 238000001179 sorption measurement Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/242—Filament heating power supply or regulation circuits
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20208181A JPS58102452A (ja) | 1981-12-14 | 1981-12-14 | 電界放射型電子銃 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20208181A JPS58102452A (ja) | 1981-12-14 | 1981-12-14 | 電界放射型電子銃 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58102452A JPS58102452A (ja) | 1983-06-18 |
JPS6340016B2 true JPS6340016B2 (fr) | 1988-08-09 |
Family
ID=16451640
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20208181A Granted JPS58102452A (ja) | 1981-12-14 | 1981-12-14 | 電界放射型電子銃 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58102452A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05259762A (ja) * | 1992-03-10 | 1993-10-08 | Yokowo Co Ltd | 高周波回路構造 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0722009B2 (ja) * | 1982-06-21 | 1995-03-08 | 株式会社日立製作所 | 電界放射電子銃 |
JPS60225345A (ja) * | 1984-04-20 | 1985-11-09 | Hitachi Ltd | 電界放射方法およびそれに用いる電子線装置 |
JP2852713B2 (ja) * | 1992-03-19 | 1999-02-03 | 株式会社日立製作所 | 電子顕微鏡及びその使用方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4931264A (fr) * | 1972-07-21 | 1974-03-20 | ||
JPS55155453A (en) * | 1979-05-22 | 1980-12-03 | Jeol Ltd | Electric field emission type electron gun |
-
1981
- 1981-12-14 JP JP20208181A patent/JPS58102452A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4931264A (fr) * | 1972-07-21 | 1974-03-20 | ||
JPS55155453A (en) * | 1979-05-22 | 1980-12-03 | Jeol Ltd | Electric field emission type electron gun |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05259762A (ja) * | 1992-03-10 | 1993-10-08 | Yokowo Co Ltd | 高周波回路構造 |
Also Published As
Publication number | Publication date |
---|---|
JPS58102452A (ja) | 1983-06-18 |
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