JPS6339963Y2 - - Google Patents

Info

Publication number
JPS6339963Y2
JPS6339963Y2 JP1980165224U JP16522480U JPS6339963Y2 JP S6339963 Y2 JPS6339963 Y2 JP S6339963Y2 JP 1980165224 U JP1980165224 U JP 1980165224U JP 16522480 U JP16522480 U JP 16522480U JP S6339963 Y2 JPS6339963 Y2 JP S6339963Y2
Authority
JP
Japan
Prior art keywords
projection
alignment
wafer
optical system
original
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980165224U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5788125U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980165224U priority Critical patent/JPS6339963Y2/ja
Publication of JPS5788125U publication Critical patent/JPS5788125U/ja
Application granted granted Critical
Publication of JPS6339963Y2 publication Critical patent/JPS6339963Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Projection-Type Copiers In General (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP1980165224U 1980-11-18 1980-11-18 Expired JPS6339963Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980165224U JPS6339963Y2 (enrdf_load_stackoverflow) 1980-11-18 1980-11-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980165224U JPS6339963Y2 (enrdf_load_stackoverflow) 1980-11-18 1980-11-18

Publications (2)

Publication Number Publication Date
JPS5788125U JPS5788125U (enrdf_load_stackoverflow) 1982-05-31
JPS6339963Y2 true JPS6339963Y2 (enrdf_load_stackoverflow) 1988-10-19

Family

ID=29523926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980165224U Expired JPS6339963Y2 (enrdf_load_stackoverflow) 1980-11-18 1980-11-18

Country Status (1)

Country Link
JP (1) JPS6339963Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5642226A (en) * 1979-09-17 1981-04-20 Hitachi Ltd Projection type exposure device

Also Published As

Publication number Publication date
JPS5788125U (enrdf_load_stackoverflow) 1982-05-31

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